摘要
全面论述了激光数字平面检测系统中的核心技术———干涉波面数字化分析理论和处理方法,对光学干涉波面的拟合函数系的选择、拟合算法以及系统像差和被测表面平面误差类型判定方法进行了深入研究,提出了在"Zernike像差空间"确定激光数字平面检测系统精度的理论和方法.
Selection of function family and algorithm to fit optical interference wave surface, system aberration and methods to classify the type of surface shape in analysis of plane error with Zernike polynomials are researched in depth. A new theory and method is put out with an error theory to appraise precision of the system objectively to inspect surfaces of the optical plane glass with laser quantizing technique.
出处
《计算物理》
CSCD
北大核心
2003年第6期514-520,共7页
Chinese Journal of Computational Physics
