摘要
聚焦离子束技术是一项有前途的微细加工技术,聚焦光学系统的设计是该技术的关键之一。本文介绍用于聚焦离子光学系统的静电透镜特性计算程序,该程序可计算任何旋转轴对称静电透镜的特性,可用于寻求球差和色差系数较小的静电透镜的电极结构。
FIBS (Focused Ion Beam system) is one of prospective fine microfabri-cation technologies. The most important key to this system is its optics design.This paper discusses the computer program applied to compute the potential distribution in any rotationally symmetric electrostatic lens.The axial potential distribution can be used for computing the optical properties and therefore seeking the lens configuration in which the spherical and chromatic aberration coefficients are small.
出处
《微细加工技术》
1992年第4期1-5,共5页
Microfabrication Technology
关键词
静电
透镜
特性
聚焦离子束
electrostatic lens
finitedement method
FORTRAN language
paraxial trajectory
spherical and chromatic aberration coefficients
