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SnO_2纳米薄膜的制备、显微结构及气敏性能 被引量:8

Preparation, Microstructure and Gas Sensitivity of SnO_2 Thin Films
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摘要 以SnCl2 ·2H2 O和无水乙醇为原料 ,采用溶胶 凝胶方法制备了SnO2 透明溶胶 ,通过浸渍提拉技术制备了SnO2 纳米薄膜 ;利用XRD、UV和AFM技术研究了薄膜的结构和形貌。结果表明 ,SnO2 纳米薄膜的球形粒径约 5nm ;随着薄膜沉积层数的增加 ,其电子光谱的吸收呈线性增加 ,膜电阻则逐渐减小并趋于稳定值。薄膜对 1 0 0~ 1 0 0 0 μL/L的乙醇和丙酮都有较好的敏感性和响应 恢复特性 ,对 80 0 μL/L的气体响应和恢复时间分别为 3 0和 60s。 Transparent SnO 2 sols were obtained by a sol-gel method from SnCl 2·2H 2O in absolute ethanol, and SnO 2 thin films were prepared by dip-coating technique. The microstructure of thin films has been studied by XRD、AFM and UV-Vis spectra analysis. The average size of the spherical SnO 2 particles obtained is 5 nm. The absorbance of the film increases linearly with the ply deposited. The sheet resistance of the multi-ply SnO 2 decreases with the increase of the film thickness to a constant value. The thin films have good sensitivity and response-recovery properties to ethanol and acetone from 100 to 1 000 μL/L at room temperature. The response and recovery times of the film to 800 μL/L gas are 30 and 60 s, respectively.
出处 《应用化学》 CAS CSCD 北大核心 2004年第2期122-125,共4页 Chinese Journal of Applied Chemistry
基金 国家自然科学基金 ( 2 0 10 10 0 3 ) 黑龙江省高校骨干教师创新计划资助 黑龙江省自然科学基金资助
关键词 SNO2 薄膜 溶胶-凝胶法 气敏性能 SnO 2 thin film,sol-gel method,gas sensitivity
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