摘要
五维微力 /力矩传感器应用于微装配机器人操作末端的微力觉感知 ,能够同时测量三个方向的微力Fx、Fy、Fz 和两个方向的微力矩Mx 和My;测力量程± 1N ,测力矩量程± 0 .0 5N·m ;放大电路集成在传感器的本体中。应用力学理论对本体进行理论分析 ,推导出计算公式 ,求出本体的应变 ;并采用有限元分析软件进行仿真 ,分析应变 。
The development of a five dimension micro force/torque sensor is described,which is used in the micromanipulation robot for measuring micro forces Fx , Fy , Fz and micro torques Mx, My simultaneously. Rated micro forces reach ±1N and rated micro torques reach ±0.05N·m. By the theory of mechanics, the equations to predict the bending strains under the forces or the torque are derived. The finite element method analysis for confirming the strains from the theoretical analysis is performed. A method of nonlinear calibration is also determined.
出处
《微纳电子技术》
CAS
2003年第7期467-469,共3页
Micronanoelectronic Technology
基金
国家 8 63计划资助项目 (2 0 0 2AA40 44 5 0)
国防基础科研项目
