摘要
Ti O2-organic multilayered nanocomposite films were deposited on a self-assembled monolayer-coated silicon substrate based on layer-by-layer technique and chemical bath deposition method by a hydrolysis of Ti Cl4 in an acid aqueous solution. The chemical compositions, surface morphologies and mechanical properties of the films were investigated by X-ray photoelectron spectrometer(XPS), scanning electron microscopy(SEM) and nanoindentation depth-sensing technique, respectively. The results indicate that the major chemical compositions of the films are Ti and O. The principal mechanism for the nucleation and growth of the films is homogeneous nucleation, and the layer number of films has great influence on the surface morphology and roughness of the films. In addition, mechanical nanoindentation testing presents a significant increase in hardness and fracture toughness of titanium dioxide multilayered films compared with single-layer titanium dioxide thin film.
基于层层自组装技术和化学与沉积方法,由四氯化钛在酸性水溶液中水解在含有自组装涂层的硅基底上沉积二氧化钛有机多层纳米复合薄膜。分别采用X射线光电子能谱(XPS)、扫描电子显微镜(SEM)和纳米压痕深度传感技术研究薄膜的化学组成、表面形貌和力学性能。结果表明,薄膜的主要化学成分为Ti和O,成核和生长的主要机理是均相成核,薄膜层数对薄膜的表面形貌和粗糙度影响很大。此外,纳米压痕实验表明,与单层的二氧化钛薄膜相比,多层纳米二氧化钛薄膜的硬度和断裂韧性得到显著提高。
基金
Projects(51204036,51234009)supported by the National Natural Science Foundation of China
Project(2014CB643405)supported by the National Basic Research Program of China
