摘要
介绍了目前国内外射频系统中所涉及的静电梳状谐振器、自由梁谐振器、薄膜声体波谐振器、腔结构谐振器、平行谐振器结构HF带通滤波器、折叠梁MF滤波器、分布传输线可调滤波器等MEMS谐振、滤波器件。对这些器件的结构原理、制造方法以及性能指标作了分析。把这些器件的性能指标和目前射频系统中谐振器、滤波器的性能要求进行比较,分析了这些器件的应用前景。最后,对基于MEMS技术的射频谐振器、滤波器发展作出展望。
The development of MEMS resonators and filters of RF systems including capacitive-comb transduced micro-mechanical resonator, free-free beam micro-mechanical resonator, FBAR resonator, cavity resonator, HF micro-mechanical bandpass filter, MF micro-mechanical filter, and transmission lines for tunable filter, both at home and abroad is reviewed, and the structures, performance and fabrications of these components are analyzed. The applications of these components are forecast from the performance requirements for current RF systems, and the development trend of MEMS resonators and filters is discussed as well.
出处
《光学精密工程》
EI
CAS
CSCD
2004年第1期47-54,共8页
Optics and Precision Engineering
基金
重庆市教委科学技术研究项目(No.D2002 26)
重庆邮电学院博士科研基金项目(No.A2002 36)
