摘要
对ITO商业复合粉末应用爆炸冲击方法压实烧结 ,并对样品进行了XRD和ESM检测。通过粉末和压实后样品的XRD图及SEM照片的比较 ,发现在爆炸冲击压实纳米ITO陶瓷粉末时 ,能够使晶粒度减小 ,有助于后续烧结密实过程中控制ITO靶材的晶粒度的过分长大 ;SEM图片显示 ,在 12 0 0℃烧结的靶材微观结构比较均匀。本文探索了纳米ITO粉末冲击压实烧结的微观机理 ,并与以往人们对粉末的冲击沉能结论进行了比较 ,得出结论 :压实烧结的主要机理是破碎填充效应 ,使得一部分粉末颗粒表面原子间的距离达到了点阵量级 ,从而产生键合力 ;一部分表面原子间的距离达到了一定小的程度 ,VanderWaals力使其结合。
By the means of explosion,the ITO business compound power is consolidated and then sintered to ITO bulk,which is qualified under the inspection of XRD and SEM.Comparing the different graphs of XRD of powder and bulk,we obtain that the ITO crystal size can be minimized after explosion consolidation,which contributes to controlling the crystal size of the ITO target development during the following sintering.The graph of SEM depicts that the microstructure of the ITO target is comparatively uniform after the ITO target is sintered at the temperature of 1200℃.An attempt,in this article,has been made to the micro-mechanism of the ITO power after explosion consolidation and sintering,and the comparison and contrast with the former conclusion about impacting power deposition.A conclusion is attained that the major mechanism of the ITO powder's consolidation and sintering is the grain crashed into interspace.That is,the attractive force is occurred when the crash and consolidation makes some distance between grains reaching lattice grade.Meanwhile,some distance does not reach lattice grade but is close enough,therefore Vander Waals force is strong enough to bond the grains each other.
出处
《材料科学与工程学报》
CAS
CSCD
北大核心
2004年第1期12-14,共3页
Journal of Materials Science and Engineering
基金
国家自然科学基金资助 (基金号 :1 0 1 72 0 2 5)
