摘要
介绍了纳米样板的研究现状及制备工艺,特别对扫描探针显微镜(SPM)表面局域氧化反应工艺进行了详述;分析了原子力显微镜(AFM)探针诱导局域氧化工艺的原理及其影响参数,原理为高度局域化的电化学反应,影响参数包括探针上所施加的电压、扫描速度、探针曲率半径、相对湿度以及氧化物厚度等;用该方法分别制备了5条栅线和7条栅线的一维纳米结构样板,并对7条栅线的纳米结构样板的精度和不确定度影响因素进行了分析。
The research situation and fabrication techniques of nano-scale sample-plate are introduced, and the local surface oxidation with SPM is discussed in detail. The principle and parameters of tip-induced local surface oxidation with AFM are presented. 1D nano-scale sample-plates with 5 and 7 grating lines are fabricated with this technique, respectively. The fabrication precision of the 1D nano-scale sample-plate with 7 grating lines, such as critical dimensions, linearity as well as parallelism of the grating lines are analyzed. Besides, the influencing factors of uncertainty of nano-scale sample-plates are investigated also.
出处
《计量学报》
CSCD
北大核心
2004年第1期6-10,42,共6页
Acta Metrologica Sinica
基金
高等学校骨干教师资助计划项目
国家教育部博士点基金项目(1999069821)
关键词
计量学
原子力显微镜
纳米样板
探针诱导阳极氧化
线宽
直线度
平行度
不确定度
Metrology
Atomic force microscope (AFM)
Nano-scale sample-plate
Tip-induced anodization oxidation
Critical dimension
Linearity
Parallelism
Uncertainty