摘要
采用热灯丝化学气相沉积(CVD)方法,通过独特的衬底表面预处理工艺及控制沉积参数,制备出了晶粒细、表面光滑的单片金刚石膜样品。采用SEM观察了样品生长面的表面形貌,通过激光Raman对样品进行了金刚石结构的确认。在450～4000cm^(-1)范围测试了金刚石膜样品的红外光学透过谱,通过分析认为:平均透过率随波长减小而衰减主要是由于金刚石膜生长面的表面粗糙度引起光谱散射造成的。
Free-standing diamond films of small grain size and smooth growth surface were prepared using hot filamentassisted chemical vapor deposition (CVD) by characteristic pretreatment of the substrate surface and by controlling the deposition parameters. SEM was used to examine the morphology of the growth surface. Raman spectra were measured on both sides of the diamond films to detect the diamond structure. Infrared optical transmission spectra were collected over the range of 450～4000cm^(-1). The increawavelength is believed due to the specular scattering loss of the rough growth surface.
出处
《真空科学与技术》
CSCD
1992年第6期448-452,共5页
Vacuum Science and Technology
