摘要
介绍了恒压式气体微流量计的测量原理及其测控系统的设计方案 ,对压力测量、变容室气体温度测量、变容室体积变化率测量、恒压控制等关键技术进行了详细说明。该测控系统的应用可以使气体微流量计的测量范围和不确定度均优于设计指标。
The measurement principle and design scheme of a measurement/control system for constant-pressure gas micro-flowmeter are introduced. The key techniques, including the measurements of pressure, gas temperature and volume changing rates in variable volume chamber and constant pressure control, are presented in detail. Using this measurement/control system, the measurement range and uncertainty of constant-pressure gas micro-flowmeter show better than design target.
出处
《真空》
CAS
北大核心
2004年第2期37-40,共4页
Vacuum
