摘要
基于对光栅线性传感器(DPROS)和2m光栅检刻机检测系统的研制,该文叙述了一种获取高质量光栅莫尔条纹信号的设计方法,并在数字式量仪的系列开发中得到应用验证.
Based on research of the grating linear transducers and a 2-meter grating measuring device, a design method that can be used to obtain high-precision grating Moiré fringe is proposed. This method is used in developing a digital measuring device.
出处
《上海大学学报（自然科学版）》
CAS
CSCD
2004年第2期129-132,共4页
Journal of Shanghai University:Natural Science Edition
