摘要
本文以气体动力学理论为基础，论述了如何通过改进扩散泵的第一级喷咀来提高扩散泵的抽气速率。
This paper is based on the theory of gas dynamics, by means of improving the first nozzle of diffusion pump in order to increase the pumping speed of diffusion pump are reported in the paper.
出处
《真空》
CAS
北大核心
1992年第2期31-33,共3页
Vacuum
