摘要
该文介绍了一种制备ZnO薄膜的简便方法:先在真空中蒸发沉淀Zn薄膜,再在空气中进行加热退火处理,使薄膜结晶变成ZnO薄膜。薄膜的X射线衍射谱(XRD)表明使用上述方法得到的是结晶良好的ZnO薄膜,对薄膜的发光特性研究表明,薄膜的光致发光谱(PL)与薄膜的制备条件密切相关。同时还系统研究了薄膜的PL谱与退火温度、退火时间和通气与否的关系,对实验结果给出了初步的解释。
A simple method to prepare ZnO thin film is introduced. Zn film is firstly deposited in vacuum, then the film is annealed in atmosphere to make it to be ZnO crystal. The XRD shows that the film got by the above method is ZnO crystal. The characteristic of luminescence indicates that the photoluminescence(PL) spectrum of the film is influenced by the preparation conditions, including the annealing temperature,the annealing time and annealing in atmosphere or vacuum.The relationship of these factors to the PL spectrum is studied,and a preliminary explanation is given.
出处
《合肥工业大学学报（自然科学版）》
CAS
CSCD
2004年第3期310-312,共3页
Journal of Hefei University of Technology：Natural Science
关键词
X射线衍射谱
光致发光谱
ZNO薄膜
制备方法
X-ray diffraction(XRD) spectrum
photoluminescence(PL) spectrum
ZnO thin film
preparation method
