摘要
简介了微电子机械系统MEMS的基本概念、构成及显著特点 ,并对微电子机械系统的典型器件如传感器 ,执行器等作了介绍与分析 ,提出了微系统之间要研究的问题 ;
The essay introduces the basic concept of MEMS and its constrcture as well as well as notable devices such as sensor, acutuator with detailed analysis. Issuing questions existed between micro systems,and summarized MEMS future application.
