摘要
设计制成一种数字化电磁驱动微机械MOEMS可调光衰减器 与传统可调光衰减器相比 ,该器件不仅可实现光衰减量数字化电控调节 ,并且可通过器件结构的优化设计 ,对光衰减量的非线性进行补偿 ,最终得到线性衰减 器件性能测试表明 ,插入损耗IL <0 .3dB ,偏振相关损耗PDL <0 .1dB ,波长相关损耗WDL <0 .2dB ,衰减范围 0～ 4 0dB ,回波损耗RL >5
A novel micro-machining based digital MOEMS variable optical attenuator(VOA)was presented. The design of the VOA was optimized to achieve a linear response and digitized variation of attenuation. The characteristics of the device were analyzed with a scalar wave theory based numerical simulation. The performance test of the device showed a low insertion loss(0.3 dB), wave dependent loss(0.1 dB), return loss(>50 dB), and wide dynamic response(0～40 dB).
出处
《光子学报》
EI
CAS
CSCD
北大核心
2004年第7期826-829,共4页
Acta Photonica Sinica
关键词
微光机电系统(MOEMS)
可变光衰减器
电磁驱动
微位移驱动器
MOEMS(Micro-Optical-Electro-Mechanical Systems)
Digital variable optical attenuator(DVOA)
Electromagnetic moving
Micro displacement actuator
