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基于Au/Au直接键合的高亮度ODRLED 被引量:4
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作者 李一博 郭霞 +2 位作者 关宝路 揣东旭 沈光地 《固体电子学研究与进展》 CAS CSCD 北大核心 2009年第3期399-402,449,共5页
提出利用Au/Au直接键合制作高亮度全方位反光镜(ODR)LED的新工艺。工艺采用Si做转移衬底,氧化铟锡(ITO)做窗口层和缓冲层,在0.35mPa压力,260°C的低温下实现Au/Au固相直接键合。直接键合后,Al-GaInP有源区与Si衬底结合牢固完整,保... 提出利用Au/Au直接键合制作高亮度全方位反光镜(ODR)LED的新工艺。工艺采用Si做转移衬底,氧化铟锡(ITO)做窗口层和缓冲层,在0.35mPa压力,260°C的低温下实现Au/Au固相直接键合。直接键合后,Al-GaInP有源区与Si衬底结合牢固完整,保证了全方位反光镜的性能。在正向电流20mA下,键合ODR结构LED的正向压降是常规吸收衬底LED的80%,光输出功率和流明效率是常规吸收衬底LED的1.5倍和2.1倍。 展开更多
关键词 铝镓铟磷 硅衬底 氧化铟锡 全方位反光镜 直接键合 发光二极管
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Power dissipation in oxide-confined 980-nm vertical-cavity surface-emitting lasers 被引量:2
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作者 史国柱 关宝路 +2 位作者 李硕 王强 沈光地 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第1期257-262,共6页
We presented 980-nm oxide-confined vertical-cavity surface-emitting lasers (VCSELs) with a 16 -um oxide aperture. Optical power, voltage, and emission wavelength are measured in an ambient temperature range of 5 ℃-... We presented 980-nm oxide-confined vertical-cavity surface-emitting lasers (VCSELs) with a 16 -um oxide aperture. Optical power, voltage, and emission wavelength are measured in an ambient temperature range of 5 ℃-80 ℃. Measurements combined with an empirical model are used to analyse the power dissipation in the device and the physical mechanism contributing to the thermal rollover phenomenon in VCSEL. It is found that the carrier leakage induced selfheating in the active region and the Joule heating caused by the series resistance are the main sources of power dissipation. In addition, carrier leakage induced self-heating increases as the injection current increases, resulting in a rapid decrease of the internal quantum efficiency, which is a dominant contribution to the thermal rollover of the VCSEL at a larger current. Our study provides useful guidelines to design a 980-nm oxide-confined VCSEL for thermal performance enhancement. 展开更多
关键词 vertical-cavity surface-emitting lasers power dissipation thermal rollover
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