对国产工艺的电荷耦合器件进行了质子、中子、^(60)Co-γ射线辐照试验,研究了不同粒子辐照对器件饱和输出电压的影响。试验结果显示在质子、γ射线辐照下,电荷耦合器件的饱和输出电压显著退化,而在1 Me V中子辐照下,饱和输出电压基本保...对国产工艺的电荷耦合器件进行了质子、中子、^(60)Co-γ射线辐照试验,研究了不同粒子辐照对器件饱和输出电压的影响。试验结果显示在质子、γ射线辐照下,电荷耦合器件的饱和输出电压显著退化,而在1 Me V中子辐照下,饱和输出电压基本保持不变,表现出较好的抗中子能力。分析认为饱和输出电压的退化主要受电离总剂量效应影响,一方面辐射感生界面态导致阈值电压正向漂移使耗尽层可存储最大电荷量下降;另一方面电离辐射损伤使电荷耦合器件片上放大器增益减小导致饱和输出电压下降。展开更多
为获得对In0.53Ga0.47As/In P材料在电子束辐照下的光致发光谱变化规律,开展了1 Me V电子束辐照试验,注量为5×1012—9×1014cm-2.样品选取量子阱材料和体材料,在辐照前后,进行了光致发光谱测试,得到了不同结构In0.53Ga0.47As/I...为获得对In0.53Ga0.47As/In P材料在电子束辐照下的光致发光谱变化规律,开展了1 Me V电子束辐照试验,注量为5×1012—9×1014cm-2.样品选取量子阱材料和体材料,在辐照前后,进行了光致发光谱测试,得到了不同结构In0.53Ga0.47As/In P材料在1 Me V电子束辐照下的不同变化规律;对比分析了参数退化的物理机理.结果显示:试验样品的光致发光峰强度随着辐照剂量增大而显著退化.体材料最先出现快速退化,而五层量子阱在注量达到6×1014cm-2时,就已经退化至辐照前的9%.经分析认为原因有:1)电子束进入样品后,与材料晶格发生能量传递,破坏晶格完整性,致使产生的激子数量减少,光致发光强度降低;电子束辐照在材料中引入缺陷,增加了非辐射复合中心密度,导致载流子迁移率降低.2)量子阱的二维限制作用使载流子运动受限,从而能够降低载流子与非辐射复合中心的复合概率;敏感区域截面积相同条件下,体材料比量子阱材料辐射损伤更为严重.3)量子阱的层数越多,则异质结界面数越多,相应的产生的界面缺陷数量也随之增多,辐射损伤越严重.展开更多
Radiation effects on complementary metal-oxide-semiconductor（CMOS） active pixel sensors（APS） induced by proton and γ-ray are presented. The samples are manufactured with the standards of 0.35 μm CMOS technology....Radiation effects on complementary metal-oxide-semiconductor（CMOS） active pixel sensors（APS） induced by proton and γ-ray are presented. The samples are manufactured with the standards of 0.35 μm CMOS technology. Two samples have been irradiated un-biased by 23 MeV protons with fluences of 1.43 × 10^11 protons/cm^2 and 2.14 × 10^11 protons/cm-2,respectively, while another sample has been exposed un-biased to 65 krad（Si） ^60Co γ-ray. The influences of radiation on the dark current, fixed-pattern noise under illumination, quantum efficiency, and conversion gain of the samples are investigated. The dark current, which increases drastically, is obtained by the theory based on thermal generation and the trap induced upon the irradiation. Both γ-ray and proton irradiation increase the non-uniformity of the signal, but the nonuniformity induced by protons is even worse. The degradation mechanisms of CMOS APS image sensors are analyzed,especially for the interaction induced by proton displacement damage and total ion dose（TID） damage.展开更多
对某国产0.5μm工艺制造的互补金属氧化物半导体有源像素传感器进行了10 Me V质子辐射试验,当辐射注量达到预定注量点时,采用离线的测试方法,定量测试了器件暗信号的变化情况.试验结果表明,随着辐射注量的增加暗信号迅速增大.采用MULASS...对某国产0.5μm工艺制造的互补金属氧化物半导体有源像素传感器进行了10 Me V质子辐射试验,当辐射注量达到预定注量点时,采用离线的测试方法,定量测试了器件暗信号的变化情况.试验结果表明,随着辐射注量的增加暗信号迅速增大.采用MULASSIS(multi-layered shielding simulation software)软件计算了电离损伤剂量和位移损伤剂量,在与γ辐射试验数据对比的基础上,结合器件结构和工艺参数,建立了分离质子辐射引起的电离效应和位移效应理论模型,深入分析了器件暗信号的退化机理.研究结果表明,对该国产器件而言,电离效应导致的表面暗信号和位移效应导致的体暗信号对整个器件暗信号退化的贡献大致相当.展开更多
文摘对国产工艺的电荷耦合器件进行了质子、中子、^(60)Co-γ射线辐照试验,研究了不同粒子辐照对器件饱和输出电压的影响。试验结果显示在质子、γ射线辐照下,电荷耦合器件的饱和输出电压显著退化,而在1 Me V中子辐照下,饱和输出电压基本保持不变,表现出较好的抗中子能力。分析认为饱和输出电压的退化主要受电离总剂量效应影响,一方面辐射感生界面态导致阈值电压正向漂移使耗尽层可存储最大电荷量下降;另一方面电离辐射损伤使电荷耦合器件片上放大器增益减小导致饱和输出电压下降。
文摘为获得对In0.53Ga0.47As/In P材料在电子束辐照下的光致发光谱变化规律,开展了1 Me V电子束辐照试验,注量为5×1012—9×1014cm-2.样品选取量子阱材料和体材料,在辐照前后,进行了光致发光谱测试,得到了不同结构In0.53Ga0.47As/In P材料在1 Me V电子束辐照下的不同变化规律;对比分析了参数退化的物理机理.结果显示:试验样品的光致发光峰强度随着辐照剂量增大而显著退化.体材料最先出现快速退化,而五层量子阱在注量达到6×1014cm-2时,就已经退化至辐照前的9%.经分析认为原因有:1)电子束进入样品后,与材料晶格发生能量传递,破坏晶格完整性,致使产生的激子数量减少,光致发光强度降低;电子束辐照在材料中引入缺陷,增加了非辐射复合中心密度,导致载流子迁移率降低.2)量子阱的二维限制作用使载流子运动受限,从而能够降低载流子与非辐射复合中心的复合概率;敏感区域截面积相同条件下,体材料比量子阱材料辐射损伤更为严重.3)量子阱的层数越多,则异质结界面数越多,相应的产生的界面缺陷数量也随之增多,辐射损伤越严重.
基金Project supported the National Natural Science Foundation of China(Grant No.11675259)the West Light Foundation of the Chinese Academy of Sciences(Grant Nos.XBBS201316,2016-QNXZ-B-2,and 2016-QNXZ-B-8)Young Talent Training Project of Science and Technology,Xinjiang,China(Grant No.qn2015yx035)
文摘Radiation effects on complementary metal-oxide-semiconductor（CMOS） active pixel sensors（APS） induced by proton and γ-ray are presented. The samples are manufactured with the standards of 0.35 μm CMOS technology. Two samples have been irradiated un-biased by 23 MeV protons with fluences of 1.43 × 10^11 protons/cm^2 and 2.14 × 10^11 protons/cm-2,respectively, while another sample has been exposed un-biased to 65 krad（Si） ^60Co γ-ray. The influences of radiation on the dark current, fixed-pattern noise under illumination, quantum efficiency, and conversion gain of the samples are investigated. The dark current, which increases drastically, is obtained by the theory based on thermal generation and the trap induced upon the irradiation. Both γ-ray and proton irradiation increase the non-uniformity of the signal, but the nonuniformity induced by protons is even worse. The degradation mechanisms of CMOS APS image sensors are analyzed,especially for the interaction induced by proton displacement damage and total ion dose（TID） damage.
