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应用于场致发射的掺杂纳米金刚石膜的研究 被引量:1
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作者 陈冠虎 汪建华 +2 位作者 熊礼威 翁俊 王文君 《真空》 CAS 北大核心 2011年第3期43-48,共6页
场致发射是一种新型显示技术,具有良好应用前景,场发射显示器的核心内容是场发射阴极材料,纳米金刚石由于低表面粗糙度、低场发射强度、高发射电流密度、大比表面积、网状结构以及高密度悬挂键等优秀电化学性能成为场发射的理想阴极材... 场致发射是一种新型显示技术,具有良好应用前景,场发射显示器的核心内容是场发射阴极材料,纳米金刚石由于低表面粗糙度、低场发射强度、高发射电流密度、大比表面积、网状结构以及高密度悬挂键等优秀电化学性能成为场发射的理想阴极材料。本文阐述了化学气相沉积法制备纳米金刚石薄膜的沉积装置、预处理和工艺参数,并介绍了金刚石掺杂机理和掺入元素的研究现状。 展开更多
关键词 场致发射 纳米金刚石薄膜 掺杂
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ZnO薄膜的制备及p型掺杂研究进展 被引量:2
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作者 刘长林 汪建华 +4 位作者 熊礼威 翁俊 王文君 李远 陈冠虎 《真空与低温》 2009年第2期63-69,共7页
氧化锌是一种在声表面波传感器、压电器件以及太阳能电池等方面具有很好应用前景的材料。介绍了目前制备ZnO薄膜的主要方法,综述了ZnO薄膜p型掺杂的研究现状,并对ZnO薄膜的研究进行了展望。
关键词 ZNO薄膜 制备方法 P型掺杂
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Effect of Gas Sources on the Deposition of Nano-Crystalline Diamond Films Prepared by Microwave Plasma Enhanced Chemical Vapor Deposition 被引量:1
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作者 翁俊 熊礼威 +2 位作者 汪建华 满卫东 陈冠虎 《Plasma Science and Technology》 SCIE EI CAS CSCD 2010年第6期761-764,共4页
Nano-crystalline diamond (NCD) films were deposited on silicon substrates by a microwave plasma enhanced chemical vapor deposition (MPCVD) reactor in C2H5OH/H2 and CH4/H2/O2 systems, respectively, with a constant ... Nano-crystalline diamond (NCD) films were deposited on silicon substrates by a microwave plasma enhanced chemical vapor deposition (MPCVD) reactor in C2H5OH/H2 and CH4/H2/O2 systems, respectively, with a constant ratio of carbon/hydrogen/oxygen. By means of atomic force microscopy (AFM) and X-ray diffraction (XRD), it was shown that the NCD films deposited in the C2H5OH/H2 system possesses more uniform surface than that deposited in the CH4/H2/O2 system. Results from micro-Raman spectroscopy revealed that the quality of the NCD films was different even though the plasmas in the two systems contain exactly the same proportion of elements. In order to explain this phenomenon, the bond energy of forming OH groups, energy distraction in plasma and the deposition process of NCD films were studied. The experimental results and discussion indicate that for a same ratio of carbon/hydrogen/oxygen, the C2H5OH/H2 plasma was beneficial to deposit high quality NCD films with smaller average grain size and lower surface roughness. 展开更多
关键词 nano-crystalline diamond thin film chemical vapor deposition gas source ethanol
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