Optical true delay lines(OTDLs)of low propagation losses,small footprints and high tuning speeds and efficiencies are of critical importance for various photonic applications.Here,we report fabrication of electro-opti...Optical true delay lines(OTDLs)of low propagation losses,small footprints and high tuning speeds and efficiencies are of critical importance for various photonic applications.Here,we report fabrication of electro-optically switchable OTDLs on lithium niobate on insulator using photolithography assisted chemo-mechanical etching.Our device consists of several low-loss optical waveguides of different lengths which are consecutively connected by electro-optical switches to generate different amounts of time delay.The fabricated OTLDs show an ultra-low propagation loss of^0.03dB/cm for waveguide lengths well above 100 cm.展开更多
We demonstrate integrated lithium niobate(LN) microring resonators with Q factors close to the intrinsic material absorption limit of LN.The microrings are fabricated on pristine LN thin-film wafers thinned from LN bu...We demonstrate integrated lithium niobate(LN) microring resonators with Q factors close to the intrinsic material absorption limit of LN.The microrings are fabricated on pristine LN thin-film wafers thinned from LN bulk via chemo-mechanical etching without ion slicing and ion etching.A record-high Q factor up to 10^(8)at the wavelength of 1550 nm is achieved because of the ultra-smooth interface of the microrings and the absence of ion-induced lattice damage,indicating an ultra-low waveguide propagation loss of ~0.0034 dB/cm.The ultra-high Q microrings will pave the way for integrated quantum light source,frequency comb generation,and nonlinear optical processes.展开更多
基金Supported by the National Key R&D Program of China(Grant No.2019YFA0705000)the National Natural Science Foundation of China(Grant Nos.11734009,61590934,and 11874375)+1 种基金the Strategic Priority Research Program of CAS(Grant No.XDB16030300)the Key Project of the Shanghai Science and Technology Committee(Grant No.17JC1400400).
文摘Optical true delay lines(OTDLs)of low propagation losses,small footprints and high tuning speeds and efficiencies are of critical importance for various photonic applications.Here,we report fabrication of electro-optically switchable OTDLs on lithium niobate on insulator using photolithography assisted chemo-mechanical etching.Our device consists of several low-loss optical waveguides of different lengths which are consecutively connected by electro-optical switches to generate different amounts of time delay.The fabricated OTLDs show an ultra-low propagation loss of^0.03dB/cm for waveguide lengths well above 100 cm.
基金supported by the National Key R&D Program of China (No. 2019YFA0705000)National Natural Science Foundation of China (NSFC) (Nos. 11734009, 11874375, 11874154, and 6212200762)+2 种基金Key Research Program of Frontier Sciences (No. QYZDJ-SSWSLH010)Youth Innovation Promotion Association of Chinese Academy of Sciences (No. 2020249)Shanghai Municipal Science and Technology Major Project (No. 2019SHZDZX01)
文摘We demonstrate integrated lithium niobate(LN) microring resonators with Q factors close to the intrinsic material absorption limit of LN.The microrings are fabricated on pristine LN thin-film wafers thinned from LN bulk via chemo-mechanical etching without ion slicing and ion etching.A record-high Q factor up to 10^(8)at the wavelength of 1550 nm is achieved because of the ultra-smooth interface of the microrings and the absence of ion-induced lattice damage,indicating an ultra-low waveguide propagation loss of ~0.0034 dB/cm.The ultra-high Q microrings will pave the way for integrated quantum light source,frequency comb generation,and nonlinear optical processes.
