The local thermal conductivity of polycrystalline aluminum nitride （A1N） ceramics is measured and imaged by using a scanning thermal microscope （SThM） and complementary scanning electron microscope （SEM） based t...The local thermal conductivity of polycrystalline aluminum nitride （A1N） ceramics is measured and imaged by using a scanning thermal microscope （SThM） and complementary scanning electron microscope （SEM） based techniques at room temperature. The quantitative thermal conductivity for the A1N sample is gained by using a SThM with a spatial resolution of sub-micrometer scale through using the 3w method. A thermal conductivity of 308 W/m-K within grains corresponding to that of high-purity single crystal A1N is obtained. The slight differences in thermal conduction between the adjacent grains are found to result from crystallographic misorientations, as demonstrated in the electron backscattered diffraction. A much lower thermal conductivity at the grain boundary is due to impurities and defects enriched in these sites, as indicated by energy dispersive X-ray spectroscopy.展开更多
基金Project supported by the National Basic Research Program of China(Grant No.2009CB623702)the National Natural Science Foundation of China(Grant No.10904001)the Key Project Funding Scheme of Beijing Municipal Education Committee,China(Grant No.KZ201010005002)
文摘The local thermal conductivity of polycrystalline aluminum nitride （A1N） ceramics is measured and imaged by using a scanning thermal microscope （SThM） and complementary scanning electron microscope （SEM） based techniques at room temperature. The quantitative thermal conductivity for the A1N sample is gained by using a SThM with a spatial resolution of sub-micrometer scale through using the 3w method. A thermal conductivity of 308 W/m-K within grains corresponding to that of high-purity single crystal A1N is obtained. The slight differences in thermal conduction between the adjacent grains are found to result from crystallographic misorientations, as demonstrated in the electron backscattered diffraction. A much lower thermal conductivity at the grain boundary is due to impurities and defects enriched in these sites, as indicated by energy dispersive X-ray spectroscopy.
