A novel hybrid instrument of contact and non-contact measurement with large range is developed, and both measurement systems are based on a Linnik interference microscope and on white-light interference measuring tech...A novel hybrid instrument of contact and non-contact measurement with large range is developed, and both measurement systems are based on a Linnik interference microscope and on white-light interference measuring techniques. The ambiguity presented in conventional monochromatic interferometers is not present in the contact and non-contact measurement, and they have a virtually unlimited unambiguous range. For the contact measurement, the vertical measuring range is ±5 mm with a resolution of 1 nm and the horizontal measuring range is ±25 mm in x-range and y-range with a resolution of 1.25 μm; for the non-contact measurement, the vertical measuring range is ~5 mm with a resolution of 1 nm and the horizontal resolution better than 0.5 urn.展开更多
基金Supported by the National Natural Science Foundation of China (50605018)
文摘A novel hybrid instrument of contact and non-contact measurement with large range is developed, and both measurement systems are based on a Linnik interference microscope and on white-light interference measuring techniques. The ambiguity presented in conventional monochromatic interferometers is not present in the contact and non-contact measurement, and they have a virtually unlimited unambiguous range. For the contact measurement, the vertical measuring range is ±5 mm with a resolution of 1 nm and the horizontal measuring range is ±25 mm in x-range and y-range with a resolution of 1.25 μm; for the non-contact measurement, the vertical measuring range is ~5 mm with a resolution of 1 nm and the horizontal resolution better than 0.5 urn.
