High-performance flexible pressure sensors provide comprehensive tactile perception and are applied in human activity monitoring,soft robotics,medical treatment,and human-computer interface.However,these flexible pres...High-performance flexible pressure sensors provide comprehensive tactile perception and are applied in human activity monitoring,soft robotics,medical treatment,and human-computer interface.However,these flexible pressure sensors require extensive nano-architectural design and complicated manufacturing and are timeconsuming.Herein,a highly sensitive,flexible piezoresistive tactile sensor is designed and fabricated,consisting of three main parts:the randomly distributed microstructure on T-ZnOw/PDMS film as a top substrate,multilayer Ti_(3)C_(2)-MXene film as an intermediate conductive filler,and the few-layer Ti_(3)C_(2)-MXene nanosheetbased interdigital electrodes as the bottom substrate.The MXene-based piezoresistive sensor with randomly distributed microstructure exhibits a high sensitivity over a broad pressure range(less than 10 kPa for 175 kPa^(-1))and possesses an out-standing permanence of up to 5000 cycles.Moreover,a 16-pixel sensor array is designed,and its potential applications in visualizing pressure distribution and an example of tactile feedback are demonstrated.This fully sprayed MXene-based pressure sensor,with high sensitivity and excellent durability,can be widely used in,electronic skin,intelligent robots,and many other emerging technologies.展开更多
A bionic fish cilia median-low frequency three-dimensional MEMS vector hydrophone is reported in this paper. The piezoresistive reasonable position was obtained through finite element analysis by ANSYS and the structu...A bionic fish cilia median-low frequency three-dimensional MEMS vector hydrophone is reported in this paper. The piezoresistive reasonable position was obtained through finite element analysis by ANSYS and the structure was formed by MEMS processes including lithography, ion implantation, PECVD and etching,etc. The standing wave barrel results show that the lowest sensitivity of the hydrophone is-200 d B and reach up to-160 d B(in which the voltage amplification factor is 300). It has a good frequency response characteristics in 25 Hz ～ 1500 Hz band. Directivity tests displayed that the hydrophone has a good "8"-shaped directivity,in which the resolution is not less than 30 d B, and asymmetry of the maximum axial sensitivity value is less than 1.2 d B.展开更多
This paper presents a novel approach in synthesizing SiO_2-Fe_3O_4magnetic carrier with high stability.The Fe_3O_4 magnetic powders were synthesized via onestep method named carbon reduction method. The advantages of ...This paper presents a novel approach in synthesizing SiO_2-Fe_3O_4magnetic carrier with high stability.The Fe_3O_4 magnetic powders were synthesized via onestep method named carbon reduction method. The advantages of the methods are of simple process, none lead-in pollution agent, low cost and adaptation to large-lot production. The stability of the magnetic powders is improved through modifying the Fe_3O_4 with SiO_2 in solation method.The results of the characterizations show that the superparamagnetic SiO_2-Fe_3O_4sub-microparticles（~600 nm）with saturation intensity of 36.4 m A·m^2·g^（-1）are obtained successfully. Moreover, the quantitating, repeatability and high stability of the carbon reduction method are demonstrated as well.展开更多
基金supported by the Key Research and Development Program of Shanxi Province(No.202102130501011)the Fund for Shanxi“1331 Project”Key Subject Construction(1331KSC)National Key Research and Development Program of China(Grant No.2019YFB2004800).
文摘High-performance flexible pressure sensors provide comprehensive tactile perception and are applied in human activity monitoring,soft robotics,medical treatment,and human-computer interface.However,these flexible pressure sensors require extensive nano-architectural design and complicated manufacturing and are timeconsuming.Herein,a highly sensitive,flexible piezoresistive tactile sensor is designed and fabricated,consisting of three main parts:the randomly distributed microstructure on T-ZnOw/PDMS film as a top substrate,multilayer Ti_(3)C_(2)-MXene film as an intermediate conductive filler,and the few-layer Ti_(3)C_(2)-MXene nanosheetbased interdigital electrodes as the bottom substrate.The MXene-based piezoresistive sensor with randomly distributed microstructure exhibits a high sensitivity over a broad pressure range(less than 10 kPa for 175 kPa^(-1))and possesses an out-standing permanence of up to 5000 cycles.Moreover,a 16-pixel sensor array is designed,and its potential applications in visualizing pressure distribution and an example of tactile feedback are demonstrated.This fully sprayed MXene-based pressure sensor,with high sensitivity and excellent durability,can be widely used in,electronic skin,intelligent robots,and many other emerging technologies.
基金supported by the National Science Foundation of China (51205374, 61127008)Shanxi province Science foundation for Youths (2012021013-3)
文摘A bionic fish cilia median-low frequency three-dimensional MEMS vector hydrophone is reported in this paper. The piezoresistive reasonable position was obtained through finite element analysis by ANSYS and the structure was formed by MEMS processes including lithography, ion implantation, PECVD and etching,etc. The standing wave barrel results show that the lowest sensitivity of the hydrophone is-200 d B and reach up to-160 d B(in which the voltage amplification factor is 300). It has a good frequency response characteristics in 25 Hz ～ 1500 Hz band. Directivity tests displayed that the hydrophone has a good "8"-shaped directivity,in which the resolution is not less than 30 d B, and asymmetry of the maximum axial sensitivity value is less than 1.2 d B.
基金financially supported by the Natural Science Foundation of Science and Technology Agency of Shanxi Province, China (No. 2011011013-2)
文摘This paper presents a novel approach in synthesizing SiO_2-Fe_3O_4magnetic carrier with high stability.The Fe_3O_4 magnetic powders were synthesized via onestep method named carbon reduction method. The advantages of the methods are of simple process, none lead-in pollution agent, low cost and adaptation to large-lot production. The stability of the magnetic powders is improved through modifying the Fe_3O_4 with SiO_2 in solation method.The results of the characterizations show that the superparamagnetic SiO_2-Fe_3O_4sub-microparticles（~600 nm）with saturation intensity of 36.4 m A·m^2·g^（-1）are obtained successfully. Moreover, the quantitating, repeatability and high stability of the carbon reduction method are demonstrated as well.
