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A planar capacitive sensor for 2D long-range displacement measurement 被引量:3
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作者 Jian-ping YU Wen WANG +2 位作者 Ke-qing LU de-qing mei Zi-chen CHEN 《Journal of Zhejiang University-Science C(Computers and Electronics)》 SCIE EI 2013年第4期252-257,共6页
A planar capacitive sensor(PCS) capable of 2D large-scale measurement is presented in this paper.Displacement interpretation depends on independently measuring the periodic variation in capacitance caused by the chang... A planar capacitive sensor(PCS) capable of 2D large-scale measurement is presented in this paper.Displacement interpretation depends on independently measuring the periodic variation in capacitance caused by the change in the overlapping area of sensing electrodes on a moving plate and a fixed plate.By accumulating the number of quarters in each direction and the specific position in the final quarter,the large-scale measurement is fulfilled.Displacements in Xand Y-direction can be measured independently and simultaneously.Simulation shows that a shorter gap distance and a longer electrode guarantee better sensitivity.Experiments based on a PCS test bench demonstrate that the PCS has a sensitivity of 0.198 mV/μm and a resolution of 0.308 μm.An electric fringe effect and other possible measurement errors on displacement interpretation accuracy are discussed.The study confirms the high potential of PCSs as innovative 2D long-range displacement sensors. 展开更多
关键词 Planar capacitive sensor (PCS) Displacement measurement 2D large-scale measurement
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Tunable patterning of microscale particles using a surface acoustic wave device with slanted-finger interdigital transducers
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作者 Yan-cheng WANG Cheng-yao XU +1 位作者 de-qing mei Jia-wei LIU 《Journal of Zhejiang University-Science A(Applied Physics & Engineering)》 SCIE EI CAS CSCD 2021年第5期331-343,共13页
Polymer-based materials with patterned functional particles have been used to develop smart devices with multiple functionalities.This paper presents a novel method to pattern microscale particles into biocompatible p... Polymer-based materials with patterned functional particles have been used to develop smart devices with multiple functionalities.This paper presents a novel method to pattern microscale particles into biocompatible polyethylene glycol diacrylate(PEGDA)fluid through a designed surface acoustic wave(SAW)device with slanted-finger interdigital transducers(SFITs).By applying signals of different frequencies,the SFITs can excite SAWs with various wavelengths to pattern the microscale particles.The structural design and working principle of the SAW device with SFITs are firstly presented.To investigate the generation of standing SAWs and pressure field distributions of the SAW device with SFITs,a numerical model was developed.Simulation results showed that different strip-shape patterned pressure fields can be generated,and the period and width of adjacent strips can be adjusted by changing the frequencies of the excitation signals.Experiments were performed to verify that the microscale particles in the PEGDA solution can be successfully patterned into strip-shape patterns with various positions,periods,and widths.The results obtained in this study demonstrate that the developed method of using an SAW device with SFITs can be used for tunable patterning of microscale particles in solutions,and shows great potential for biomedical and microfluidic applications. 展开更多
关键词 Tunable patterning Surface acoustic wave(SAW) Acoustic pressure field Polymer-based composite Slanted-finger interdigital transducers(SFITs)
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