Accurate solutions of acoustic waves in piezoelectric substrate and metal film as layered structure were obtained. Phase velocity, electromechanical coupling coefficient and static capacitance were calculated based up...Accurate solutions of acoustic waves in piezoelectric substrate and metal film as layered structure were obtained. Phase velocity, electromechanical coupling coefficient and static capacitance were calculated based upon the solutions. Chen and Haus＇ theory was used to analyze surface acoustic waves in shorten gratings with single finger every period and a reflection coefficient expression of one strip was presented. Parameters of aluminum on X-112°Y LiTaO3 and gold on ST-quartz were calculated. The results agreed well with those from Ken-ya Hashimoto＇s theory. The reflection coefficient of gold on ST-quartz was measured to verify the theoretical result.展开更多
The closed-form expressions on strip reflection coefficients of tetragonal 4/mmm, hexagonal 6/mm and trigonal 3m crystal, etc, were derived, which are different from that of cubic m3m crystal published. The reflection...The closed-form expressions on strip reflection coefficients of tetragonal 4/mmm, hexagonal 6/mm and trigonal 3m crystal, etc, were derived, which are different from that of cubic m3m crystal published. The reflection coefficients of short-circuited Al grating and groove grating on 112° rotated X-cut Y-propagation LiTaO3 are then given. The reflection property of a short-circuited Al -recessed groove grating on 112°LiTaO3 has been experimentally studied and the condition without internal reflection was achieved. It concludes that the structure of single finger without internal reflection can be realized by the short-circuited Al -recessed groove grating on 112°LiTaO3 and thereafter a pass-band filter with central frequency at 255 MHz, bandwidth about 10 MHz, pass-band ripples less than 0.4 dB was yielded.展开更多
This paper aimed at extracting optimal structural parameters for Love wave device with structure of multi-waveguides to improve its temperature stability. The theoretical model dealing with the Love wave propagation i...This paper aimed at extracting optimal structural parameters for Love wave device with structure of multi-waveguides to improve its temperature stability. The theoretical model dealing with the Love wave propagation in multi-waveguides was established first, the dispersion characteristic is depicted by the acoustic propagation theory of stratified media and boundary conditions. Combing with the dispersion characteristics and Tomar＇s method, the optimal structural parameters for the Love wave device with zero temperature coefficient were extracted, and confirmed by the following experimental results. Excellent temperature coefficient of the Love wave device with SU-8/SiO2 on ST-90°X quartz substrate was evaluated experimentally as only 2.16 ppm/℃, which agrees well with the calculated results. The optimized Love wave device is very promising in gas sensing application.展开更多
Simple and efficient surface acoustic wave （SAW） two-port resonators with low insertion loss and high Q-values on ST-X quartz substrate using a corrosion-proof A1/Au-stripe electrode structure are developed for gas ...Simple and efficient surface acoustic wave （SAW） two-port resonators with low insertion loss and high Q-values on ST-X quartz substrate using a corrosion-proof A1/Au-stripe electrode structure are developed for gas sensing. It was composed of two shorted grating reflectors and adjacent intedigital transducers （IDT）, and an active metal film in the cavity between the IDTs for the sensitive film coating. The devices are expected to provide good protection towards metal electrode for gas sensors application in chemically reactive environments. Excellent device performance as low insertion loss, high Q factor and single-mode are achieved by carefully selecting the metallic electrode thickness, cavity length and acoustic aperture. Prior to fabrication, the coupling of modes （COM） model was performed for device simulation to determine the optimal design parameters. The fabricated single-mode SAW resonator at operation frequency of 300 MHz range exhibits matched insertion loss of ~6.5 dB and loaded Q factor in the 3000 range. Using the fabricated resonator as the feedback element, a duaresonator-oscillator with excellent frequency stability （0.1 ppm） was developed and evaluated experimentally, and it is significant for performance improvement of SAW gas sensor.展开更多
The finite-difference time-domain （FDTD） method is proposed for analyzing the surface acoustic wave （SAW） propagation in two-dimensional （2D） piezoelectric phononic crystals （PCs） at radio frequency （RF）, an...The finite-difference time-domain （FDTD） method is proposed for analyzing the surface acoustic wave （SAW） propagation in two-dimensional （2D） piezoelectric phononic crystals （PCs） at radio frequency （RF）, and also experiments are established to demonstrate its analysis result of the PCs＇ band gaps. The FDTD method takes the piezoelectric effect of PCs into account, in which periodic boundary conditions are used to decrease memory/time consumption and the perfectly matched layer boundary conditions are adopted as the SAW absorbers to attenuate artificial reflections. Two SAW delay lines are established with/without piezoelectric PCs located between interdigital transducers. By removing several echoes with window gating function in time domain, delay lines transmission function is achieved. The PCs＇ transmission functions and band gaps are obtained by comparing them in these two delay lines. When Aluminum/128°YX-LiNbO3 is adopted as scatter and substrate material, the PCs＇ band gap is calculated by this FDTD method and COMSOL respectively. Results show that computational results of FDTD agree well with experimental results and are better than that of COMSOL.展开更多
Based on D.P. Chen and Haus＇ theory, a theoretical method was presented to analyze dispersion characteristics of SH-type surface acoustic waves （SAWs） propagating on periodic metallic grating structures with a vari...Based on D.P. Chen and Haus＇ theory, a theoretical method was presented to analyze dispersion characteristics of SH-type surface acoustic waves （SAWs） propagating on periodic metallic grating structures with a variational principle and coupling-of-modes equation. Without using complicated Green＇s function, the calculating results of the method agree well with those of Hashimoto＇s theory. On the other hand, Hashimoto＇s method is helpless for calculating the dispersion relation of short-circuited gratings on ST-90°X quartz etc. However, the method developed in this paper can successfully calculate it.展开更多
基金This work was supported by the National Natural Science Foundation of China (No. 10374100).
文摘Accurate solutions of acoustic waves in piezoelectric substrate and metal film as layered structure were obtained. Phase velocity, electromechanical coupling coefficient and static capacitance were calculated based upon the solutions. Chen and Haus＇ theory was used to analyze surface acoustic waves in shorten gratings with single finger every period and a reflection coefficient expression of one strip was presented. Parameters of aluminum on X-112°Y LiTaO3 and gold on ST-quartz were calculated. The results agreed well with those from Ken-ya Hashimoto＇s theory. The reflection coefficient of gold on ST-quartz was measured to verify the theoretical result.
基金This work was supported by the National Nature Science Foundation of China (No. 10374100).
文摘The closed-form expressions on strip reflection coefficients of tetragonal 4/mmm, hexagonal 6/mm and trigonal 3m crystal, etc, were derived, which are different from that of cubic m3m crystal published. The reflection coefficients of short-circuited Al grating and groove grating on 112° rotated X-cut Y-propagation LiTaO3 are then given. The reflection property of a short-circuited Al -recessed groove grating on 112°LiTaO3 has been experimentally studied and the condition without internal reflection was achieved. It concludes that the structure of single finger without internal reflection can be realized by the short-circuited Al -recessed groove grating on 112°LiTaO3 and thereafter a pass-band filter with central frequency at 255 MHz, bandwidth about 10 MHz, pass-band ripples less than 0.4 dB was yielded.
基金supported by the National Nature Science Foundation of China(11074268,10834010)
文摘This paper aimed at extracting optimal structural parameters for Love wave device with structure of multi-waveguides to improve its temperature stability. The theoretical model dealing with the Love wave propagation in multi-waveguides was established first, the dispersion characteristic is depicted by the acoustic propagation theory of stratified media and boundary conditions. Combing with the dispersion characteristics and Tomar＇s method, the optimal structural parameters for the Love wave device with zero temperature coefficient were extracted, and confirmed by the following experimental results. Excellent temperature coefficient of the Love wave device with SU-8/SiO2 on ST-90°X quartz substrate was evaluated experimentally as only 2.16 ppm/℃, which agrees well with the calculated results. The optimized Love wave device is very promising in gas sensing application.
基金supported by the National Nature Science Foundation of China(11074268,10834010)
文摘Simple and efficient surface acoustic wave （SAW） two-port resonators with low insertion loss and high Q-values on ST-X quartz substrate using a corrosion-proof A1/Au-stripe electrode structure are developed for gas sensing. It was composed of two shorted grating reflectors and adjacent intedigital transducers （IDT）, and an active metal film in the cavity between the IDTs for the sensitive film coating. The devices are expected to provide good protection towards metal electrode for gas sensors application in chemically reactive environments. Excellent device performance as low insertion loss, high Q factor and single-mode are achieved by carefully selecting the metallic electrode thickness, cavity length and acoustic aperture. Prior to fabrication, the coupling of modes （COM） model was performed for device simulation to determine the optimal design parameters. The fabricated single-mode SAW resonator at operation frequency of 300 MHz range exhibits matched insertion loss of ~6.5 dB and loaded Q factor in the 3000 range. Using the fabricated resonator as the feedback element, a duaresonator-oscillator with excellent frequency stability （0.1 ppm） was developed and evaluated experimentally, and it is significant for performance improvement of SAW gas sensor.
基金supported by the National Natural Science Foundation of China(11174318,11304346,61106081)Chinese Postdoctoral Science Foundation(2011M501204,2013T60718)+2 种基金National High Technology Research and Development Program(863 Program)(SS2013AA041103)Beijing Municipal Science and Technology Commission Project(Z141100003814016)the Fundamental Research Funds for the Central Universities(HUST:2013QN038)
文摘The finite-difference time-domain （FDTD） method is proposed for analyzing the surface acoustic wave （SAW） propagation in two-dimensional （2D） piezoelectric phononic crystals （PCs） at radio frequency （RF）, and also experiments are established to demonstrate its analysis result of the PCs＇ band gaps. The FDTD method takes the piezoelectric effect of PCs into account, in which periodic boundary conditions are used to decrease memory/time consumption and the perfectly matched layer boundary conditions are adopted as the SAW absorbers to attenuate artificial reflections. Two SAW delay lines are established with/without piezoelectric PCs located between interdigital transducers. By removing several echoes with window gating function in time domain, delay lines transmission function is achieved. The PCs＇ transmission functions and band gaps are obtained by comparing them in these two delay lines. When Aluminum/128°YX-LiNbO3 is adopted as scatter and substrate material, the PCs＇ band gap is calculated by this FDTD method and COMSOL respectively. Results show that computational results of FDTD agree well with experimental results and are better than that of COMSOL.
基金supported by the National Nature Science Foundation of China(10834010)
文摘Based on D.P. Chen and Haus＇ theory, a theoretical method was presented to analyze dispersion characteristics of SH-type surface acoustic waves （SAWs） propagating on periodic metallic grating structures with a variational principle and coupling-of-modes equation. Without using complicated Green＇s function, the calculating results of the method agree well with those of Hashimoto＇s theory. On the other hand, Hashimoto＇s method is helpless for calculating the dispersion relation of short-circuited gratings on ST-90°X quartz etc. However, the method developed in this paper can successfully calculate it.
