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Preparation and characterization of AlN seeds for homogeneous growth 被引量:5
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作者 Li Zhang Haitao Qi +2 位作者 hongjuan cheng Lei Jin Yuezeng Shi 《Journal of Semiconductors》 EI CAS CSCD 2019年第10期104-107,共4页
Large size AlN bulk crystal has been grown on SiC heterogeneous seed by physical vapor transport (PVT). The properties of AlN wafer were characterized by high resolution X-ray diffraction (HRXRD), Raman spectroscopy, ... Large size AlN bulk crystal has been grown on SiC heterogeneous seed by physical vapor transport (PVT). The properties of AlN wafer were characterized by high resolution X-ray diffraction (HRXRD), Raman spectroscopy, etched method and atomic force microscope (AFM). Growth mechanism of AlN crystal grown on heterogeneous SiC seeds was proposed. Crystallization quality of AlN samples were improved with the growth process, which is associated with the growth mechanism. AlN single wafer has excellent crystallization quality, which is indicated by HRXRD showing the (0002),(1012) XRD FWHM of 76.3,52.5 arcsec, respectively. The surface of the AlN wafer is measured by AFM with a roughnessof 0.15 nm, which is a promising seed for AlN homogeneous growth. 展开更多
关键词 heterogeneous GROWTH ALN SEEDS CRYSTALLIZATION quality CHARACTERIZATION
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Morphology and crystalline property of an AlN single crystal grown on AlN seed 被引量:2
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作者 Li Zhang Haitao Qi +3 位作者 hongjuan cheng Yuezeng Shi Zhanpin Lai Muchang Luo 《Journal of Semiconductors》 EI CAS CSCD 2021年第5期64-69,共6页
AlN single crystal grown by physical vapor transport (PVT) using homogeneous seed is considered as the most promising approach to obtain high-quality AlN boule.In this work,the morphology of AlN single crystals grown ... AlN single crystal grown by physical vapor transport (PVT) using homogeneous seed is considered as the most promising approach to obtain high-quality AlN boule.In this work,the morphology of AlN single crystals grown under different modes (3D islands and single spiral center) were investigated.It is proved that,within an optimized thermal distribution chamber system,the surface temperature of AlN seed plays an important role in crystal growth,revealing a direct relationship between growth mode and growth condition.Notably,a high-quality AlN crystal,with (002) and (102) reflection peaks of 65and 36 arcsec at full width at half maximum (FWHM),was obtained grown under a single spiral center mode.And on which,a high-quality Al_x Ga_(1–x) N epitaxial layer with high Al content (x=0.54) was also obtained.The FWHMs of (002) and (102) reflection of Al_x Ga_(1–x) N were 202 and 496 arcsec,respectively,which shows superiority over their counterpart grown on SiC or a sapphire substrate. 展开更多
关键词 AlN crystal surface morphology growth mechanism crystalline quality
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Growth and characterization of 2-inch high quality β-Ga2O3 single crystals grown by EFG method 被引量:12
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作者 Shengnan Zhang Xiaozheng Lian +4 位作者 Yanchao Ma Weidan Liu Yingwu Zhang Yongkuan Xu hongjuan cheng 《Journal of Semiconductors》 EI CAS CSCD 2018年第8期27-31,共5页
β-GaOis an ultra-wide band-gap semiconductor with promising applications in UV optical detectors,Schottky barrier diodes, field-effect transistors and substrates for light-emitting diodes. However, the preparation of... β-GaOis an ultra-wide band-gap semiconductor with promising applications in UV optical detectors,Schottky barrier diodes, field-effect transistors and substrates for light-emitting diodes. However, the preparation of large β-GaOcrystals is undeveloped and many properties of this material have not been discovered yet. In this work, 2-inch β-GaOsingle crystals were grown by using an edge-defined film-fed growth method. The high quality of the crystal has been proved by high-resolution X-ray diffraction with 19.06 arcsec of the full width at half maximum. The electrical properties and optical properties of both the unintentionally doped and Si-doped β-GaOcrystals were investigated systematically. 展开更多
关键词 β-Ga_2O_3 single crystal high quality DOPING electrical properties optical properties
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Controlling morphology evolution of AIN nanostructures:influence of growth conditions in physical vapor transport 被引量:4
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作者 Lei Jin hongjuan cheng +2 位作者 Jianli Chen Song Zhang Yongkuan Xu, and Zhanping Lai 《Journal of Semiconductors》 EI CAS CSCD 2018年第7期54-58,共5页
A series of AIN nanostructures were synthesized by an ultrahigh-temperature, catalyst-free, physical vapor transport(PVT) process. Energy dispersive X-ray spectroscopy(EDX), X-ray diffraction(XRD), X-Ray photoel... A series of AIN nanostructures were synthesized by an ultrahigh-temperature, catalyst-free, physical vapor transport(PVT) process. Energy dispersive X-ray spectroscopy(EDX), X-ray diffraction(XRD), X-Ray photoelectron spectroscopy(XPS),high resolution transmission electron microscopy(HRTEM) detection show that high quality AIN nanowires were prepared. Nanostructures including nanorings, nanosprings, nanohelices, chainlike nanowires, six-fold symmetric nanostructure and rod-like structure were successfully obtained by controlling the growth duration and temperature. The morphology evolution was attributed to electrostatic polar charge model and the crystalline lattice structure of AIN. 展开更多
关键词 AlN nanowire ultrahigh-temperature CATALYST-FREE PVT morphology evolution
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