In this work,based on physical vapor deposition and high-temperature annealing(HTA),the 4-inch crack-free high-quality AlN template is initialized.Benefiting from the crystal recrystallization during the HTA process,t...In this work,based on physical vapor deposition and high-temperature annealing(HTA),the 4-inch crack-free high-quality AlN template is initialized.Benefiting from the crystal recrystallization during the HTA process,the FWHMs of X-ray rocking curves for(002)and(102)planes are encouragingly decreased to 62 and 282 arcsec,respectively.On such an AlN template,an ultra-thin AlN with a thickness of~700 nm grown by MOCVD shows good quality,thus avoiding the epitaxial lateral over-growth(ELOG)process in which 3-4μm AlN is essential to obtain the flat surface and high crystalline quality.The 4-inch scaled wafer provides an avenue to match UVC-LED with the fabrication process of traditional GaN-based blue LED,therefore significantly improving yields and decreasing cost.展开更多
With the epidemic of the coronavirus disease(COVID-19) infection, AlGaN-based ultraviolet-C light emitting diodes(UVC-LEDs) have attracted widespread attention for their sterilization application. However, the sterili...With the epidemic of the coronavirus disease(COVID-19) infection, AlGaN-based ultraviolet-C light emitting diodes(UVC-LEDs) have attracted widespread attention for their sterilization application. However, the sterilization characters of high power integrated light sources(ILSs) haven’t been widely investigated before utilizing in public sanitary security. In this work,by integrating up to 195 UVC-LED chips, high power UVC-LED ILSs with a light output power(LOP) of 1.88 W were demonstrated. The UVC-LED ILSs were verified to have efficient and rapid sterilization capability, which have achieved more than99.9% inactivation rate of several common pathogenic microorganisms within 1 s. In addition, the corresponding air sterilization module based on them was also demonstrated to kill more than 97% of Staphylococcus albus in the air of 20 m3 confined room within 30 min. This work demonstrates excellent sterilization ability of UVC-LED ILSs with high LOP, revealing great potential of UVC-LEDs in sterilization applications in the future.展开更多
基金supported by the Key-Area Research and Development Program of Guangdong Province(Nos.2019B121204004,2019B010132001)Science Challenge Project(No.TZ2018003)+1 种基金Basic and Application Basic Research Foundation of Guangdong Province(No.2020A1515110891)the National Natural Science Foundation of China(Nos.61734001,61521004).
文摘In this work,based on physical vapor deposition and high-temperature annealing(HTA),the 4-inch crack-free high-quality AlN template is initialized.Benefiting from the crystal recrystallization during the HTA process,the FWHMs of X-ray rocking curves for(002)and(102)planes are encouragingly decreased to 62 and 282 arcsec,respectively.On such an AlN template,an ultra-thin AlN with a thickness of~700 nm grown by MOCVD shows good quality,thus avoiding the epitaxial lateral over-growth(ELOG)process in which 3-4μm AlN is essential to obtain the flat surface and high crystalline quality.The 4-inch scaled wafer provides an avenue to match UVC-LED with the fabrication process of traditional GaN-based blue LED,therefore significantly improving yields and decreasing cost.
基金supported by the Guangdong Basic and Application Basic Research Foundation of Guangdong Province (Nos. 2021A1515111149, 2021B1515120022, 2020B 010174003)。
文摘With the epidemic of the coronavirus disease(COVID-19) infection, AlGaN-based ultraviolet-C light emitting diodes(UVC-LEDs) have attracted widespread attention for their sterilization application. However, the sterilization characters of high power integrated light sources(ILSs) haven’t been widely investigated before utilizing in public sanitary security. In this work,by integrating up to 195 UVC-LED chips, high power UVC-LED ILSs with a light output power(LOP) of 1.88 W were demonstrated. The UVC-LED ILSs were verified to have efficient and rapid sterilization capability, which have achieved more than99.9% inactivation rate of several common pathogenic microorganisms within 1 s. In addition, the corresponding air sterilization module based on them was also demonstrated to kill more than 97% of Staphylococcus albus in the air of 20 m3 confined room within 30 min. This work demonstrates excellent sterilization ability of UVC-LED ILSs with high LOP, revealing great potential of UVC-LEDs in sterilization applications in the future.
