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A review of silicon-based wafer bonding processes,an approach to realize the monolithic integration of Si-CMOS and III-V-on-Si wafers 被引量:6
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作者 Shuyu Bao Yue Wang +9 位作者 Khaw Lina Li Zhang Bing Wang Wardhana Aji Sasangka Kenneth Eng Kian Lee Soo Jin Chua jurgen michel Eugene Fitzgerald Chuan Seng Tan Kwang Hong Lee 《Journal of Semiconductors》 EI CAS CSCD 2021年第2期80-99,共20页
The heterogeneous integration of III-V devices with Si-CMOS on a common Si platform has shown great promise in the new generations of electrical and optical systems for novel applications,such as HEMT or LED with inte... The heterogeneous integration of III-V devices with Si-CMOS on a common Si platform has shown great promise in the new generations of electrical and optical systems for novel applications,such as HEMT or LED with integrated control circuitry.For heterogeneous integration,direct wafer bonding(DWB)techniques can overcome the materials and thermal mismatch issues by directly bonding dissimilar materials systems and device structures together.In addition,DWB can perform at wafer-level,which eases the requirements for integration alignment and increases the scalability for volume production.In this paper,a brief review of the different bonding technologies is discussed.After that,three main DWB techniques of single-,double-and multi-bonding are presented with the demonstrations of various heterogeneous integration applications.Meanwhile,the integration challenges,such as micro-defects,surface roughness and bonding yield are discussed in detail. 展开更多
关键词 MATERIAL thin film integrated circuit
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On-chip light sources for silicon photonics 被引量:20
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作者 Zhiping Zhou Bing Yin jurgen michel 《Light(Science & Applications)》 SCIE EI CAS CSCD 2015年第1期79-91,共13页
Serving as the electrical to optical converter,the on-chip silicon light source is an indispensable component of silicon photonic technologies and has long been pursued.Here,we briefly review the history and recent pr... Serving as the electrical to optical converter,the on-chip silicon light source is an indispensable component of silicon photonic technologies and has long been pursued.Here,we briefly review the history and recent progress of a few promising contenders for on-chip light sources in terms of operating wavelength,pump condition,power consumption,and fabrication process.Additionally,the performance of each contender is also assessed with respect to thermal stability,which is a crucial parameter to consider in complex optoelectronic integrated circuits(OEICs)and optical interconnections.Currently,III-V-based silicon(Si)lasers formed via bonding techniques demonstrate the best performance and display the best opportunity for commercial usage in the near future.However,in the long term,direct hetero-epitaxial growth of III–V materials on Si seems more promising for low-cost,high-yield fabrication.The demonstration of high-performance quantum dot(QD)lasers monolithically grown on Si strongly forecasts its feasibility and enormous potential for on-chip lasers.The superior temperature-insensitive characteristics of the QD laser promote this design in large-scale high-density OEICs.The Germanium(Ge)-on-Si laser is also competitive for large-scale monolithic integration in the future.Compared with a III-V-based Si laser,the biggest potential advantage of a Ge-on-Si laser lies in its material and processing compatibility with Si technology.Additionally,the versatility of Ge facilitates photon emission,modulation,and detection simultaneously with a simple process complexity and low cost. 展开更多
关键词 on-chip light sources optical interconnections optoelectronic integrated circuit silicon photonics
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Graphene-based optical phase modulation of waveguide transverse electric modes 被引量:6
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作者 michele Midrio Paola Galli +2 位作者 Marco Romagnoli Lionel C.Kimerling jurgen michel 《Photonics Research》 SCIE EI CAS 2014年第3期S0034-S0040,共7页
In this paper we report TE-mode phase modulation obtained by inducing a capacitive charge on graphene layers embedded in the core of a waveguide.There is a biasing regime in which graphene absorption is negligible but... In this paper we report TE-mode phase modulation obtained by inducing a capacitive charge on graphene layers embedded in the core of a waveguide.There is a biasing regime in which graphene absorption is negligible but large index variations can be achieved with a voltage–length product as small as V_(π)L_(π)≃0.07 V cm for straight waveguides and V_(π)L_(π)≃0.0024 V cm for 12μm radius microring resonators.This phase modulation device uniquely enables a small signal amplitude<1 V with a micrometer-sized footprint for compatibility with CMOS circuit integration.Examples of phase-induced changes are computed for straight waveguides and for microring resonators,showing the possibility of implementing several optoelectronic functionalities as modulators,tunable filters,and switches. 展开更多
关键词 WAVEGUIDE OPTOELECTRONIC PHASE
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Single-drive high-speed lumped depletion-type modulators toward 10 fJ/bit energy consumption 被引量:4
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作者 XINBAI LI FENGHE YANG +3 位作者 FANG ZHONG QINGZHONG DENG jurgen michel ZHIPING ZHOU 《Photonics Research》 SCIE EI 2017年第2期134-142,共9页
Reduction of modulator energy consumption to 10 fJ∕bit is essential for the sustainable development of communication systems.Lumped modulators might be a viable solution if instructed by a complete theory system.Here... Reduction of modulator energy consumption to 10 fJ∕bit is essential for the sustainable development of communication systems.Lumped modulators might be a viable solution if instructed by a complete theory system.Here,we present a complete analytical electro-optic response theory,energy consumption analysis,and eye diagrams on absolute scales for lumped modulators.Consequently the speed limitation is understood and alleviated by single-drive configuration,and comprehensive knowledge into the energy dependence on structural parameters significantly reduces energy consumption.The results show that silicon modulation energy as low as 80.8 and 21.5 fJ∕bit can be achieved at 28 Gbd under 50 and 10 Ω impedance drivers,respectively.A 50 Gbd modulation is also shown to be possible.The analytical models can be extended to lumped modulators on other material platforms and offer a promising solution to the current challenges of modulation energy reduction. 展开更多
关键词 LENGTH TYPE high
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Ultra-flat dispersion in an integrated waveguide with five and six zero-dispersion wavelengths for mid-infrared photonics 被引量:3
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作者 Yuhao Guo Zeinab Jafari +8 位作者 Lijuan Xu Changjing Bao Peicheng Liao Guifang Li Anuradha M.Agarwal Lionel C.Kimerling jurgen michel Alan E.Willner Lin Zhang 《Photonics Research》 SCIE EI CSCD 2019年第11期1279-1286,共8页
We propose a new type of dispersion flattening technology, which can generate an ultra-flat group velocity dispersion profile with five and six zero-dispersion wavelengths(ZDWs). The dispersion value varies from-0.15 ... We propose a new type of dispersion flattening technology, which can generate an ultra-flat group velocity dispersion profile with five and six zero-dispersion wavelengths(ZDWs). The dispersion value varies from-0.15 to 0.35 ps/(nm·km) from 4 to 8 μm, which to the best of our knowledge is the flattest one reported so far, and the dispersion flatness is improved by more than an order of magnitude. We explain the principle of producing six ZDWs. Mode distribution in this waveguide is made stable over a wide bandwidth. General guidelines to systematically control the dispersion value, sign, and slope are provided, and one can achieve the desired dispersion by properly adjusting the structural parameters. Fabrication tolerance of this waveguide is also examined. 展开更多
关键词 WAVEGUIDE dispersion FLAT
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Broadband athermal waveguides and resonators for datacom and telecom applications 被引量:2
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作者 LIUQING HE YUHAO GUO +6 位作者 ZHAOHONG HAN KAZUMI WADA jurgen michel ANURADHA M.AGARWAL LIONEL C.KIMERLING GUIFANG LI LIN ZHANG 《Photonics Research》 SCIE EI 2018年第11期987-990,共4页
The high-temperature sensitivity of the silicon material index limits the applications of silicon-based micro-ring resonators in integrated photonics. To realize a low but broadband temperature-dependent-wavelength-sh... The high-temperature sensitivity of the silicon material index limits the applications of silicon-based micro-ring resonators in integrated photonics. To realize a low but broadband temperature-dependent-wavelength-shift microring resonator, designing a broadband athermal waveguide becomes a significant task. In this work,we propose a broadband athermal waveguide that shows a low effective thermo-optical coefficient of1 × 10^(-6)∕K from 1400 to 1700 nm. The proposed waveguide shows a low-loss performance and stable broadband athermal property when it is applied to ring resonators, and the bending loss of ring resonators with a radius of >30 μm is 0.02 dB/cm. 展开更多
关键词 TOC TELECOM APPLICATIONS TiO SiO
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High-efficiency normal-incidence vertical p-i-n photodetectors on a germanium-on-insulator platform 被引量:4
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作者 YIDING LIN KWANG HONG LEE +4 位作者 SHUYU BAO XIN GUO HONG WANG jurgen michel CHUAN SENG TAN 《Photonics Research》 SCIE EI 2017年第6期221-228,共8页
In this paper, normal incidence vertical p-i-n photodetectors on a germanium-on-insulator(GOI) platform were demonstrated. The vertical p-i-n structure was realized by ion-implanting boron and arsenic at the bottom an... In this paper, normal incidence vertical p-i-n photodetectors on a germanium-on-insulator(GOI) platform were demonstrated. The vertical p-i-n structure was realized by ion-implanting boron and arsenic at the bottom and top of the Ge layer, respectively, during the GOI fabrication. Abrupt doping profiles were verified in the transferred high-quality Ge layer. The photodetectors exhibit a dark current density of ~47 mA∕cm^2 at-1 V and an optical responsivity of 0.39 A/W at 1550 nm, which are improved compared with state-of-the-art demonstrated GOI photodetectors. An internal quantum efficiency of ~97% indicates excellent carrier collection efficiency of the device. The photodetectors with mesa diameter of 60 μm exhibit a 3 dB bandwidth of ~1 GHz, which agrees well with theoretical calculations. The bandwidth is expected to improve to ~32 GHz with mesa diameter of 10 μm. This work could be similarly extended to GOI platforms with other intermediate layers and potentially enrich the functional diversity of GOI for near-infrared sensing and communication integrated with Ge CMOS and mid-infrared photonics. 展开更多
关键词 Si
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Robust cavity soliton formation with hybrid dispersion 被引量:1
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作者 JING WANG YUHAO GUO +5 位作者 HENAN LIU LIONEL C.KIMERLING jurgen michel ANURADHA M.AGARWAL GUIFANG LI LIN ZHANG 《Photonics Research》 SCIE EI 2018年第6期647-651,共5页
Microresonator-based Kerr frequency combs have attracted a great deal of attention in recent years, in which mode locking of the generated combs is associated with bright or dark cavity soliton formation. In this pape... Microresonator-based Kerr frequency combs have attracted a great deal of attention in recent years, in which mode locking of the generated combs is associated with bright or dark cavity soliton formation. In this paper, we show a unique that, different from soliton propagation along a waveguide, cavity solitons can be robustly formed under dispersion profile with four zero-dispersion wavelengths. More importantly, such a dispersion profile exhibits much smaller overall dispersion, thus making it possible to greatly reduce the pump power by five to six times. 展开更多
关键词 Nonlinear optics four-wave mixing Kerr effect
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Efficient above-band-gap light emission in germanium
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作者 Kenneth E.Lee Eugene A.Fitzgerald +1 位作者 Lionel C.Kimerling jurgen michel 《Chinese Optics Letters》 SCIE EI CAS CSCD 2009年第4期271-273,共3页
We report an above-band-gap radiative transition in the photoluminescence spectra of single crystalline Ge in the temperature range of 20-296 K. The temperature-independence of the peak position at -0.74 eV is remarka... We report an above-band-gap radiative transition in the photoluminescence spectra of single crystalline Ge in the temperature range of 20-296 K. The temperature-independence of the peak position at -0.74 eV is remarkably different from the behavior of direct and indirect gap transitions in Ge. This transition is observed in n-type, p-type, and intrinsic single crystal Ge alike, and its intensity decreases with the increase of temperature with a small activation energy of 56 meV. Some aspects of the transition are analogous to III-V semiconductors with dilute nitrogen doping, which suggests that the origin could be related to an isoelectronic defect. 展开更多
关键词 Activation energy GERMANIUM PHOTOLUMINESCENCE Semiconductor doping Single crystals
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Direct bandgap photoluminescence from n-type indirect GaInP alloys
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作者 CONG WANG BING WANG +2 位作者 RIKO I.MADE SOON-FATT YOON jurgen michel 《Photonics Research》 SCIE EI 2017年第3期239-244,共6页
This work studies Te doping effects on the direct bandgap photoluminescence(PL) of indirect Ga_(x)In_(1-x)P alloys(0.72 ≤ x ≤ 0.74). The temperature-dependent PL shows that the energy difference between direct Γ va... This work studies Te doping effects on the direct bandgap photoluminescence(PL) of indirect Ga_(x)In_(1-x)P alloys(0.72 ≤ x ≤ 0.74). The temperature-dependent PL shows that the energy difference between direct Γ valley and indirect X valleys is reduced due to the bandgap narrowing(BGN) effect, and the direct band transition gradually dominates the PL spectra as temperature increases. Carrier thermalization has been observed for Te-doped Ga_(x)In_(1-x)P samples, as integrated PL intensity increases with increasing temperature from 175 to 300 K. The activation energy for carrier thermalization is reduced as doping concentration increases. Both BGN effect and carrier thermalization contribute to the carrier injection into the Γ valley. As a result, the direct band transition is enhanced in the Te-doped indirect Ga_(x)In_(1-x)P alloys. Therefore, the PL intensity of the Ga_(0.74)In_(0.26) P sample with active doping concentration of 9 × 10^(17)cm^(-3)is increased by five times compared with that of a nominally undoped sample. It is also found that the PL intensity is degraded significantly when the doping concentration is increased to 5 × 10^(18)cm^(-3). From cross-section transmission electron microscopy,no large dopant clusters or other extended defects were found contributing to this degradation. 展开更多
关键词 type in IS on of for Direct bandgap photoluminescence from n-type indirect GaInP alloys BGN from
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High-performance AlGaInP light-emitting diodes integrated on silicon through a superior quality germanium-on-insulator
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作者 YUE WANG BING WANG +9 位作者 WARDHANA A. SASANGKA SHUYU BAO YIPING ZHANG HILMI VOLKAN DEMIR jurgen michel KENNETH ENG KIAN LEE SOON FATT YOON EUGENE A. FITZGERALD CHUAN SENG TAN KWANG HONG LEE 《Photonics Research》 SCIE EI 2018年第4期290-295,共6页
High-performance GaInP/AlGaInP multi-quantum well light-emitting diodes(LEDs) grown on a low threading dislocation density(TDD) germanium-on-insulator(GOI) substrate have been demonstrated. The low TDD of the GOI subs... High-performance GaInP/AlGaInP multi-quantum well light-emitting diodes(LEDs) grown on a low threading dislocation density(TDD) germanium-on-insulator(GOI) substrate have been demonstrated. The low TDD of the GOI substrate is realized through Ge epitaxial growth, wafer bonding, and layer transfer processes on 200 mm wafers. With O_2 annealing, the TDD of the GOI substrate can be reduced to ~1.2 × 10~6 cm^(-2). LEDs fabricated on this GOI substrate exhibit record-high optical output power of 1.3 mW at a 670 nm peak wavelength under 280 mA current injection. This output power level is at least 2 times higher compared to other reports of similar devices on a silicon(Si) substrate without degrading the electrical performance. These results demonstrate great promise for the monolithic integration of visible-band optical sources with Si-based electronic circuitry and realization of high-density RGB(red, green, and blue) micro-LED arrays with control circuitry. 展开更多
关键词 绝缘体 发光二极管 通讯技术 发展现状
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PIC-integrable,uniformly tensile-strained Ge-on-insulator photodiodes enabled by recessed SiN_(x) stressor
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作者 YIDING LIN DANHAO MA +5 位作者 KWANG HONG LEE RUI-TAO WEN GOVINDO SYARANAMUAL LIONEL CKIMERLING CHUAN SENG TAN jurgen michel 《Photonics Research》 SCIE EI CAS CSCD 2021年第7期1255-1263,共9页
Mechanical strain engineering has been promising for many integrated photonic applications. However,for the engineering of a material electronic bandgap,a trade-off exists between the strain uniformity and the integra... Mechanical strain engineering has been promising for many integrated photonic applications. However,for the engineering of a material electronic bandgap,a trade-off exists between the strain uniformity and the integration compatibility with photonic-integrated circuits (PICs). Herein,we adopted a straightforward recess-type design of a silicon nitride (SiNx) stressor to achieve a uniform strain with enhanced magnitude in the material of interest on PICs. Normal-incidence,uniformly 0.56% tensile strained germanium (Ge)-on-insulator (GOI) metal-semiconductor-metal photodiodes were demonstrated,using the recessed stressor with 750 MPa tensile stress. The device exhibits a responsivity of 1.840.15 A∕W at 1550 nm. The extracted Ge absorption coefficient is enhanced by -3.2×to 8340 cm^(-1) at 1612 nm and is superior to that of In_(0.53)Ga_(0.47)As up to 1630 nm limited by the measurement spectrum. Compared with the nonrecess strained device,additional absorption coefficient improvement of 10%–20% in the C-band and 40%–60% in the L-band was observed. This work facilitates the recessstrained GOI photodiodes for free-space PIC applications and paves the way for various (e.g.,Ge,GeSn or III-V based) uniformly strained photonic devices on PICs. 展开更多
关键词 RECESS STRAINED stress
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Introduction for the Group-IV Photonics feature
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作者 Koji Yamada jurgen michel +1 位作者 Marco Romagnoli Hon Ki Tsang 《Photonics Research》 SCIE EI CAS 2014年第3期I0001-I0001,共1页
Silicon-based photonics technology,which has the DNA of silicon electronics technology,promises to provide a compact photonic integration platform with high integration density,mass-producibility,and excellent cost pe... Silicon-based photonics technology,which has the DNA of silicon electronics technology,promises to provide a compact photonic integration platform with high integration density,mass-producibility,and excellent cost performance.This technology has been used to develop various photonic devices based on silicon,such as waveguides,filters,and modulators.In addition,germanium photodetectors have been built on a silicon-based photonic platform.These photonic devices have already been monolithically integrated,and a group-IV photonic platform based on silicon and germanium,or standard group-IV materials,has been established.Moreover,photonics–electronics convergence is now being pursued based on this platform. 展开更多
关键词 INTEGRATION ELECTRONICS PHOTONICS
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Robust generation of frequency combs in a microresonator with strong and narrowband loss
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作者 JING WANG ZHAOHONG HAN +5 位作者 YUHAO GUO LIONEL C.KIMERLING jurgen michel ANURADHA M.AGARWAL GUIFANG LI LIN ZHANG 《Photonics Research》 SCIE EI 2017年第6期77-81,共5页
Octave-spanning frequency comb generation in microresonators is promising, but strong spectral losses caused by material absorption and mode coupling between two polarizations or mode families can be detrimental. We e... Octave-spanning frequency comb generation in microresonators is promising, but strong spectral losses caused by material absorption and mode coupling between two polarizations or mode families can be detrimental. We examine the impact of the spectral loss and propose robust comb generation with a loss of even 300 dB/cm.Cavity nonlinear dynamics show that a phase change associated with spectral losses can facilitate phase matching and Kerr comb generation. Given this unique capability, we propose a novel architecture of on-chip spectroscopy systems. 展开更多
关键词 Robust generation of frequency combs in a microresonator with strong and narrowband loss THz
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