In this paper,we present a twisting control scheme with proportional-integral-derivative(PID)sliding surface for a two-axis electrostatic torsional micromirror,and the utilization of the proposed scheme in a laser sca...In this paper,we present a twisting control scheme with proportional-integral-derivative(PID)sliding surface for a two-axis electrostatic torsional micromirror,and the utilization of the proposed scheme in a laser scanning system.The experimental results of set-point regulation verify that the proposed scheme provides enhanced transient response and positioning performance as compared to traditional sliding mode control.To evaluate the tracking performance of the closed-loop system,triangular waves with different frequencies are used as desired traces.With the proposed scheme the experimental results verified that the closed-loop controlled micromirror follows the given triangular trajectories precisely.A micromirror-based laser scanning system is developed to obtain images.When compared with open-loop control,the experimental results demonstrated that the proposed scheme is able to reduce the distortion of the raster scan,and improve the imaging performance in the presence of cross-coupling effect.展开更多
基金supported by the National Natural Science Foundation of China(61374036,61703142,U1504615)the Natural Science and Engineering Research Council of Canadathe Scientific Research Key Foundation of Higher Education Institutions of Henan Province(16A413001)
文摘In this paper,we present a twisting control scheme with proportional-integral-derivative(PID)sliding surface for a two-axis electrostatic torsional micromirror,and the utilization of the proposed scheme in a laser scanning system.The experimental results of set-point regulation verify that the proposed scheme provides enhanced transient response and positioning performance as compared to traditional sliding mode control.To evaluate the tracking performance of the closed-loop system,triangular waves with different frequencies are used as desired traces.With the proposed scheme the experimental results verified that the closed-loop controlled micromirror follows the given triangular trajectories precisely.A micromirror-based laser scanning system is developed to obtain images.When compared with open-loop control,the experimental results demonstrated that the proposed scheme is able to reduce the distortion of the raster scan,and improve the imaging performance in the presence of cross-coupling effect.
