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Designing high k dielectric films with LiPON-Al_(2)O_(3)hybrid structure by atomic layer deposition
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作者 Ze Feng Yitong wang +7 位作者 Jilong Hao Meiyi Jing Feng Lu Weihua wang Yahui Cheng shengkai wang Hui Liu Hong Dong 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第5期647-651,共5页
A large amount of ultra-low-power consumption electronic devices are urgently needed in the new era of the internet of things,which demand relatively low frequency response.Here,atomic layer deposition has been utiliz... A large amount of ultra-low-power consumption electronic devices are urgently needed in the new era of the internet of things,which demand relatively low frequency response.Here,atomic layer deposition has been utilized to fabricate the ion polarization dielectric of the Li PON-Al_(2)O_(3) hybrid structure.The Li PON thin film is periodically stacked in the Al_(2)O_(3) matrix.This hybrid structure presents a frequency-dependent dielectric constant,of which k is significantly higher than the aluminum oxide matrix from 1 k Hz to 200 k Hz in frequency.The increased dielectric constant is attributed to the lithium ions shifting locally upon the applied electrical field,which shows an additional polarization to the Al_(2)O_(3) matrix.This work provides a new strategy with promising potential to engineers for the dielectric constant of the gate oxide and sheds light on the application of electrolyte/dielectric hybrid structure in a variety of devices from capacitors to transistors. 展开更多
关键词 high k dielectric atomic layer deposition POLARIZATION
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An Intelligent Process Fault Diagnosis System based on Andrews Plot and Convolutional Neural Network
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作者 shengkai wang Jie Zhang 《Journal of Dynamics, Monitoring and Diagnostics》 2022年第3期127-138,共12页
This paper proposes an intelligent process fault diagnosis system through integrating the techniques of Andrews plot and convolutional neural network.The proposed fault diagnosis method extracts features from the on-l... This paper proposes an intelligent process fault diagnosis system through integrating the techniques of Andrews plot and convolutional neural network.The proposed fault diagnosis method extracts features from the on-line process measurements using Andrews function.To address the uncertainty of setting the proper dimension of extracted features in Andrews function,a convolutional neural network is used to further extract diagnostic information from the Andrews function outputs.The outputs of the convolutional neural network are then fed to a single hidden layer neural network to obtain the final fault diagnosis result.The proposed fault diagnosis system is compared with a conventional neural network based fault diagnosis system and integrating Andrews function with neural network and manual selection of features in Andrews function outputs.Applications to a simulated CSTR process show that the proposed fault diagnosis system gives much better performance than the conventional neural network based fault diagnosis system and manual selection of features in Andrews function outputs.It reveals that the use of Andrews function and convolutional neural network can improve the diagnosis performance. 展开更多
关键词 Andrews plot convolutional neural network fault diagnosis neural network
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