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不同衬底温度下射频磁控溅射磷掺杂ZnO薄膜的性质 被引量:4
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作者 王金忠 李美成 +3 位作者 vincent sallet A.Rego R.Martins E.Fortunato 《红外与激光工程》 EI CSCD 北大核心 2011年第8期1490-1494,共5页
为研究在低温衬底上沉积磷掺杂ZnO薄膜的性质,从室温到350°C的范围内磷掺杂的ZnO被磁控溅射到蓝宝石衬底上。样品的XRD谱显示薄膜为<001>方向择优生长,ZnO(002)面的衍射峰在250°C时最低。原子力图像分析显示:薄膜的表... 为研究在低温衬底上沉积磷掺杂ZnO薄膜的性质,从室温到350°C的范围内磷掺杂的ZnO被磁控溅射到蓝宝石衬底上。样品的XRD谱显示薄膜为<001>方向择优生长,ZnO(002)面的衍射峰在250°C时最低。原子力图像分析显示:薄膜的表面形貌随沉积温度而变化,粗糙度随温度升高而增加。样品的XPS谱在134eV附近清晰地观测到了磷的P2p峰,且组分随衬底温度而变化。在400~600nm的范围内样品的平均光学透射率大于60%,所计算的光学带隙大约为3.2 eV。薄膜的Hall测量表明薄膜为n型电导,且薄膜中的载流子浓度随温度的升高而降低。该工作有助于对ZnO低温磷掺杂薄膜性质的了解,从而在低温下获得磷掺杂的ZnO p型导电薄膜。 展开更多
关键词 氧化锌 掺杂 光电子能谱 Hall测量
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Structural, Morphological, Optical and Electrical Properties of Zn<sub>(1-x)</sub>Cd<sub>x</sub>O Solid Solution Grown on <i>a</i>- and <i>r</i>-Plane Sapphire Substrate by MOCV 被引量:1
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作者 Afif Fouzri Mohamed Amine Boukadhaba +3 位作者 Al Housseynou Tauré Nawfel Sakly Amor Bchetnia vincent sallet 《Journal of Crystallization Process and Technology》 2013年第1期36-48,共13页
Zn(1-x)CdxO films have been grown on (a-plane) and (r-plane) sapphire substrate by metal organic chemical vapor deposition. A maximum cadmium incorporation of 8.5% and 11.2% has been respectively determined for films ... Zn(1-x)CdxO films have been grown on (a-plane) and (r-plane) sapphire substrate by metal organic chemical vapor deposition. A maximum cadmium incorporation of 8.5% and 11.2% has been respectively determined for films deposited on a- and r-plane sapphire. The optical transmission spectra and energy band-gap equation established by Makino et al. were used to estimate the cadmium mole fraction of the solid solutions. Structural, morphological and optical properties of these films were examined using high resolution X-ray diffraction (HRXRD), atomic force microscopy (AFM) and room and low temperature photoluminescence (Pl) as Cd incorporation and employed substrate. X-ray diffraction study revealed that all films had wurtzite phase but solid solution grown on a-plane sapphire are polycrystalline with a preferred orientation along the [0001] direction and a-plane film are epitaxially grown on r-plane sapphire. AFM image show significant differences between morphologies depending on orientation sapphire substrate but no significant differences on surface roughness have been found. The near band-edge photoluminescence emission shifts gradually to lower energies as Cd is incorporated and reaches 2.916 eV for the highest Cd content (11.2%) at low temperature (20 K). The room temperature hall mobility decreases with the Cd incorporation but it is larger for Zn(1-x)CdxO grown on r-plane sapphire. 展开更多
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Induced structural modifications in ZnS nanowires via physical state of catalyst:Highlights of 15R crystal phase 被引量:2
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作者 Sumit Kumar Frederic Fossard +2 位作者 Gaelle Amiri Jean-Michel Chauveau vincent sallet 《Nano Research》 SCIE EI CSCD 2022年第1期377-385,共9页
Peculiar and unique growth mechanisms involved in semiconductor nanowires(NWs)pave the way to the achievement of new crystallographic phases and remarkable material properties,and hence,studying polytypism in semicond... Peculiar and unique growth mechanisms involved in semiconductor nanowires(NWs)pave the way to the achievement of new crystallographic phases and remarkable material properties,and hence,studying polytypism in semiconductor NWs arouses a strong interest for the next generation of electronic and photonic applications.In this context,the growth of ZnS nanowires has been investigated,as bulk ZnS compound exhibits numerous unstable polytypes at high temperatures,but their stable occurrence is highly anticipated in a nanowire due to its special quasi-dimensional shape and growth modes.In this work,the idea is to provide a change in the growth mechanism via the physical state of catalyst droplet(liquid or solid)and hence,study the induced structural modifications in ZnS nanowires.The HRTEM images of VLS(via liquid alloyed catalyst)grown ZnS NWs show periodic stacking faults,which is precisely identified as a stacking sequence of cubic or hexagonal individual planes leading to an astonishing 15R crystal polymorph.This crystallographic phase is observed for the first time in nanowires.Contrastingly,NWs grown with VSS(via solid catalyst)show crystal polytypes of zinc blende and wurtzite.We calculate and discuss the role of cohesive energies in the formation of such ZnS polytypes.Further,we present the selection rules for the crystallization of such 15R structure in NWs and discuss the involved VLS and VSS growth mechanisms leading to the formation of different crystal phases. 展开更多
关键词 ll-VI semiconductors MOCVD vapor-liquid-solid(VLS) vapor-solid-solid(VSS) TEM analysis POLYTYPISM
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