Cleaning of carbon-contaminated beamline optics was studied by RF plasma discharge process using O_2/Ar. Carbon-coated samples were prepared, and through their cleaning processes key parameters were determined,such as...Cleaning of carbon-contaminated beamline optics was studied by RF plasma discharge process using O_2/Ar. Carbon-coated samples were prepared, and through their cleaning processes key parameters were determined,such as the optimal RF output power, mixing rates of O_2/Ar, and chamber vacuum. Considerations were made against possible adverse effects in cleaning the beamline optics, such as comparing the roughness of samples before and after cleaning, and possible detrimental kinetic effects on cable insulation. Under the cleaning parameters to clean the beamline optics, the thickness of removed carbon film and the change in beamline photon flux were analyzed.展开更多
基金supported by the Maintenance and Renovation Project of Large Scale Scientific Facility,Chinese Academy of Sciences
文摘Cleaning of carbon-contaminated beamline optics was studied by RF plasma discharge process using O_2/Ar. Carbon-coated samples were prepared, and through their cleaning processes key parameters were determined,such as the optimal RF output power, mixing rates of O_2/Ar, and chamber vacuum. Considerations were made against possible adverse effects in cleaning the beamline optics, such as comparing the roughness of samples before and after cleaning, and possible detrimental kinetic effects on cable insulation. Under the cleaning parameters to clean the beamline optics, the thickness of removed carbon film and the change in beamline photon flux were analyzed.
