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Multiple SiGe/Si layers epitaxy and SiGe selective etching for vertically stacked DRAM
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作者 Zhenzhen Kong Hongxiao Lin +20 位作者 Hailing wang Yanpeng Song Junjie Li Xiaomeng Liu Anyan Du Yuanhao Miao Yiwen Zhang Yuhui Ren Chen Li Jiahan Yu Jinbiao Liu Jingxiong Liu Qinzhu Zhang Jianfeng Gao Huihui Li xiangsheng wang Junfeng Li Henry HRadamson Chao Zhao Tianchun Ye Guilei wang 《Journal of Semiconductors》 EI CAS CSCD 2023年第12期133-140,共8页
Fifteen periods of Si/Si_(0.7)Ge_(0.3)multilayers(MLs)with various Si Ge thicknesses are grown on a 200 mm Si substrate using reduced pressure chemical vapor deposition(RPCVD).Several methods were utilized to characte... Fifteen periods of Si/Si_(0.7)Ge_(0.3)multilayers(MLs)with various Si Ge thicknesses are grown on a 200 mm Si substrate using reduced pressure chemical vapor deposition(RPCVD).Several methods were utilized to characterize and analyze the ML structures.The high resolution transmission electron microscopy(HRTEM)results show that the ML structure with 20 nm Si_(0.7)Ge_(0.3)features the best crystal quality and no defects are observed.Stacked Si_(0.7)Ge_(0.3)ML structures etched by three different methods were carried out and compared,and the results show that they have different selectivities and morphologies.In this work,the fabrication process influences on Si/Si Ge MLs are studied and there are no significant effects on the Si layers,which are the channels in lateral gate all around field effect transistor(L-GAAFET)devices.For vertically-stacked dynamic random access memory(VS-DRAM),it is necessary to consider the dislocation caused by strain accumulation and stress release after the number of stacked layers exceeds the critical thickness.These results pave the way for the manufacture of high-performance multivertical-stacked Si nanowires,nanosheet L-GAAFETs,and DRAM devices. 展开更多
关键词 RPCVD EPITAXY SiGe/Si multilayers L-GAAFETs VS-DRAM
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Methane aromatization in the absence of oxygen over extruded and molded MoO_3/ZSM-5 catalysts:Influences of binder and molding method 被引量:8
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作者 Dongmei Ren xiangsheng wang +3 位作者 Gang Li Xiaojing Cheng Huayun Long Lidong Chen 《Journal of Natural Gas Chemistry》 EI CAS CSCD 2010年第6期646-652,共7页
The influences of binder and molding method on the catalytic performance of methane aromatization in the absence of O2 over MoO3/ZSM-5 catalysts were investigated.SEM,NH3-TPD,FT-IR of adsorbed pyridine,N2 adsorption-d... The influences of binder and molding method on the catalytic performance of methane aromatization in the absence of O2 over MoO3/ZSM-5 catalysts were investigated.SEM,NH3-TPD,FT-IR of adsorbed pyridine,N2 adsorption-desorption,cyclohexane adsorption and XPS were employed to characterize the physical and chemical properties of the catalysts.It was found that SiO2 was a suitable binder for the catalyst due to its appropriate weak acidity.The laminar catalyst comprising of an inert spherical core and a MoO3/ZSM-5 laminar shell with 0.1 0.2 mm in thickness showed a better catalytic performance than the extruded catalyst.The improved activity of the laminar catalyst could be attributed to the easy carbonization of Mo species and the quick removal of reaction products from the catalyst surface. 展开更多
关键词 methane AROMATIZATION extruded catalyst laminar catalyst ZSM-5 molybdenum
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An approach for formation design and flight performance prediction based on aerodynamic formation unit:Energy-saving considerations
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作者 Nanxuan QIAO Tielin MA +3 位作者 xiangsheng wang Jie wang Jingcheng FU Pu XUE 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2024年第3期77-91,共15页
The performance improvement of swarm drones through aerodynamic shape optimization may be challenging due to folded size constraints imposed by the specific launch approach.However,fixed-wing aircraft swarms can benef... The performance improvement of swarm drones through aerodynamic shape optimization may be challenging due to folded size constraints imposed by the specific launch approach.However,fixed-wing aircraft swarms can benefit from formation flight in terms of energy consumption.This study introduces the concept of the"aerodynamic formation unit",which consists of two or three aircraft that form an inseparable unit of the formation.Considering the Unmanned Aerial Vehicle(UAV)distribution and wingtip vortex interference in the formation,two typical aerodynamic formation units are optimized by the variable-fidelity aerodynamic optimization method based on space mapping.The aerodynamic characteristics of the formation UAVs that affect flight performance,such as lift-to-drag ratio(L/D ratio)and static stability are analyzed by Computational Fluid Dynamics(CFD)simulations.The L/D ratio(cruising condition)of the following aircraft can be increased by 22.8%and 57.5%in the optimal units that involve two and three aircraft respectively.Moreover,this study conducts several CFD simulations for multi-aircraft formations formed by the units,which show that the average L/D ratio of the formation can be improved by more than 19%.These results verify the feasibility and effectiveness of the"aerodynamic formation unit"concept and the optimization framework for formation parameters. 展开更多
关键词 Formation flight CFD Aerodynamic formation unit Wingtip vortices Foldable tandem-wing aircraft
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Spectral flow, Llarull's rigidity theorem in odd dimensions and its generalization
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作者 Yihan Li Guangxiang Su xiangsheng wang 《Science China Mathematics》 SCIE CSCD 2024年第5期1103-1114,共12页
For a compact spin Riemannian manifold(M,g^(TM))of dimension n such that the associated scalar curvature kT M verifies that k^(TM)≥n(n-1),Llarull’s rigidity theorem says that any area-decreasing smooth map f from M ... For a compact spin Riemannian manifold(M,g^(TM))of dimension n such that the associated scalar curvature kT M verifies that k^(TM)≥n(n-1),Llarull’s rigidity theorem says that any area-decreasing smooth map f from M to the unit sphere Sn of nonzero degree is an isometry.In this paper,we present a new proof of Llarull’s rigidity theorem in odd dimensions via a spectral flow argument.This approach also works for a generalization of Llarull’s theorem when the sphere Sn is replaced by an arbitrary smooth strictly convex closed hypersurface in Rn+1.The results answer two questions by Gromov(2023). 展开更多
关键词 Dirac operator scalar curvature spectral flow
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On the complex structure of symplectic quotients
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作者 xiangsheng wang 《Science China Mathematics》 SCIE CSCD 2021年第12期2719-2742,共24页
Let K be a compact group.For a symplectic quotient M_(λ) of a compact Hamiltonian Kahler K-manifold,we show that the induced complex structure on M_(λ) is locally invariant when the parameter λ varies in Lie(K)^(*)... Let K be a compact group.For a symplectic quotient M_(λ) of a compact Hamiltonian Kahler K-manifold,we show that the induced complex structure on M_(λ) is locally invariant when the parameter λ varies in Lie(K)^(*).To prove such a result,we take two di erent approaches:(i)use the complex geometry properties of the symplectic implosion construction;(ii)investigate the variation of geometric invariant theory(GIT)quotients. 展开更多
关键词 complex structure symplectic reduction symplectic implosion geometric invariant theory
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On the Generalized Geroch Conjecture for Complete Spin Manifolds
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作者 xiangsheng wang Weiping ZHANG 《Chinese Annals of Mathematics,Series B》 SCIE CSCD 2022年第6期1143-1146,共4页
Let W be a closed area enlargeable manifold in the sense of Gromov-Lawson and M be a noncompact spin manifold,the authors show that the connected sum M#W admits no complete metric of positive scalar curvature.When W=T... Let W be a closed area enlargeable manifold in the sense of Gromov-Lawson and M be a noncompact spin manifold,the authors show that the connected sum M#W admits no complete metric of positive scalar curvature.When W=T^(n),this provides a positive answer to the generalized Geroch conjecture in the spin setting. 展开更多
关键词 Positive scalar curvature Connected sum Spin manifolds
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