Flexure-based mechanisms are widely utilized in nano manipulations. The closed-form statics and dynamics modeling is difficult due to the complex topologies, the inevitable compliance of levers, the Hertzian contact i...Flexure-based mechanisms are widely utilized in nano manipulations. The closed-form statics and dynamics modeling is difficult due to the complex topologies, the inevitable compliance of levers, the Hertzian contact interface, etc. This paper presents the closed-form modeling of an XY nano-manipulator consisting of statically indeterminate symmetric(SIS) structures using leaf and circular flexure hinges. Theoretical analysis reveals that the lever’s compliance, the contact stiffness, and the load mass have significant influence on the static and dynamic performances of the system.Experiments are conducted to verify the effectiveness of the established models. If no piezoelectric actuator(PEA) is installed, the influence of the contact stiffness can be eliminated. Experimental results show that the estimation error on the output stiffness and first natural frequency can reach 2% and 1.7%, respectively. If PEAs are installed, the contact stiffness shows up in the models. As no effective method is currently available to measure or estimate the contact stiffness, it is impossible to precisely estimate the performance of the overall system. In this case, the established closed-form models can be utilized to calculate the bounds of the performance. The established closed-form models are widely applicable in the design and optimization of planar flexure-based mechanisms.展开更多
Statically indeterminate symmetric(SIS)flexure structures are symmetric structures with“clamped-clamped”boundary conditions.The static indeterminacy and topological symmetry significantly attenuate the parasitic mot...Statically indeterminate symmetric(SIS)flexure structures are symmetric structures with“clamped-clamped”boundary conditions.The static indeterminacy and topological symmetry significantly attenuate the parasitic motions associated with statically determinate flexure structures.Hence,SIS flexure structures feature decoupled linear and angular motions,improved motion accuracy,high stiffness,and high stability.Although SIS flexure structures have been more frequently utilized as prismatic joints,they can also be utilized as revolute joints.This study systematically investigates the characteristics of SIS flexure structures.Based on the unified compliance models of a single flexure hinge,analytical compliance models of two fundamental types of SIS flexure structures are established.In 1-degree-of-freedom or planar applications,multiple SIS-based structures can also be integrated into various configurations to transmit linear or angular motions.Corresponding stiffness models are also established.The characteristics and possible applications of the SIS flexure structures are computationally investigated through case studies.Ultimately,several SIS prototypes are manufactured,and the modeling accuracy of the established stiffness models is experimentally verified.展开更多
基金Supported by National Natural Science Foundation of China(Grant Nos.61403214,61327802,U1613220)Tianjin Provincial Natural Science Foundation of China(Grant Nos.14JCZDJC31800,14JCQNJC04700)
文摘Flexure-based mechanisms are widely utilized in nano manipulations. The closed-form statics and dynamics modeling is difficult due to the complex topologies, the inevitable compliance of levers, the Hertzian contact interface, etc. This paper presents the closed-form modeling of an XY nano-manipulator consisting of statically indeterminate symmetric(SIS) structures using leaf and circular flexure hinges. Theoretical analysis reveals that the lever’s compliance, the contact stiffness, and the load mass have significant influence on the static and dynamic performances of the system.Experiments are conducted to verify the effectiveness of the established models. If no piezoelectric actuator(PEA) is installed, the influence of the contact stiffness can be eliminated. Experimental results show that the estimation error on the output stiffness and first natural frequency can reach 2% and 1.7%, respectively. If PEAs are installed, the contact stiffness shows up in the models. As no effective method is currently available to measure or estimate the contact stiffness, it is impossible to precisely estimate the performance of the overall system. In this case, the established closed-form models can be utilized to calculate the bounds of the performance. The established closed-form models are widely applicable in the design and optimization of planar flexure-based mechanisms.
基金funded by the National Natural Science Foundation of China under Grants 61873133,and 52005270in part by the Natural Science Foundation of Tianjin under Grant 21JCZDJC00090.
文摘Statically indeterminate symmetric(SIS)flexure structures are symmetric structures with“clamped-clamped”boundary conditions.The static indeterminacy and topological symmetry significantly attenuate the parasitic motions associated with statically determinate flexure structures.Hence,SIS flexure structures feature decoupled linear and angular motions,improved motion accuracy,high stiffness,and high stability.Although SIS flexure structures have been more frequently utilized as prismatic joints,they can also be utilized as revolute joints.This study systematically investigates the characteristics of SIS flexure structures.Based on the unified compliance models of a single flexure hinge,analytical compliance models of two fundamental types of SIS flexure structures are established.In 1-degree-of-freedom or planar applications,multiple SIS-based structures can also be integrated into various configurations to transmit linear or angular motions.Corresponding stiffness models are also established.The characteristics and possible applications of the SIS flexure structures are computationally investigated through case studies.Ultimately,several SIS prototypes are manufactured,and the modeling accuracy of the established stiffness models is experimentally verified.
