Extreme ultraviolet lithography(EUVL)and electron beam lithography(EBL)are considered to be crucial lithography techniques utilized in the fabrication of nanoscale semiconductor devices.However,the industry currently ...Extreme ultraviolet lithography(EUVL)and electron beam lithography(EBL)are considered to be crucial lithography techniques utilized in the fabrication of nanoscale semiconductor devices.However,the industry currently faces a scarcity of EUV photoresists that meet the increasingly challenging standards in terms of resolution,sensitivity and roughness.Metal oxo nanoclusters have garnered significant interest in the field of EUV photoresist due to their relatively stronger absorption cross-section for extreme ultraviolet light and lower dimensions.In this study,we utilize a heterometallic nanocluster strategy by a combination of titanium and zirconium metals to investigate their solubility,assess the suitability of various developers,and evaluate their performance in electron-beam and EUVL,as well as study their etch resistance for pattern transfer.We demonstrate that R-4 is able to get a critical dimension(CD)of 25 nm at low doses under EBL,as well as 50 nm resolution at EUVL with a remarkable sensitivity of 19.7 mJ cm−2.This study offers an efficient heterometallic method for optimizing the lithographic performance of metal oxo nanocluster photoresists,which can benefit the development of commercially viable next-generation EUV photoresists.展开更多
Trapping and manipulation of nano-objects in solution are of great interest and have emerged in a plethora of fields spanning from soft condensed matter to biophysics and medical diagnostics.We report on establishing ...Trapping and manipulation of nano-objects in solution are of great interest and have emerged in a plethora of fields spanning from soft condensed matter to biophysics and medical diagnostics.We report on establishing a nanofluidic system for reliable and contact-free trapping as well as manipulation of charged nano-objects using elastic polydimethylsiloxane(PDMS)-based materials.This trapping principle is based on electrostatic repulsion between charged nanofluidic walls and confined charged objects,called geometry-induced electrostatic(GIE)trapping.With gold nanoparticles as probes,we study the performance of the devices by measuring the stiffness and potential depths of the implemented traps,and compare the results with numerical simulations.When trapping 100 nm particles,we observe potential depths of up to Q≅24 k_(B)T that provide stable trapping for many days.Taking advantage of the soft material properties of PDMS,we actively tune the trapping strength and potential depth by elastically reducing the device channel height,which boosts the potential depth up to Q~200 k_(B)T,providing practically permanent contactfree trapping.Due to a high-throughput and low-cost fabrication process,ease of use,and excellent trapping performance,our method provides a reliable platform for research and applications in study and manipulation of single nano-objects in fluids.展开更多
Our work focuses on the development of simpler and effective production of nanofluidic devices for high-throughput charged single nanoparticle trapping in an aqueous environment.Single nanoparticle confinement using e...Our work focuses on the development of simpler and effective production of nanofluidic devices for high-throughput charged single nanoparticle trapping in an aqueous environment.Single nanoparticle confinement using electrostatic trapping has been an effective approach to study the fundamental properties of charged molecules under a controlled aqueous environment.Conventionally,geometry-induced electrostatic trapping devices are fabricated using SiOx-based substrates and comprise nanochannels imbedded with nanoindentations such as nanopockets,nanoslits and nanogrids.These geometry-induced electrostatic trapping devices can only trap negatively charged particles,and therefore,to trap positively charged particles,modification of the device surface is required.However,the surface modification process of a nanofluidic device is cumbersome and time consuming.Therefore,here,we present a novel approach for the development of surface-modified geometry-induced electrostatic trapping devices that reduces the surface modification time from nearly 5 days to just a few hours.We utilized polydimethylsiloxane for the development of a surface-modified geometry-induced electrostatic trapping device.To demonstrate the device efficiency and success of the surface modification procedure,a comparison study between a PDMS-based geometry-induced electrostatic trapping device and the surface-modified polydimethylsiloxane-based device was performed.The device surface was modified with two layers of polyelectrolytes(1:poly(ethyleneimine)and 2:poly(styrenesulfonate)),which led to an overall negatively charged surface.Our experiments revealed the presence of a homogeneous surface charge density inside the fluidic devices and equivalent trapping strengths for the surface-modified and native polydimethylsiloxane-based geometry-induced electrostatic trapping devices.This work paves the way towards broader use of geometry-induced electrostatic trapping devices in the fields of biosensing,disease diagnosis,molecular analysis,fluid quality control and pathogen detection.展开更多
基金supported by the National Natural Science Foundation of China(22271284 and 91961108)“the Fundamental Research Funds for the Central Universities”,Nankai University(075-63233091)。
文摘Extreme ultraviolet lithography(EUVL)and electron beam lithography(EBL)are considered to be crucial lithography techniques utilized in the fabrication of nanoscale semiconductor devices.However,the industry currently faces a scarcity of EUV photoresists that meet the increasingly challenging standards in terms of resolution,sensitivity and roughness.Metal oxo nanoclusters have garnered significant interest in the field of EUV photoresist due to their relatively stronger absorption cross-section for extreme ultraviolet light and lower dimensions.In this study,we utilize a heterometallic nanocluster strategy by a combination of titanium and zirconium metals to investigate their solubility,assess the suitability of various developers,and evaluate their performance in electron-beam and EUVL,as well as study their etch resistance for pattern transfer.We demonstrate that R-4 is able to get a critical dimension(CD)of 25 nm at low doses under EBL,as well as 50 nm resolution at EUVL with a remarkable sensitivity of 19.7 mJ cm−2.This study offers an efficient heterometallic method for optimizing the lithographic performance of metal oxo nanocluster photoresists,which can benefit the development of commercially viable next-generation EUV photoresists.
基金This work was funded by the Swiss Nanoscience Institute in Basel,Switzerland(SNI PhD graduate school,Project P1202).
文摘Trapping and manipulation of nano-objects in solution are of great interest and have emerged in a plethora of fields spanning from soft condensed matter to biophysics and medical diagnostics.We report on establishing a nanofluidic system for reliable and contact-free trapping as well as manipulation of charged nano-objects using elastic polydimethylsiloxane(PDMS)-based materials.This trapping principle is based on electrostatic repulsion between charged nanofluidic walls and confined charged objects,called geometry-induced electrostatic(GIE)trapping.With gold nanoparticles as probes,we study the performance of the devices by measuring the stiffness and potential depths of the implemented traps,and compare the results with numerical simulations.When trapping 100 nm particles,we observe potential depths of up to Q≅24 k_(B)T that provide stable trapping for many days.Taking advantage of the soft material properties of PDMS,we actively tune the trapping strength and potential depth by elastically reducing the device channel height,which boosts the potential depth up to Q~200 k_(B)T,providing practically permanent contactfree trapping.Due to a high-throughput and low-cost fabrication process,ease of use,and excellent trapping performance,our method provides a reliable platform for research and applications in study and manipulation of single nano-objects in fluids.
基金The work was funded by the Swiss Nanoscience Institute,Basel,Switzerland(SNI PhD Graduate School)under project P1310.
文摘Our work focuses on the development of simpler and effective production of nanofluidic devices for high-throughput charged single nanoparticle trapping in an aqueous environment.Single nanoparticle confinement using electrostatic trapping has been an effective approach to study the fundamental properties of charged molecules under a controlled aqueous environment.Conventionally,geometry-induced electrostatic trapping devices are fabricated using SiOx-based substrates and comprise nanochannels imbedded with nanoindentations such as nanopockets,nanoslits and nanogrids.These geometry-induced electrostatic trapping devices can only trap negatively charged particles,and therefore,to trap positively charged particles,modification of the device surface is required.However,the surface modification process of a nanofluidic device is cumbersome and time consuming.Therefore,here,we present a novel approach for the development of surface-modified geometry-induced electrostatic trapping devices that reduces the surface modification time from nearly 5 days to just a few hours.We utilized polydimethylsiloxane for the development of a surface-modified geometry-induced electrostatic trapping device.To demonstrate the device efficiency and success of the surface modification procedure,a comparison study between a PDMS-based geometry-induced electrostatic trapping device and the surface-modified polydimethylsiloxane-based device was performed.The device surface was modified with two layers of polyelectrolytes(1:poly(ethyleneimine)and 2:poly(styrenesulfonate)),which led to an overall negatively charged surface.Our experiments revealed the presence of a homogeneous surface charge density inside the fluidic devices and equivalent trapping strengths for the surface-modified and native polydimethylsiloxane-based geometry-induced electrostatic trapping devices.This work paves the way towards broader use of geometry-induced electrostatic trapping devices in the fields of biosensing,disease diagnosis,molecular analysis,fluid quality control and pathogen detection.
