Surface acoustic wave(SAW)resonator used as wireless sensor was characterized and the parameters of its MBVD(Modified Butterworth-Van Dyke)model were extracted versus temperature.The extracted parameters lead toevalua...Surface acoustic wave(SAW)resonator used as wireless sensor was characterized and the parameters of its MBVD(Modified Butterworth-Van Dyke)model were extracted versus temperature.The extracted parameters lead toevaluate the resonator performancesin terms of Temperature coefficient of frequency(TCF)and quality factor(Q).An antenna was then associated with the SAW resonator and the entire system has been characterized and modeled.The good agreement experiment-simulation allows to define the optimum operating conditions of the wireless sensor.展开更多
Surface acoustic wave （SAW） sensors and micro-electromechanical system （MEMS） technology provide a promising solution for measurement in harsh environments such as gas turbines. In this paper, a SAW resonator （s...Surface acoustic wave （SAW） sensors and micro-electromechanical system （MEMS） technology provide a promising solution for measurement in harsh environments such as gas turbines. In this paper, a SAW resonator （size： 1107μm× 721 μm） based on the AlN/4H-SiC multilayer structure is designed and simulated. A MEMS-compatible fabrication process is employed to fabricate the resonator. The results show that highly c-axis-oriented AlN thin films deposited on the 4H-SiC substrate are obtained, with that the diffraction peak of AlN is 36.10° and the lowest full width at half maximum （FWHM） value is only 1.19°. The test results of the network analyzer are consistent with the simulation curve, which is very encouraging and indicates that our work is a significant attempt to solve the measurement problems mainly including high temperature stability of sensitive structures and the heat transmission of leads in harsh environments. It is essential to get the best performance of SAW resonator, optimize and characterize the behaviors in high temperatures in future research.展开更多
基金supported in part by Oseo(now Bpi-France),Universite de Lorraine(Service Valorisation)and by the“Region Lorraine”via CPER project.
文摘Surface acoustic wave(SAW)resonator used as wireless sensor was characterized and the parameters of its MBVD(Modified Butterworth-Van Dyke)model were extracted versus temperature.The extracted parameters lead toevaluate the resonator performancesin terms of Temperature coefficient of frequency(TCF)and quality factor(Q).An antenna was then associated with the SAW resonator and the entire system has been characterized and modeled.The good agreement experiment-simulation allows to define the optimum operating conditions of the wireless sensor.
基金Project supported by the Tsinghua University Initiative Scientific Research Program(No.20131089351),China
文摘Surface acoustic wave （SAW） sensors and micro-electromechanical system （MEMS） technology provide a promising solution for measurement in harsh environments such as gas turbines. In this paper, a SAW resonator （size： 1107μm× 721 μm） based on the AlN/4H-SiC multilayer structure is designed and simulated. A MEMS-compatible fabrication process is employed to fabricate the resonator. The results show that highly c-axis-oriented AlN thin films deposited on the 4H-SiC substrate are obtained, with that the diffraction peak of AlN is 36.10° and the lowest full width at half maximum （FWHM） value is only 1.19°. The test results of the network analyzer are consistent with the simulation curve, which is very encouraging and indicates that our work is a significant attempt to solve the measurement problems mainly including high temperature stability of sensitive structures and the heat transmission of leads in harsh environments. It is essential to get the best performance of SAW resonator, optimize and characterize the behaviors in high temperatures in future research.
