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TSV阵列在温度循环下的晶格变化对电学性能影响的研究
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作者 梁堃 王月兴 +1 位作者 何志刚 赵伟 《电子元件与材料》 CAS 北大核心 2024年第1期47-54,共8页
针对TSV(Through Silicon Via,硅通孔)热机械可靠性较差且其结构特性变化对电学性能影响情况不明的问题,基于一种TSV阵列叉指电极对样品开展了-55~125℃的温度循环试验,测试了温循后阵列电极的电学性能与边界绝缘性能变化,跟踪测试了TS... 针对TSV(Through Silicon Via,硅通孔)热机械可靠性较差且其结构特性变化对电学性能影响情况不明的问题,基于一种TSV阵列叉指电极对样品开展了-55~125℃的温度循环试验,测试了温循后阵列电极的电学性能与边界绝缘性能变化,跟踪测试了TSV铜柱的几何尺寸变化,对比分析了试验前后TSV结构的形貌和晶格特性等衍化规律。结果表明,温度循环载荷导致了TSV-Cu晶粒向上生长、铜柱体积变大、微观结构缺陷产生以及电学性能退化;此外,还定量地构建了晶格特性变化对TSV阵列电极电学性能影响的关系架构,具有一定的工程意义。 展开更多
关键词 tsv阵列 温度循环 绝缘性能 微观缺陷 晶格特性变化
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一种基于分压电路的绑定后TSV测试方法
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作者 刘军 项晨 +1 位作者 陈田 吴玺 《微电子学与计算机》 2024年第4期132-140,共9页
对硅通孔(Through Silicon Via,TSV)进行绑定后测试可以有效地提升三维集成电路的性能和良率。现有的测试方法虽然对于开路和桥接故障的测试能力较高,但是对于泄漏故障的测试效果较差,并且所需的总测试时间较长。对此,提出了一种基于分... 对硅通孔(Through Silicon Via,TSV)进行绑定后测试可以有效地提升三维集成电路的性能和良率。现有的测试方法虽然对于开路和桥接故障的测试能力较高,但是对于泄漏故障的测试效果较差,并且所需的总测试时间较长。对此,提出了一种基于分压电路的TSV绑定后测试方法。该方法设计了一种分压电路,进行泄漏故障测试时可以形成一条无分支的电流路径,有效提高了对泄漏故障的测试能力。此外,该方法测试开路故障和泄漏故障时的电流路径不会相互干扰,可以同时测试相邻TSV的开路故障和泄漏故障。实验结果表明,该方法可以测试10 kΩ以下的弱泄漏故障,并且在工艺偏差下依然能够保持较高的测试能力。相比同类测试方法,该方法所需面积开销更小,所需总测试时间更少。 展开更多
关键词 三维集成电路 硅通孔 绑定后测试 内建自测试
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基于两步刻蚀工艺的锥形TSV制备方法
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作者 田苗 刘民 +3 位作者 林子涵 付学成 程秀兰 吴林晟 《半导体技术》 CAS 北大核心 2024年第4期316-322,共7页
以硅通孔(TSV)为核心的2.5D/3D封装技术可以实现芯片之间的高速、低功耗和高带宽的信号传输。常见的垂直TSV的制造工艺复杂,容易造成填充缺陷。锥形TSV的侧壁倾斜,开口较大,有利于膜层沉积和铜电镀填充,可降低工艺难度和提高填充质量。... 以硅通孔(TSV)为核心的2.5D/3D封装技术可以实现芯片之间的高速、低功耗和高带宽的信号传输。常见的垂直TSV的制造工艺复杂,容易造成填充缺陷。锥形TSV的侧壁倾斜,开口较大,有利于膜层沉积和铜电镀填充,可降低工艺难度和提高填充质量。在相对易于实现的刻蚀条件下制备了锥形TSV,并通过增加第二步刻蚀来改善锥形TSV形貌。成功制备了直径为10~40μm、孔口为喇叭形的锥形TSV。通过溅射膜层和铜电镀填充,成功实现了直径为15μm、深度为60μm的锥形TSV的连续膜层沉积和完全填充,验证了两步刻蚀工艺的可行性和锥形TSV在提高膜层质量和填充效果方面的优势。为未来高密度封装领域提供了一种新的TSV制备工艺,在降低成本的同时提高了2.5D/3D封装技术的性能。 展开更多
关键词 硅通孔(tsv) 锥形 种子层 电镀填充 薄膜沉积
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基于In Silicon模拟消化的北极虾DPP-Ⅳ抑制肽活性分析
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作者 刘浩思 徐春明 +3 位作者 田源 韩爱萍 刘孝飞 李振华 《中国食品添加剂》 CAS 2024年第1期127-135,共9页
北极虾具有很高的营养价值,在食品领域已引起越来越多的关注。对北极虾蛋白进行In Silicon模拟消化获得寡肽,通过PeptideRanker活性评分及理化性质分析,从中筛选出具有潜在生物活性的寡肽。使用ToxinPred分析和BIOPEP-UWM生物活性预测,... 北极虾具有很高的营养价值,在食品领域已引起越来越多的关注。对北极虾蛋白进行In Silicon模拟消化获得寡肽,通过PeptideRanker活性评分及理化性质分析,从中筛选出具有潜在生物活性的寡肽。使用ToxinPred分析和BIOPEP-UWM生物活性预测,发现部分寡肽具有二肽基肽酶-Ⅳ(dipeptidyl peptidase-Ⅳ,DPP-Ⅳ)抑制活性,最终确定WFP(一种三肽,Trp-Phe-Pro)具有最优的DPP-Ⅳ抑制活性肽。分子对接表明,WFP和DPP-Ⅳ能够形成稳定的复合物,其结合能为-6.93 kcal/mol,进一步研究表明,WFP通过与DPP-Ⅳ S1、S2、S3三个活性口袋中的9个氨基酸残基发生相互作用而抑制其活性。本研究为阐释北极虾营养价值及生物活性肽的开发提供了理论依据。 展开更多
关键词 In silicon 分子对接 DPP-Ⅳ 细胞色素C氧化酶亚基Ⅰ 寡肽
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Silicone oil as a corneal lubricant to reduce corneal edema and improve visualization during
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作者 Dan-Yang Che Zhu-Lin Chan +1 位作者 Ji-Bo Zhou Dong-Qing Zhu 《International Journal of Ophthalmology(English edition)》 SCIE CAS 2024年第1期92-96,共5页
AIM:To evaluate the efficacy and safety of silicone oil(SO)as a corneal lubricant to improve visualization during vitrectomy.METHODS:Patients who underwent vitreoretinal surgery were divided into two groups.Group 1 wa... AIM:To evaluate the efficacy and safety of silicone oil(SO)as a corneal lubricant to improve visualization during vitrectomy.METHODS:Patients who underwent vitreoretinal surgery were divided into two groups.Group 1 was operated on with initial SO(Oxane 5700)as a corneal lubricant.Group 2 was operated on with initial lactated ringer’s solution(LRS)and then replaced with SO as required.Fundus clarity was scored during the surgery.Fluorescein staining was performed to determine the damage to corneal epithelium.RESULTS:Totally 114 eyes of 114 patients were included.Single SO use maintained a clear cornea and provided excellent visualization of surgical image.In group 1,the fundus clarity was grade 3 in 41/45 eyes and grade 2 in 4/45 eyes.In group 2,corneal edema frequently occurred after initial LRS use.The fundus clarity was grade 3 in 19/69 eyes,2 in 37/69 eyes and 1 in 13/69 eyes(P<0.05).SO was applied in 29 eyes of initial LRS use with subsequent corneal edema,which eliminated the corneal edema in 26 eyes.Corneal fluorescein staining score in group 1 was 0 in 28 eyes,1 in 11 eyes and 2 in 6 eyes,and 40,20 and 9,respectively,in group 2(all P>0.05).CONCLUSION:The use of SO as a corneal lubricant is effective and safe for preserving and improving corneal clarity and providing clear surgical field during vitrectomy. 展开更多
关键词 silicone oil corneal lubricant corneal edema VITRECTOMY
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Regulation of 2-acetyl-1-pyrroline and grain quality in early-season indica fragrant rice by nitrogen and silicon fertilization under different plantation methods
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作者 Yongjian Chen Lan Dai +7 位作者 Siren Cheng Yong Ren Huizi Deng Xinyi Wang Yuzhan Li Xiangru Tang Zaiman Wang Zhaowen Mo 《Journal of Integrative Agriculture》 SCIE CAS CSCD 2024年第2期511-535,共25页
Fragrant rice has a high market value,and it is a popular rice type among consumers owing to its pleasant flavor.Plantation methods,nitrogen(N)fertilizers,and silicon(Si)fertilizers can affect the grain yield and frag... Fragrant rice has a high market value,and it is a popular rice type among consumers owing to its pleasant flavor.Plantation methods,nitrogen(N)fertilizers,and silicon(Si)fertilizers can affect the grain yield and fragrance of fragrant rice.However,the core commercial rice production attributes,namely the head rice yield(HRY)and 2-acetyl-1-pyrroline(2-AP)content of fragrant rice,under various nitrogen and silicon(N-Si)fertilization levels and different plantation methods remain unknown.The field experiment in this study was performed in the early seasons of 2018 and 2019 with two popular indica fragrant rice cultivars(Yuxiangyouzhan and Xiangyaxiangzhan).They were grown under six N-Si fertilization treatments(combinations of two levels of Si fertilizer,0 kg Si ha^(−1)(Si0)and 150 kg Si ha^(−1)(Si1),and three levels of N fertilizer,0 kg N ha^(−1)(N0),150 kg N ha^(−1)(N1),and 220 kg N ha^(−1)(N2))and three plantation methods(artificial transplanting(AT),mechanical transplanting(MT),and mechanical direct-seeding(MD)).The results showed that the N-Si fertilization treatments and all the plantation methods significantly affected the HRY and 2-AP content and related parameters of the two different fragrant rice cultivars.Compared with the Si0N0 treatment,the N-Si fertilization treatments resulted in higher HRY and 2-AP contents.The rates of brown rice,milled rice,head rice,and chalky rice of the fragrant rice also improved with the N-Si fertilization treatments.The N-Si fertilization treatments increased the activities of N metabolism enzymes and the accumulation of N and Si in various parts of the fragrant rice,and affected their antioxidant response parameters.The key parameters for the HRY and 2-AP content were assessed by redundancy analysis.Furthermore,the structural equation model revealed that the Si and N accumulation levels indirectly affected the HRY by affecting the N metabolism enzyme activity,N use efficiency,and grain quality of fragrant rice.Moreover,high N and Si accumulation directly promoted the 2-AP content or affected the antioxidant response parameters and indirectly regulated 2-AP synthesis.The interactions of the MT method with the N-Si fertilization treatments varied in the fragrant rice cultivars in terms of the HRY and 2-AP content,whereas the MD method was beneficial to the 2-AP content in both fragrant rice cultivars under the N-Si fertilization treatments. 展开更多
关键词 fragrant rice 2-AP content head rice yield mechanical planting NITROGEN silicon
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Silicon Mitigates Aluminum Toxicity of Tartary Buckwheat by Regulating Antioxidant Systems
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作者 Anyin Qi Xiaonan Yan +10 位作者 Yuqing Liu Qingchen Zeng Hang Yuan Huange Huang Chenggang Liang Dabing Xiang Liang Zou Lianxin Peng Gang Zhao Jingwei Huang Yan Wan 《Phyton-International Journal of Experimental Botany》 SCIE 2024年第1期1-13,共13页
Aluminum (Al) toxicity is a considerable factor limiting crop yield and biomass in acidic soil. Tartary buckwheatgrowing in acidic soil may suffer from Al poisoning. Here, we investigated the influence of Al stress on... Aluminum (Al) toxicity is a considerable factor limiting crop yield and biomass in acidic soil. Tartary buckwheatgrowing in acidic soil may suffer from Al poisoning. Here, we investigated the influence of Al stress on the growthof tartary buckwheat seedling roots, and the alleviation of Al stress by silicon (Si), as has been demonstrated inmany crops. Under Al stress, root growth (total root length, primary root length, root tips, root surface area, androot volume) was significantly inhibited, and Al and malondialdehyde (MDA) accumulated in the root tips. At thesame time, catalase (CAT) and ascorbate peroxidase activities, polyphenols, flavonoids, and 1,1-diphenyl-2-picrylhydrazyl(DPPH) and 2,2′-azinobis-(3-ethylbenzthiazoline-6-sulphonate) (ABTS) free-radical scavenging abilitywere significantly decreased. After the application of Si, root growth, Al accumulation, and oxidative damage wereimproved. Compared to Al-treated seedlings, the contents of ·O2− and MDA decreased by 29.39% and 25.22%,respectively. This was associated with Si-induced increases in peroxidase and CAT enzyme activity, flavonoidcompounds, and free-radical scavenging (DPPH and ABTS). The application of Si therefore has positive effectson Al toxicity in tartary buckwheat roots by reducing Al accumulation in the roots and maintaining oxidationhomeostasis. 展开更多
关键词 Tartary buckwheat aluminum stress silicon root growth oxidative stress
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Analysis on Demonstration Application of Silicon Fertilizer in Field Cultivation of Rice
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作者 Fan YANG Lingyun DAI 《Agricultural Biotechnology》 2024年第1期24-27,共4页
[Objectives]This study was conducted to investigate the scientific application of silicon fertilizer in rice cultivation,one of the staple crops.[Methods]In 2022,Yandu District carried out a special experiment and fie... [Objectives]This study was conducted to investigate the scientific application of silicon fertilizer in rice cultivation,one of the staple crops.[Methods]In 2022,Yandu District carried out a special experiment and field demonstration study on the effects of foliar application of Zhengda water-soluble silicon fertilizer on rice production.[Results]The preliminary results showed that①Zhengda water-soluble silicon fertilizer could effectively improve the growth and development of rice and improve the population quality.The peak number of tillers,productive tiller percentage,number of effective panicles and number of effective grains per panicle increased by 6.7%,5.8%,5.5%,and 1.2%,respectively.②The yield and processing quality were improved.After applying silicon fertilizer,the yield per unit area increased by about 6.8%,and the unpolished rice yield,milled rice yield and head rice yield increased by 0.7%,1.94%and 2.15%respectively.[Conclusions]The demonstration application of silicon fertilizer in field cultivation of rice in Yandu District further proves previous research conclusions and has important practical significance. 展开更多
关键词 RICE silicon fertilizer Foliar application EFFECT
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Endophthalmitis in silicone oil-filled eye: A case report
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作者 Hui-Chao Yan Ze-Lu Wang +5 位作者 Wen-Zhen Yu Ming-Wei Zhao Jian-Hong Liang Hong Yin Xuan Shi Heng Miao 《World Journal of Clinical Cases》 SCIE 2024年第1期163-168,共6页
BACKGROUND Endophthalmitis occurring in silicone oil-filled eyes is a very rare occurrence,with reported incidence rates ranging between 0.07%and 0.039%.Traditional methods of management of infectious endophthalmitis ... BACKGROUND Endophthalmitis occurring in silicone oil-filled eyes is a very rare occurrence,with reported incidence rates ranging between 0.07%and 0.039%.Traditional methods of management of infectious endophthalmitis include the removal of silicone oil,washout of the vitreous cavity,administration of intravitreal antibiotics,and reinjection of silicone oil.CASE SUMMARY Herein,we report the case of a 39-year-old man with unilateral endophthalmitis after pars plana vitrectomy and silicone oil tamponade.Intravitreal injections of full-dose antibiotics and anterior chamber washout were used to treat the patient.No signs of retinal toxicity were observed during the follow-up period.CONCLUSION Intravitreal full-dose antibiotic injections and anterior chamber washout are promising alternatives to traditional therapies for endophthalmitis in silicone oilfilled eyes. 展开更多
关键词 ENDOPHTHALMITIS Intravitreal injection silicone oil-filled eye Pars plana vitrectomy WASHOUT Case report
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Preparation and Analysis of Carbon Fiber-Silicon Carbide Thermally Conductive Asphalt Concrete
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作者 Zhiyong Yang Enjie Hu +3 位作者 Lei Xi Zhi Chen Feng Xiong Chuanhai Zhan 《Fluid Dynamics & Materials Processing》 EI 2024年第4期705-723,共19页
An experimental investigation into the thermal conductivity of CF-SiC two-phase composite asphalt concrete is presented.The main objective of this study was to verify the possibility of using SiC powder instead of min... An experimental investigation into the thermal conductivity of CF-SiC two-phase composite asphalt concrete is presented.The main objective of this study was to verify the possibility of using SiC powder instead of mineral powder as the thermal conductive filler to prepare a new type of asphalt concrete and improve the efficiency of electrothermal snow and ice melting systems accordingly.The thermal conductivity of asphalt concrete prepared with different thermally conductive fillers was tested by a transient plane source method,and the related performances were measured.Then the temperature rise rate and surface temperature were studied through field heating tests.Finally,the actual ice melting efficiency of the thermally conductive asphalt concrete was evaluated using an effective electrothermal system.As shown by the experimental results,the composite made of SiC powder and carbon fiber has a high thermal conductivity.When SiC replaces mineral powder,the thermal conductivity of the asphalt mixture increases first and then decreases with the increase of carbon fiber content.In the present study,in particular,the thermal conductivity attained a peak when the carbon fiber content was 0.2%of the aggregate mass. 展开更多
关键词 Carbon fiber silicon carbide thermally conductive asphalt concrete road performance electrothermal snow melting
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Modeling and Simulation of Heterojunction Solar Cell with Mono Crystalline Silicon
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作者 Sajid Ullah Ayesha Gulnaz Guangwei Wang 《Journal of Applied Mathematics and Physics》 2024年第3期997-1020,共24页
The monocrystalline silicon is a promising material that could be used in solar cells that convert light into electricity. Although the cost of ordinary silicon (Si) solar cells has decreased significantly over the pa... The monocrystalline silicon is a promising material that could be used in solar cells that convert light into electricity. Although the cost of ordinary silicon (Si) solar cells has decreased significantly over the past two decades, the conversion efficiency of these cells has remained relatively high. While solar cells have a great potential as a device of renewable energy, the high cost they incur per Watt continues to be a significant barrier to their widespread implementation. As a consequence, it is vital to conduct research into alternate materials that may be used in the construction of solar cells. The heterojunction solar cell (HJSC), which is based on n-type zinc oxide (n-ZnO) and p-type silicon (p-Si), is one of the numerous alternatives of the typical Si single homojunction solar cell. There are many deficiencies that can be found in the published research on n-ZnO/p-Si heterojunction solar cell. Inconsistencies in the stated value of open circuit voltage (V<sub>oc</sub>) of the solar cell are one example of deficiency. The absence of a full theoretical study to evaluate the potential of the solar cell structure is another deficiency that can be found in these researches. A lower value of experimentally obtained V<sub>OC</sub> in comparison to the theoretical prediction based on the band-gap between n-ZnO and p-Si. There needs to be more consensus among scientists regarding the optimal conditions for the growth of zinc oxide. Many software’s are available for simulating and optimizing the solar cells based on these parameters. For this purpose, in this dissertation, I provide computational results relevant to n-ZnO/p-Si HJSC to overcome deficiencies that have been identified. While modeling and simulating the potential of the solar cell structure with AFORS-HET, it is essential to consider the constraints that exist in the real world. AFORS-HET was explicitly designed to mimic the multilayer solar cell arrangement. In AFORS-HET, we can add up to seven layers for solar cell layout. By using this software, we can figure out the open circuit voltage (V<sub>OC</sub>), the short circuit current (J<sub>SC</sub>), the quantum efficiency (QE, %), the heterojunction energy band structure, and the power conversion efficiency (PCE). 展开更多
关键词 Heterojunction Solar Cell silicon Monocrystalline DEFICIENCIES AFORS-HET OPTIMIZATION Open Circuit Voltage Quantum Efficiency
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Ultrafast dynamics of femtosecond laser-induced high spatial frequency periodic structures on silicon surfaces
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作者 Ruozhong Han Yuchan Zhang +6 位作者 Qilin Jiang Long Chen Kaiqiang Cao Shian Zhang Donghai Feng Zhenrong Sun Tianqing Jia 《Opto-Electronic Science》 2024年第3期33-46,共14页
Femtosecond laser-induced periodic surface structures(LIPSS)have been extensively studied over the past few decades.In particular,the period and groove width of high-spatial-frequency LIPSS(HSFL)is much smaller than t... Femtosecond laser-induced periodic surface structures(LIPSS)have been extensively studied over the past few decades.In particular,the period and groove width of high-spatial-frequency LIPSS(HSFL)is much smaller than the diffraction limit,making it a useful method for efficient nanomanufacturing.However,compared with the low-spatial-frequency LIPSS(LSFL),the structure size of the HSFL is smaller,and it is more easily submerged.Therefore,the formation mechanism of HSFL is complex and has always been a research hotspot in this field.In this study,regular LSFL with a period of 760 nm was fabricated in advance on a silicon surface with two-beam interference using an 800 nm,50 fs femtosecond laser.The ultrafast dynamics of HSFL formation on the silicon surface of prefabricated LSFL under single femtosecond laser pulse irradiation were observed and analyzed for the first time using collinear pump-probe imaging method.In general,the evolution of the surface structure undergoes five sequential stages:the LSFL begins to split,becomes uniform HSFL,degenerates into an irregular LSFL,undergoes secondary splitting into a weakly uniform HSFL,and evolves into an irregular LSFL or is submerged.The results indicate that the local enhancement of the submerged nanocavity,or the nanoplasma,in the prefabricated LSFL ridge led to the splitting of the LSFL,and the thermodynamic effect drove the homogenization of the splitting LSFL,which evolved into HSFL. 展开更多
关键词 laser-induced periodic surface structures(LIPSS) local field enhancement collinear pump-probe imaging silicon high spatial frequency periodic structures
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Research on Silicon Carbide Dispersion-Reinforced Hypereutectic Aluminum-Silicon Electronic Packaging Materials
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作者 Ruixi Guo Yunhao Hua Tianze Jia 《Journal of Electronic Research and Application》 2024年第2期86-94,共9页
The objective of this study is to improve the mechanical properties and machining performance of high thermal conductivity and low expansion silicon carbide dispersion-strengthened hypereutectic aluminum-silicon elect... The objective of this study is to improve the mechanical properties and machining performance of high thermal conductivity and low expansion silicon carbide dispersion-strengthened hypereutectic aluminum-silicon electronic packaging materials to meet the needs of aviation,aerospace,and electronic packaging fields.We used the powder metallurgy method and high-temperature hot pressing technology to prepare SiC/Al-Si composite materials with different SiC contents(5vol%,10vol%,15vol%,and 20vol%).The results showed that as the SiC content increased,the tensile strength of the composite material first increased and then decreased.The tensile strength was the highest when the SiC content was 15%;the sintering temperature significantly affected the composite material’s structural density and mechanical properties.Findings indicated 700℃was the optimal sintering and the optimal SiC content of SiC/Al-Si composite materials was between 10%and 15%.Besides,the sintering temperature should be strictly controlled to improve the material’s structural density and mechanical properties. 展开更多
关键词 silicon carbide Electronic packaging materials Powder metallurgy Mechanical properties Composite materials
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含丙二醇的复合有机抑制剂应用于TSV镀铜工艺的研究
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作者 史筱超 于仙仙 王溯 《电镀与涂饰》 CAS 北大核心 2024年第1期43-49,共7页
[目的]硅通孔(TSV)电镀铜填充一般采用PEG(聚乙二醇)类有机化合物抑制剂,但往往存在电镀时间长、易产生空洞、面铜较厚、退火后晶界间缺陷多等问题。[方法]开发了一种新型含丙二醇的复合有机抑制剂,研究了采用它时的TSV填充模式,退火后... [目的]硅通孔(TSV)电镀铜填充一般采用PEG(聚乙二醇)类有机化合物抑制剂,但往往存在电镀时间长、易产生空洞、面铜较厚、退火后晶界间缺陷多等问题。[方法]开发了一种新型含丙二醇的复合有机抑制剂,研究了采用它时的TSV填充模式,退火后孔内镀层的结晶状态,以及镀层的杂质含量。[结果]该抑制剂对TSV的填充效果明显优于传统抑制剂,与小分子含硫化合物加速剂复配使用时可实现“自下而上”的均匀填充,且面铜平整,无微孔、气泡等缺陷存在。[结论]该复合有机抑制剂具有很好的工业化应用潜力。 展开更多
关键词 硅通孔 电镀铜 丙二醇 有机抑制剂 自下而上填充
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基于红外图像分析的TSV内部缺陷识别方法研究
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作者 聂磊 武丽丽 +2 位作者 黄一凡 刘梦然 刘江林 《仪表技术与传感器》 CSCD 北大核心 2023年第1期38-43,共6页
TSV三维封装内部缺陷难以用传统方法检测。然而其内部缺陷的存在会导致热阻发生变化,对系统温度分布产生影响,因此可以通过对红外图像的分析达到对缺陷进行识别及定位的目的。文中研究了缺陷对温度场的影响,分别通过理论分析、有限元仿... TSV三维封装内部缺陷难以用传统方法检测。然而其内部缺陷的存在会导致热阻发生变化,对系统温度分布产生影响,因此可以通过对红外图像的分析达到对缺陷进行识别及定位的目的。文中研究了缺陷对温度场的影响,分别通过理论分析、有限元仿真及实验方法对TSV三维封装系统进行了热-电耦合分析,得到了缺陷铜柱类型及位置不同时的温度分布数据集,搭建了卷积神经网络(CNN)模型对2组数据集单独进行分类预测。实验结果表明:利用仿真数据集与试验数据集分别对CNN模型进行特征训练,得到的缺陷识别与定位准确率为98.65%,98.36%。由上可知,缺陷类型及位置的不同会对温度场产生不同影响,利用CNN模型对TSV红外热图像进行特征训练可以有效识别与定位内部缺陷。 展开更多
关键词 硅通孔 三维封装 内部缺陷 红外图像 卷积神经网络 识别与定位
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用于高密度三维集成的TSV设计
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作者 乔靖评 贾士奇 +7 位作者 刘瑞文 焦斌斌 陈静宇 孔延梅 叶雨欣 杜向斌 云世昌 余立航 《微纳电子技术》 CAS 北大核心 2023年第11期1857-1862,共6页
三维集成技术的发展需要高密度和高深宽比的硅通孔(TSV)阵列。由于TSV填充材料与TSV衬底材料之间的热膨胀系数不匹配,TSV在使用或加工过程中会出现严重的热应力问题,造成器件失效甚至是晶圆损坏。设计了一种具有低热应力和高深宽比的中... 三维集成技术的发展需要高密度和高深宽比的硅通孔(TSV)阵列。由于TSV填充材料与TSV衬底材料之间的热膨胀系数不匹配,TSV在使用或加工过程中会出现严重的热应力问题,造成器件失效甚至是晶圆损坏。设计了一种具有低热应力和高深宽比的中空TSV。单个TSV呈现橄榄球形状,TSV中部直径最大,其次是顶部的直径,最小的是底部直径。采用金属钨进行空心填充,因为钨的热膨胀系数与硅衬底的更匹配。当出现热失配时,空心填充使得空心结构为填充金属与硅的热膨胀提供了缓冲空间,能够大幅度减小TSV衬底所受到的热应力。仿真结果表明沿着TSV轴向方向和径向方向,热应力分别减小了62.4%和60.5%。基于设计的TSV结构,开发了一套基于8英寸(1英寸=2.54 cm)硅晶圆的工艺流程,成功实现了1600/mm^(2)超高密度阵列的加工制作,能够应用于高密度三维集成。 展开更多
关键词 硅通孔(tsv) 三维集成 热应力 高密度 高深宽比
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基于层级多尺度方法的TSV晶圆翘曲预测模型研究 被引量:1
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作者 孙国立 秦飞 +1 位作者 代岩伟 李宝霞 《微电子学与计算机》 2023年第1期130-137,共8页
随着电子封装技术的发展,以晶圆级封装为代表的先进封装技术对集成密度、封装尺寸,及其制造和服役可靠性提出了更高的要求.TSV晶圆封装结构具有典型的结构多尺度特征,这对有限元模型的建立带来很大挑战.为此,本文提出了一种层级多尺度方... 随着电子封装技术的发展,以晶圆级封装为代表的先进封装技术对集成密度、封装尺寸,及其制造和服役可靠性提出了更高的要求.TSV晶圆封装结构具有典型的结构多尺度特征,这对有限元模型的建立带来很大挑战.为此,本文提出了一种层级多尺度方法,并验证了所提方法的有效性.围绕上述研究内容,首先,阐明了层级多尺度方法的原理和计算流程;其次采用层级多尺度方法建立了不同TSV晶圆封装工艺下的有限元模型,模拟研究了TSV转接板工艺制程中晶圆的翘曲演化,并与实验结果相对比;最后,研究了分区数量对层级多尺度方法精度的影响.研究结果表明,计算规模相当情况下,随着分区数量的增加,计算误差明显降低.与实验结果的对比表明,该方法有相对较高的晶圆翘曲预测精度.此外,本文发展的层级多尺度方法具有一定的可移植性,可以应用到其它同类具有多尺度特征的封装结构可靠性分析中,为解决大规模晶圆级封装翘曲预测问题提供了一种新的解决思略. 展开更多
关键词 tsv晶圆 封装 层级多尺度方法 翘曲 有限元模型
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TSV关键工艺设备特点及国产化展望 被引量:2
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作者 褚晓虹 陈峰 +1 位作者 胡旭 沈祥国 《中国设备工程》 2023年第3期18-20,共3页
TSV是目前半导体制造业中最为先进的技术之一,已经应用于很多产品生产。实现其制程的关键设备选择与工艺选择息息相关,在某种程度上直接决定了TSV的性能优劣。本文笔者在综述TSV的工艺流程和关键技术基础上,对其中深孔刻蚀、气相沉积、... TSV是目前半导体制造业中最为先进的技术之一,已经应用于很多产品生产。实现其制程的关键设备选择与工艺选择息息相关,在某种程度上直接决定了TSV的性能优劣。本文笔者在综述TSV的工艺流程和关键技术基础上,对其中深孔刻蚀、气相沉积、通孔填充、化学机械抛光(CMP)等几种关键工艺设备进行了详细介绍,对在确保满足生产工艺要求的前提下不同设备的选型应用及对设备安装的厂务需求提出了相关建议,同时对TSV设备做出国产化展望。 展开更多
关键词 tsv关键工艺 设备特点 选型 国产化展望
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三维集成TSV垂直开关研究
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作者 刘乐 王凤娟 +2 位作者 文炳成 余宁梅 杨媛 《电子器件》 CAS 北大核心 2023年第6期1469-1473,共5页
针对三维集成中的TSV垂直开关,提出了其阈值电压和漏极电流的解析模型。采用基于有限元法(FEM)的Sentaurus软件进行解析模型验证。分析了三维集成TSV垂直开关的优点以及不同尺寸的TSV高度、半径及氧化层厚度对TSV垂直开关的阈值电压及... 针对三维集成中的TSV垂直开关,提出了其阈值电压和漏极电流的解析模型。采用基于有限元法(FEM)的Sentaurus软件进行解析模型验证。分析了三维集成TSV垂直开关的优点以及不同尺寸的TSV高度、半径及氧化层厚度对TSV垂直开关的阈值电压及漏极电流的影响。结果表明:TSV高度对阈值电压无影响,漏极电流增大;TSV的直径的增大会导致阈值电压减小,漏极电流增大;TSV氧化层厚度的增大会导致阈值电压增大,漏极电流减小。并且有限元法仿真与解析模型计算的误差均小于10%,验证了该模型的准确性,为TSV垂直开关的应用提供了重要的理论依据。 展开更多
关键词 tsv tsv垂直开关 三维集成电路 解析模型
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3D-IC类同轴屏蔽型TSV的热力响应分析及结构优化
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作者 孙萍 王志敏 +1 位作者 黄秉欢 巩亮 《半导体技术》 CAS 北大核心 2023年第9期818-826,共9页
硅通孔(TSV)是解决三维集成电路(3D-IC)互连延迟问题的关键技术之一。TSV内部结构的变形失效,大多是由循环温度载荷产生的交变应力引起的。从信号完整性角度考虑,建立了接地TSV形状分别为圆柱形和椭圆柱形的类同轴屏蔽型TSV模型。基于最... 硅通孔(TSV)是解决三维集成电路(3D-IC)互连延迟问题的关键技术之一。TSV内部结构的变形失效,大多是由循环温度载荷产生的交变应力引起的。从信号完整性角度考虑,建立了接地TSV形状分别为圆柱形和椭圆柱形的类同轴屏蔽型TSV模型。基于最大Mises应力准则,对比分析了循环温度载荷对2种类同轴屏蔽型TSV热应力-应变的影响及最大应力点的主要失效形式。最后综合考虑TSV的几何参数对导体和凸块危险点Mises应力的影响,对椭圆柱形类同轴屏蔽型TSV结构进行多目标优化,将2种最优结构中2个危险点的Mises应力分别降低15.10%、17.18%和18.89%、6.74%。为提高TSV热可靠性的优化设计提供参考。 展开更多
关键词 三维集成电路(3D-IC) 热管理 屏蔽型硅通孔(tsv) 有限元仿真 热力响应 多目标优化
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