A single-axis normal-tracking measurement system is proposed, which can solve the problem of measuring large curved surface. According to Collins formula, the tilt dependent error of the measurement system is studied,...A single-axis normal-tracking measurement system is proposed, which can solve the problem of measuring large curved surface. According to Collins formula, the tilt dependent error of the measurement system is studied, which uses Gaussian beam as the light source. By theoretical analysis and numerical simulation, the influence of the error is presented. The results show that there is the difference between point source and Gaussian beam for differential confocal microscopy. The opti-mal diameter of pinhole can be determined by the mathematical model and the actual parameters of the measurement system. The optimal pinhole diameter of this measurement system is 20 to 35 pm for 633 nm wavelength light source.展开更多
Low-k interconnection is one of the key concepts in the development of high-speed ultra-large-scale integrated（ULSI） circuits.To determine the Young＇s modulus of ultra thin,low hardness and fragile low-k porous fil...Low-k interconnection is one of the key concepts in the development of high-speed ultra-large-scale integrated（ULSI） circuits.To determine the Young＇s modulus of ultra thin,low hardness and fragile low-k porous films more accurately,a wideband differential confocal configured laser detected and laser-generated surface acoustic wave（DCC/LD LSAW） detection system is developed.Based on the light deflection sensitivity detection principle, with a novel differential confocal configuration,this DCC/LD LSAW system extends the traditional laser generated surface acoustic wave（LSAW） detection system＇s working frequency band,making the detected SAW signals less affected by the hard substrate and providing more information about the thin porous low-k film under test.Thus it has the ability to obtain more accurate measurement results.Its detecting principle is explained and a sample of porous silica film on Si（100） is tested.A procedure of fitting an experimental SAW dispersion curve with theoretical dispersion curves was carried out in the high frequency band newly achieved by the DCC/LD LSAW system.A comparison of the measurement results of the DCC/LD LSAW with those from the traditional LSAW shows that this newly developed DCC/LD LSAW can dramatically improve the Young＇s modulus measuring accuracy of such porous low-k films.展开更多
基金Quantity Dissemination and Quality Safety Project of AQSIQ(No.ALC1501)National Key Scientific Instrument and Equipment Development Projects,China(No.2013YQ170539)
文摘A single-axis normal-tracking measurement system is proposed, which can solve the problem of measuring large curved surface. According to Collins formula, the tilt dependent error of the measurement system is studied, which uses Gaussian beam as the light source. By theoretical analysis and numerical simulation, the influence of the error is presented. The results show that there is the difference between point source and Gaussian beam for differential confocal microscopy. The opti-mal diameter of pinhole can be determined by the mathematical model and the actual parameters of the measurement system. The optimal pinhole diameter of this measurement system is 20 to 35 pm for 633 nm wavelength light source.
基金Project supported by the National Science Foundation of China(Nos.60723004,61072013)
文摘Low-k interconnection is one of the key concepts in the development of high-speed ultra-large-scale integrated（ULSI） circuits.To determine the Young＇s modulus of ultra thin,low hardness and fragile low-k porous films more accurately,a wideband differential confocal configured laser detected and laser-generated surface acoustic wave（DCC/LD LSAW） detection system is developed.Based on the light deflection sensitivity detection principle, with a novel differential confocal configuration,this DCC/LD LSAW system extends the traditional laser generated surface acoustic wave（LSAW） detection system＇s working frequency band,making the detected SAW signals less affected by the hard substrate and providing more information about the thin porous low-k film under test.Thus it has the ability to obtain more accurate measurement results.Its detecting principle is explained and a sample of porous silica film on Si（100） is tested.A procedure of fitting an experimental SAW dispersion curve with theoretical dispersion curves was carried out in the high frequency band newly achieved by the DCC/LD LSAW system.A comparison of the measurement results of the DCC/LD LSAW with those from the traditional LSAW shows that this newly developed DCC/LD LSAW can dramatically improve the Young＇s modulus measuring accuracy of such porous low-k films.
