The mechanism of the femtosecond laser ablation of semiconductors is investigated. The collision pro cess of free electrons in a conduction band is depicted by the test particle method, and a theoretical model of none...The mechanism of the femtosecond laser ablation of semiconductors is investigated. The collision pro cess of free electrons in a conduction band is depicted by the test particle method, and a theoretical model of nonequilibrium electron transport on the femtosecond timescale is proposed based on the FokkerPlanck equa tion. This model considers the impact of inverse bremsstrahlung on the laser absorption coefficient, and gives the expressions of electron drift and diffusion coefficients in the presence of screened Coulomb potential. Numerical simulations are conducted to obtain the nonequilibrium distribution function of the electrons. The femtosecond laser ablation thresholds are then calculated accordingly, and the results are in good agreement with the experimental results. This is followed by a discussion on the impact of laser parameters on the ablation of semiconductors.展开更多
The multi-charged sulfur ions of Sq^+ (q ≤ 6) have been generated when hydrogen sulfide cluster beams are irradiated by a nanosecond laser of 1064 and 532 nm with an intensity of 10^10- 10^12W.cm^-2. S^6+ is the ...The multi-charged sulfur ions of Sq^+ (q ≤ 6) have been generated when hydrogen sulfide cluster beams are irradiated by a nanosecond laser of 1064 and 532 nm with an intensity of 10^10- 10^12W.cm^-2. S^6+ is the dominant multicharged species at 1064 nm, while S^4+, S^3+ and S^2+ ions are the main multi-charged species at 532 nm. A three-step model (i.e., multiphoton ionization triggering, inverse bremsstrahlung heating, electron collision ionizing) is proposed to explain the generation of these multi-charged ions at the laser intensity stated above. The high ionization level of the clusters and the increasing charge state of the ion products with increasing laser wavelength are supposed mainly due to the rate-limiting step, i.e., electron heating by absorption energy from the laser field via inverse bremsstrahlung, which is proportional to λ2,λA being the laser wavelength.展开更多
A Fokker-Planck code is developed based upon Epperlein's scheme to investigate laser-produced plasmas in relevance to inertial confinement fusion. The equations are integrated implicitly by time-splitting method. Thr...A Fokker-Planck code is developed based upon Epperlein's scheme to investigate laser-produced plasmas in relevance to inertial confinement fusion. The equations are integrated implicitly by time-splitting method. Three test problems are simulated to show the versatility of the code. The results are in good agreement with the existing simulations.展开更多
文摘The mechanism of the femtosecond laser ablation of semiconductors is investigated. The collision pro cess of free electrons in a conduction band is depicted by the test particle method, and a theoretical model of nonequilibrium electron transport on the femtosecond timescale is proposed based on the FokkerPlanck equa tion. This model considers the impact of inverse bremsstrahlung on the laser absorption coefficient, and gives the expressions of electron drift and diffusion coefficients in the presence of screened Coulomb potential. Numerical simulations are conducted to obtain the nonequilibrium distribution function of the electrons. The femtosecond laser ablation thresholds are then calculated accordingly, and the results are in good agreement with the experimental results. This is followed by a discussion on the impact of laser parameters on the ablation of semiconductors.
基金Project supported by the National Natural Science Foundation of China (Grant No 20573111) and partly supported by the Center for Computational Science, Hefei Institutes of Physical Sciences, China (Grant No 0331405002).
文摘The multi-charged sulfur ions of Sq^+ (q ≤ 6) have been generated when hydrogen sulfide cluster beams are irradiated by a nanosecond laser of 1064 and 532 nm with an intensity of 10^10- 10^12W.cm^-2. S^6+ is the dominant multicharged species at 1064 nm, while S^4+, S^3+ and S^2+ ions are the main multi-charged species at 532 nm. A three-step model (i.e., multiphoton ionization triggering, inverse bremsstrahlung heating, electron collision ionizing) is proposed to explain the generation of these multi-charged ions at the laser intensity stated above. The high ionization level of the clusters and the increasing charge state of the ion products with increasing laser wavelength are supposed mainly due to the rate-limiting step, i.e., electron heating by absorption energy from the laser field via inverse bremsstrahlung, which is proportional to λ2,λA being the laser wavelength.
基金National Natural Science Foundation of China(Nos.10375064,10575102,10625523)Nation High-Tech ICF Committee
文摘A Fokker-Planck code is developed based upon Epperlein's scheme to investigate laser-produced plasmas in relevance to inertial confinement fusion. The equations are integrated implicitly by time-splitting method. Three test problems are simulated to show the versatility of the code. The results are in good agreement with the existing simulations.