The influence of outside inertial shock combined with RF signal voltages on the properties of a shunt capacitive MEMS switch encapsulated in a low vacuum environment is analyzed considering the damping of the air arou...The influence of outside inertial shock combined with RF signal voltages on the properties of a shunt capacitive MEMS switch encapsulated in a low vacuum environment is analyzed considering the damping of the air around the MEMS switch membrane. An analytical expression that approximately computes the displacement induced by outside shock is obtained. According to the expression, the minimum required mechanical stiffness constant of an MEMS switch beam in some maximum tolerated insertion loss condition and some external inertial shock environment or the insertion loss induced by external inertial shock can also be obtained. The influence is also illustrated with an RF MEMS capacitive switch example,which shows that outside environment factors have to be taken into account when designing RF MEMS capacitive switches working in low vacuum. While encapsulating RF MEMS switches in low vacuum diminishes the air damping and improves the switch speed and operation voltage,the performances of a switch is incident to being influenced by outside environment. This study is very useful for the optimized design of RF MEMS capacitive switches working in low vacuum.展开更多
A novel technique is developed for growing high quality ZnO thin films by means of single source chemical vapor deposition (SS CVD) under low vacuum conditions with the precursor of zinc carbamate Zn4O(CO2Net2)6. SEM,...A novel technique is developed for growing high quality ZnO thin films by means of single source chemical vapor deposition (SS CVD) under low vacuum conditions with the precursor of zinc carbamate Zn4O(CO2Net2)6. SEM, AFM and XRD studies show that the resultant thin films have high density, smooth surface, uniform polycrystalline structure and excellent c-axis orientation. XPS investigation indicates that the ZnO films are free of decomposed precursor residues in the bulk. Careful quantitative XPS analysis reveals that the ZnO films are stoichiometric with O/Zn atomic ratio very close to that of ZnO single crystal.展开更多
Based on a two-dimensional axisymmetric magneto-hydrodynamic （MHD） model, low current vacuum arc （LCVA） characteristics are studied. The influence of cathode process under different axial magnetic fields and diffe...Based on a two-dimensional axisymmetric magneto-hydrodynamic （MHD） model, low current vacuum arc （LCVA） characteristics are studied. The influence of cathode process under different axial magnetic fields and different anode radii on LCVA characteristics is also simulated. The results show that the influence of both cathode process and anode radii on LCVA is significant. The sign of anode sheath potentials can change from negative to positive with the decrease of anode radii. The simulation results are in part verified by experimental results. Especially, as the effect of ion kinetic energy is considered, ion temperature is improved significantly; which is in agreement with experimental results.展开更多
In this study, the influence of the initial jet angles （IJAs） and ion number densities （INDs） at the cathode side on the low current vacuum arc （LCVA） characteristics is simulated and analysed. The results show ...In this study, the influence of the initial jet angles （IJAs） and ion number densities （INDs） at the cathode side on the low current vacuum arc （LCVA） characteristics is simulated and analysed. The results show that the ion temperature, electron temperature, ion number density, axial current density and plasma pressure all decrease with the increase of the cathode IJAs. It is also shown that LCVA can cause a current constriction for lower cathode IND, and the anode sheath potential is more nonuniform, which is mainly related to the nonuniform distribution of the axial current density at the anode side.展开更多
文摘The influence of outside inertial shock combined with RF signal voltages on the properties of a shunt capacitive MEMS switch encapsulated in a low vacuum environment is analyzed considering the damping of the air around the MEMS switch membrane. An analytical expression that approximately computes the displacement induced by outside shock is obtained. According to the expression, the minimum required mechanical stiffness constant of an MEMS switch beam in some maximum tolerated insertion loss condition and some external inertial shock environment or the insertion loss induced by external inertial shock can also be obtained. The influence is also illustrated with an RF MEMS capacitive switch example,which shows that outside environment factors have to be taken into account when designing RF MEMS capacitive switches working in low vacuum. While encapsulating RF MEMS switches in low vacuum diminishes the air damping and improves the switch speed and operation voltage,the performances of a switch is incident to being influenced by outside environment. This study is very useful for the optimized design of RF MEMS capacitive switches working in low vacuum.
基金supported by the Major Project of the National Natural Science Foundation of China(Grant No.60290083).
文摘A novel technique is developed for growing high quality ZnO thin films by means of single source chemical vapor deposition (SS CVD) under low vacuum conditions with the precursor of zinc carbamate Zn4O(CO2Net2)6. SEM, AFM and XRD studies show that the resultant thin films have high density, smooth surface, uniform polycrystalline structure and excellent c-axis orientation. XPS investigation indicates that the ZnO films are free of decomposed precursor residues in the bulk. Careful quantitative XPS analysis reveals that the ZnO films are stoichiometric with O/Zn atomic ratio very close to that of ZnO single crystal.
基金National Natural Science Foundation of China (No.50537050)the Innovation Foundation of State Key Laboratory of Electrical Insulation and Power Equipment
文摘Based on a two-dimensional axisymmetric magneto-hydrodynamic （MHD） model, low current vacuum arc （LCVA） characteristics are studied. The influence of cathode process under different axial magnetic fields and different anode radii on LCVA characteristics is also simulated. The results show that the influence of both cathode process and anode radii on LCVA is significant. The sign of anode sheath potentials can change from negative to positive with the decrease of anode radii. The simulation results are in part verified by experimental results. Especially, as the effect of ion kinetic energy is considered, ion temperature is improved significantly; which is in agreement with experimental results.
基金National Natural Science Foundation of China(No.50537050)
文摘In this study, the influence of the initial jet angles （IJAs） and ion number densities （INDs） at the cathode side on the low current vacuum arc （LCVA） characteristics is simulated and analysed. The results show that the ion temperature, electron temperature, ion number density, axial current density and plasma pressure all decrease with the increase of the cathode IJAs. It is also shown that LCVA can cause a current constriction for lower cathode IND, and the anode sheath potential is more nonuniform, which is mainly related to the nonuniform distribution of the axial current density at the anode side.
