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Optical spectroscopy and crystal-field strength of Cr^(3+) in various solid matrixes 被引量:2
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作者 XIA Haiping WANG Jinhao WANG Hongyin ZHANG Jianli ZHANG Yuepin XU Tiefeng 《Rare Metals》 SCIE EI CAS CSCD 2006年第1期51-57,共7页
The Cr^3+:BeAl2O4 crystal, Cr^3+:LiNbO3 crystal, and ZnO-Al2O3-SiO2 glass-ceramic were obtained by the Czochralski technique, Bridgman method, and melting processing, respectively. The optical absorption and emiss... The Cr^3+:BeAl2O4 crystal, Cr^3+:LiNbO3 crystal, and ZnO-Al2O3-SiO2 glass-ceramic were obtained by the Czochralski technique, Bridgman method, and melting processing, respectively. The optical absorption and emission spectra of the above Cr^3+-incorporated solid-state materials were recorded. The technical parameters for growing high-quality Cr^3+:BeAl2O4 and Cr^3+:LINbO3 crystals were obtained. The results indicate that the optical absorption and fluorescence spectra of Cr^3+ show quite a few differences in various matrixes. The sharp line emissions were observed in the Cr^3+:BeAl2O4 and Cr^3+:LiNbO3 crystals. The crystal-field parameters (Dq) for Cr^3+. in different matrixes were calculated from their corresponding spectra. It is indicated that Cr^3+:BeAl2O4 and Cr^3+:LiNbO3 belong to the high-field site crystal, while the Cr^3+ ZnO-Al2O3-SiO2 glass and glass-ceramic belong to the weak-field site crystal. 展开更多
关键词 special functional inorganic materials optical spectroscopy optical measurement Cr^3+ ion matrix
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The clinical effectiveness of reflectance optical spectroscopy for the in vivo diagnosis of oral lesions 被引量:2
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作者 Diana V Messadi Fariba S Younai +2 位作者 Hong-Hu Liu Gao Guo Cun-Yu Wang 《International Journal of Oral Science》 SCIE CAS CSCD 2014年第3期162-167,共6页
Optical spectroscopy devices are being developed and tested for the screening and diagnosis of oral precancer and cancer lesions. This study reports a device that uses white light for detection of suspicious lesions a... Optical spectroscopy devices are being developed and tested for the screening and diagnosis of oral precancer and cancer lesions. This study reports a device that uses white light for detection of suspicious lesions and green–amber light at 545 nm that detect tissue vascularity on patients with several suspicious oral lesions. The clinical grading of vascularity was compared to the histological grading of the biopsied lesions using specific biomarkers. Such a device, in the hands of dentists and other health professionals, could greatly increase the number of oral cancerous lesions detected in early phase. The purpose of this study is to correlate the clinical grading of tissue vascularity in several oral suspicious lesions using the IdentafiH system with the histological grading of the biopsied lesions using specific vascular markers. Twenty-one patients with various oral lesions were enrolled in the study. The lesions were visualized using IdentafiH device with white light illumination, followed by visualization of tissue autofluorescence and tissue reflectance. Tissue biopsied was obtained from the all lesions and both histopathological and immunohistochemical studies using a vascular endothelial biomarker(CD34) were performed on these tissue samples. The clinical vascular grading using the green–amber light at 545 nm and the expression pattern and intensity of staining for CD34 in the different biopsies varied depending on lesions, grading ranged from 1 to3. The increase in vascularity was observed in abnormal tissues when compared to normal mucosa, but this increase was not limited to carcinoma only as hyperkeratosis and other oral diseases, such as lichen planus, also showed increase in vascularity. Optical spectroscopy is a promising technology for the detection of oral mucosal abnormalities; however, further investigations with a larger population group is required to evaluate the usefulness of these devices in differentiating benign lesions from potentially malignant lesions. 展开更多
关键词 ansiosenesis optical spectroscopy oral lesions
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Optical Spectroscopy of Er^(3+) and Er^(3+)/Yb^(3+)Co-doped Bi_2O_3-GeO_2-B_2O_3-ZnO Glasses 被引量:1
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作者 夏海平 章践立 +1 位作者 王金浩 张约品 《Journal of Rare Earths》 SCIE EI CAS CSCD 2006年第4期408-412,共5页
The (60 - x)Bi2O3 - xGeO2-30B2O3-10ZnO (x = 5, 10, 20, 30 molar percent) glasses doped with Er^3+ and Er^3+/Yb^3+ were fabricated using the melting method. The thermal stability of the glasses was studied with ... The (60 - x)Bi2O3 - xGeO2-30B2O3-10ZnO (x = 5, 10, 20, 30 molar percent) glasses doped with Er^3+ and Er^3+/Yb^3+ were fabricated using the melting method. The thermal stability of the glasses was studied with their DTA curves. The results show that the difference between the glass transition temperature and the crystallization onset temperature increases with the increase of GeO2 content, indicating that the thermal stability of the glass has become better. The absorption spectra were recorded and the stimulated emission cross sections were calculated using the McCumber theory. The Ω2, O4, and Ω6 parameters,the transition probability, the radiative lifetime, and the fluorescence branch ratio of Er^3+ for optical transition were calculated from their absorption spectra in terms of reduced matrix U^(t)(λ = 2, 4, 6) character for optical transitions. The infrared emission of Er^3+ was measured upon excitation with 970 nm light and the full width at half-maximum (FWHM) was estimated from the emission spectra. The pumping efficiency and the intensity of the emission at the 1.54 μm band of Er^3+ were enhanced considerably by co-doping Yb^3+ . 展开更多
关键词 Bi-based glass GeO2 Er^3+ Er^3+/Yb^3+ thermal stability optical spectroscopy rare earths
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Optical Spectroscopy of Pr3+ Ion Singly Doped LiLuF4 Single Crystal by Bridgman Method 被引量:1
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作者 Li-zhi Fang Xiong Zhou +3 位作者 Hai-ping Xia Jian-xu Hu Jian-li Zhang Bao-jiu Chen 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 2019年第6期661-666,I0002,共7页
High quality LiLuF4 single crystals doped with various Pr3+ ions were synthesized by a vertical Bridgman method in completely sealed platinum crucibles. The excitation spectra spans from 420 nm to 500 nm. The prepared... High quality LiLuF4 single crystals doped with various Pr3+ ions were synthesized by a vertical Bridgman method in completely sealed platinum crucibles. The excitation spectra spans from 420 nm to 500 nm. The prepared single crystals exhibit a blue band at 480 nm(3P0→3H4), a green band at 522 nm (3P1→3H5), and a red band at 605 nm (1D2→3H4)when excited at 446 nm;their corresponding average lifetimes are 38.5μs, 37.3μs, and 36.8μs, respectively, which are much longer than those in oxide single crystals. The effects of excitation wavelength and doping concentration on emission intensities and chromaticity coordinates are investigated. The optimal Pr3+ concentration is confirmed to be 0.5%.The temperature dependent emission shows that the emission intensity constantly decreases with the increase of temperature from 298 K to 443 K due to the enhancement of nonradiative quenching at high temperature. The 3P0→3H4 transition is the most vulnerable to temperature, followed by the 3P1→3H5 transition and 1D2→3H4 transition. 展开更多
关键词 Pr3+ ion LiLuF4 single crystal optical spectroscopy
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Optical Spectroscopy of Er^(3+), Er^(3+)/Yb^(3+) Co-doped Bi_2O_3-GeO_2-B_2O_3-ZnO Glasses
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作者 Xia Haiping Zhang Jianli Wang Jinhao Zhang Yuepin 《Journal of Rare Earths》 SCIE EI CAS CSCD 2005年第5期550-550,共1页
The (60 - x) Bi2O3-xGeO2-30B2O3-10ZnO (x = 5, 10, 20, 30 molar percent) glasses doped with Er^3+ and Er^3+/Yb^3+ were fabricated by melting method. The thermal stability of the glasses was studied by their DTA ... The (60 - x) Bi2O3-xGeO2-30B2O3-10ZnO (x = 5, 10, 20, 30 molar percent) glasses doped with Er^3+ and Er^3+/Yb^3+ were fabricated by melting method. The thermal stability of the glasses was studied by their DTA curves. The results indicate that the difference between the glass transition temperature and the crystallization onset temperature increase as increase of GeO2 content, indicating that the thermal stability of the glass becomes better. The absorption spectra were recorded. The stimulated emission cross sections were calculated by McCumber theory. The Ω2, Ω4, and Ω6 parameters, transition probability, radiative lifetime, fluorescence branch ratio of Er^3+ for optical transition were calculated from their absorption spectra in terms of reduced matrix U^(1)(λ = 2, 4, 6) character for optical transitions. The infrared emission was measured by excitation with 970 nm light and the FWHM was estimated from their emission spectra. The pumping efficiency and the intensity of emission at the band of 1.54 μm are enhanced greatly by addition of Y2O3. 展开更多
关键词 Bi-based glass GeO2 Er^3 Er^3 +/Yb^3+ thermal stability optical spectroscopy rare earths
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The 15^(th) International Conference on Luminescence and Optical Spectroscopy of Condensed Matter(ICL'08)
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《发光学报》 EI CAS CSCD 北大核心 2008年第3期596-597,共2页
关键词 ICL’08 The 15 TH International Conference on Luminescence and optical spectroscopy of Condensed Matter
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The 15^(th) International Conference on Luminescence and Optical Spectroscopy of Condensed Matter (ICL'08)
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《发光学报》 EI CAS CSCD 北大核心 2007年第5期817-818,共2页
关键词 ICL’08 TH The 15 International Conference on Luminescence and optical spectroscopy of Condensed Matter
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The 15^(th) International Conference on Luminescence and Optical Spectroscopy of Condensed Matter (ICL'08)
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《发光学报》 EI CAS CSCD 北大核心 2008年第2期409-410,共2页
关键词 ICL’08 International Conference on Luminescence and optical spectroscopy of Condensed Matter The 15 TH
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Gap States of ZnO Thin Films by New Methods:Optical Spectroscopy,Optical Conductivity and Optical Dispersion Energy
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作者 Vali Dalouji Shahram Solaymani +3 位作者 Laya Dejam Seyed Mohammad Elahi TSahar Rezaee Dariush Mehrparvar 《Chinese Physics Letters》 SCIE CAS CSCD 2018年第2期107-110,共4页
The optical reflectance and transmittance spectra in the wavelength range of 300-2500 nm are used to compute the absorption coefficient of zinc oxide films annealed at different post-annealing temperatures 400, 500 an... The optical reflectance and transmittance spectra in the wavelength range of 300-2500 nm are used to compute the absorption coefficient of zinc oxide films annealed at different post-annealing temperatures 400, 500 and 600°C.The values of the cross point between the curves of the real and imaginary parts of the optical conductivity ɑ_1 and ɑ_1 with energy axis of films exhibit values that correspond to optical gaps and are about 3.25-3.3 eV. The maxima of peaks in plots dR/dλ and dT/dλ versus wavelength of films exhibit optical gaps at about 3.12-3.25 eV.The values of the fundamental indirect band gap obtained from the Tauc model are at about 3.14-3.2 eV. It can be seen that films annealed at 600°C have the minimum indirect optical band gap at about 3.15 eV. The films annealed at 600°C have Urbach's energy minimum of 1.38 eV and hence have minimum disorder. The dispersion energy d of films annealed at 500°C has the minimum value of 43 eV. 展开更多
关键词 ZN Gap States of ZnO Thin Films by New Methods:optical spectroscopy optical Conductivity and optical Dispersion Energy OC
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A dual-route optical emission spectroscopy diagnostic with wide spectral range and high wavelength resolution on HL-2A tokamak
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作者 陈越 高继昆 +10 位作者 龙婷 聂林 高金明 马尧 黄渊 田文静 刘延民 朱晓东 庄革 钟武律 许敏 《Plasma Science and Technology》 SCIE EI CAS CSCD 2024年第3期25-30,共6页
A dual-route optical emission spectroscopy(D-OES)diagnostic is newly developed to monitor the optical emission from the X-point plasma region on the HL-2 A tokamak.This diagnostic is composed of an imaging system,a be... A dual-route optical emission spectroscopy(D-OES)diagnostic is newly developed to monitor the optical emission from the X-point plasma region on the HL-2 A tokamak.This diagnostic is composed of an imaging system,a beam-splitting system for dual-route measurements,fiber bundles,a spectrometer system,and a control and acquisition system.One route is used to obtain wide-spectral-range spectra,and the other route is used to acquire high-wavelengthresolution line shapes.The spectral resolution of the wide-range spectrometers is 0.8 nm with a coverage of 800 nm(@200-1000 nm).The spectral resolution of the high-resolution spectrometer is 0.01 nm with a coverage of 6 nm(@200-660 nm).The spatial resolution of each route of D-OES is about 4 cm with 11 channels.The temporal resolution is 16 ms at maximum in the single-channel mode.Wide-range spectra(containing Balmer series and a Fulcher band)and highly resolved Ha line shapes are obtained by D-OES in the hydrogen glow discharge in the lab.D-OES measurements are carried out in the high-density deuterium experiments of HL-2A.The electron density n_(e)and deuterium temperature T_(D) in the X-point multifaceted asymmetric radiation from the edge(MARFE)region are derived simultaneously by fitting the measured D_(a) shape.The density n_(e)is observed to increase from~8.7×10^(18)m^(-3)to~7.8×10^(19)m^(-3),and the temperature T_(D)drops from~14.4 eV to~2.3 eV after the onset of MARFE in the discharge#38260. 展开更多
关键词 optical emission spectroscopy Balmer series TOKAMAK
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Crystal characterization and optical spectroscopy of Eu^(3+)-doped CaGdAlO_4 single crystal fabricated by the floating zone method 被引量:1
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作者 李瑞娟 徐晓东 +6 位作者 苏良碧 赛青林 夏长泰 杨秋红 徐军 Adam Strzep Anita Pókoszek 《Chinese Optics Letters》 SCIE EI CAS CSCD 2016年第2期68-72,共5页
A highly transparent Eu3+-doped CaGdA104 (CGA) single crystal is grown by the floating zone method. The segregation coefficient, x ray diffraction, and x ray rocking curve are detected, and the results reveal that ... A highly transparent Eu3+-doped CaGdA104 (CGA) single crystal is grown by the floating zone method. The segregation coefficient, x ray diffraction, and x ray rocking curve are detected, and the results reveal that the single crystal is of high quality. The f-f transitions of Eu3+ in the host lattice are discussed. The 5D0-7F2 emis- sion transition at 621 nm (red light) is dominant over the 5D0-7F1 emission transitions at 591 and 599 nm (orange light), agreeing well with the random crystal environment of Eu3+ ions in a CGA crystal. The decay time of Eu:5D0 is measured to be 1.02 ms. All the results show that the Eu:CGA crystal has good optical char- acterization and promises to be an excellent red- fluorescence material. 展开更多
关键词 Crystal characterization and optical spectroscopy of Eu CGA doped CaGdAlO4 single crystal fabricated by the floating zone method
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Optical spectroscopy study of charge density wave order in Sr3Rh4Sn13 and(Sr0.5Ca0.5)3Rh4Sn13
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作者 W.J.Ban H.E Wang +3 位作者 C.W.Tseng C.N.Kuo C.S.Lue N.L.Wang 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS CSCD 2017年第4期51-56,共6页
We perform optical spectroscopy measurement on single-crystal samples of Sr3Rh4Sn13 and (Sr0.5Ca0.5)3Rh4Sn13. Formation of CDW energy gap was clearly observed for both single-crystal samples when they undergo the ph... We perform optical spectroscopy measurement on single-crystal samples of Sr3Rh4Sn13 and (Sr0.5Ca0.5)3Rh4Sn13. Formation of CDW energy gap was clearly observed for both single-crystal samples when they undergo the phase transitions. The existence of residual Drude components in σ1(ω) below Tcow indicates that the Fermi surface is only partially gapped in the CDW state. The obtained value of 2A/kBTcow is roughly 13 for both Sr3Rh4Sn13 and (Sr0.5Ca0.5)3Rh4Sn13 compounds, which is considerably larger than the mean-field value based on the weak-coupling BCS theory. The measurements provide optical evidence for the strong coupling characteristics of the CDW phase transition. 展开更多
关键词 charge density wave optical spectroscopy intermetallic compounds
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Measurements of Nighttime Nitrate Radical Concentrations in the Atmosphere by Long-Path Differential Optical Absorption Spectroscopy 被引量:8
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作者 李素文 刘文清 +3 位作者 谢品华 李昂 秦敏 窦科 《Advances in Atmospheric Sciences》 SCIE CAS CSCD 2007年第5期875-880,共6页
The long-path differential optical absorption spectroscopy (LP-DOAS) technique was developed to mea- sure nighttime atmospheric nitrate radical (NO3) concentrations. An optimized retrieval method, resulting in a s... The long-path differential optical absorption spectroscopy (LP-DOAS) technique was developed to mea- sure nighttime atmospheric nitrate radical (NO3) concentrations. An optimized retrieval method, resulting in a small residual structure and low detection limits, was developed to retrieve NO3. The time series of the NO3 concentration were collected from 17 to 24 March, 2006, where a nighttime average value of 15.8 ppt was observed. The interfering factors and errors are also discussed. These results indicate that the DOAS technique provides an essential tool for the quantification of NO3 concentration and in the study of its effects upon nighttime chemistry. 展开更多
关键词 nitrate radical long-path differential optical absorption spectroscopy detection limits ERRORS
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Langmuir Probe and Optical Emission Spectroscopy Studies of Low-Pressure Gas Mixture of CO_2 and N_2 被引量:2
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作者 E.F.MENDEZ-MARTINEZ P.G.REYES +2 位作者 D.OSORIO-GONZALEZ F.CASTILLO H.MARTINEZ 《Plasma Science and Technology》 SCIE EI CAS CSCD 2010年第3期314-319,共6页
Optical emission spectroscopy was used to study a gas mixture glow discharge of CO2 and N2 at a total pressure of 1.2 Torr, a power of 100 W and a flow of 16.5 L/min. The emission bands were measured in the wavelength... Optical emission spectroscopy was used to study a gas mixture glow discharge of CO2 and N2 at a total pressure of 1.2 Torr, a power of 100 W and a flow of 16.5 L/min. The emission bands were measured in the wavelength range of 200 nm to 900 nm. The principal species observed were O2^+ (A^2П→ X^2П), CO^+ (A^2П→X^2∑), N2^+ (B^2∑u+ → X^2∑g^+), CO2^+ (A^2∏ → X^2∏), N2(C^3∏u → B^3∏g), O2(b^1∑g^+→ X^3∑g^-), and CO (a^r3∑→a^3∏). The behavior of the band intensities as a function of the N2 percentage is consistent with recent Monte Carlo simulations. The electron temperature and ion density were determined by a double Langmuir probe. The electron temperature was found in the range of 1.55 eV to 2.93 eV, and the electron concentration in the order of 10^10 cm^-3. The electron temperature and ion density at pure N2 and pure CO2 agree with previous measurements. 展开更多
关键词 optical emission spectroscopy glow discharge electron temperature CO2 N2
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Time-Resolved Optical Emission Spectroscopy Diagnosis of CO_2 Laser-Produced SnO_2 Plasma 被引量:1
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作者 兰慧 王新兵 左都罗 《Plasma Science and Technology》 SCIE EI CAS CSCD 2016年第9期902-906,共5页
The spectral emission and plasma parameters of SnO2 plasmas have been investigated. A planar ceramic SnO2 target was irradiated by a CO2 laser with a full width at half maximmn of 80 ns. The temporal behavior of the s... The spectral emission and plasma parameters of SnO2 plasmas have been investigated. A planar ceramic SnO2 target was irradiated by a CO2 laser with a full width at half maximmn of 80 ns. The temporal behavior of the specific emission lines from the SnO2 plasma was characterized. The intensities of Sn I and Sn Ⅱ lines first increased, and then decreased with the delay time. The results also showed a faster decay of Sn I atoms than that of Sn II ionic species. The temporal evolutions of the SnO2 plasma parameters (electron temperature and density) were deduced. The measured temperature and density of SnO2 plasma are 4.38 eV to 0.5 eV and 11.38×1017 cm 3 to 1.1×1017^ cm-3, for delay times between 0.1 μs and 2.2 #s. We also investigated the effect of the laser pulse energy on Sn02 plasma. 展开更多
关键词 optical emission spectroscopy laser produced plasma C02 laser electrontemperature electron density
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Determination of Non-Maxwellian Electron Energy Distributions in Low-Pressure Plasmas by Using the Optical Emission Spectroscopy and a Collisional-Radiative Model 被引量:1
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作者 朱悉铭 蒲以康 《Plasma Science and Technology》 SCIE EI CAS CSCD 2011年第3期267-278,共12页
A Maxwellian electron energy distribution function (EEDF) is often assumed when using the optical emission line-ratio method to determine the electron temperature in low- temperature plasmas. However, in many cases,... A Maxwellian electron energy distribution function (EEDF) is often assumed when using the optical emission line-ratio method to determine the electron temperature in low- temperature plasmas. However, in many cases, non-Maxwellian EEDFs can be formed due to the non-local electron heating or the inelastic-collisional energy loss processes. In this work, with a collisional-radiative model, we propose an approach to obtain the non-Maxwellian EEDF with a 'two-temperature structure' from the emission line-ratios of Paschen 2p levels of argon and kryp- ton atoms. For applications of this approach in reactive gas (CF4, O2, etc) discharges that contain argon and krypton, recommendations of some specific emission line-ratios are provided, according to their sensitivities to the EEDF variation. The kinetic processes of the relevant excited atoms are also discussed in detail. 展开更多
关键词 plasma diagnostics optical emission spectroscopy non-Maxwellian EEDF collisional-radiative model
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Analysis of optical emission spectroscopy data during silicon etching in SF_(6)/O_(2)/Ar plasma
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作者 Dong Hwan KIM Jeong Eun CHOI Sang Jeen HONG 《Plasma Science and Technology》 SCIE EI CAS CSCD 2021年第12期117-127,共11页
Silicon etching is an essential process in various applications,and a major challenge for etching process is anisotropic high aspect ratio etching characteristics.The etch profile is determined by the plasma parameter... Silicon etching is an essential process in various applications,and a major challenge for etching process is anisotropic high aspect ratio etching characteristics.The etch profile is determined by the plasma parameters and process parameters.In this study,the plasma state with each process parameters were analyzed through the optical emission spectroscopy(OES)plasma diagnostic sensor by both chemical and physical approaches.Electron temperature and electron density were additionally acquired using the corona model with OES data that provides chemical species information,and the etch profile was evaluated through scanning electron microscope measurement data.The results include changes in profile with gas ratio,bias power,and pressure.We figure out that factors like ion energy and ion angular distribution as well as chemical reaction affect the anisotropic profile. 展开更多
关键词 silicon etching PROFILE optical emission spectroscopy plasma in-formation corona model
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Spatial characteristics of nanosecond pulsed micro-discharges in atmospheric pressure He/H2O mixture by optical emission spectroscopy
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作者 Chuanjie Chen Zhongqing Fang +3 位作者 Xiaofang Yang Yongsheng Fan Feng Zhou Rugang Wang 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第2期480-488,共9页
Atmospheric pressure micro-discharges in helium gas with a mixture of 0.5%water vapor between two pin electrodes are generated with nanosecond overvoltage pulses.The temporal and spatial characteristics of the dischar... Atmospheric pressure micro-discharges in helium gas with a mixture of 0.5%water vapor between two pin electrodes are generated with nanosecond overvoltage pulses.The temporal and spatial characteristics of the discharges are investigated by means of time-resolved imaging and optical emission spectroscopy with respect to the discharge morphology,gas temperature,electron density,and excited species.The evolution of micro-discharges is captured by intensified CCD camera and electrical properties.The gas temperature is diagnosed by a two-temperature fit to the ro-vibrational OH(A^(2)Σ^(+)–X^П(2),0–0)emission band and is found to remain low at 425 K during the discharge pulses.The profile of electron density performed by the Stark broadening of Ha 656.1-nm and He I 667.8-nm lines is uniform across the discharge gap at the initial of discharge and reaches as high as 10^(23)m^(-3).The excited species of He,OH,and H show different spatio-temporal behaviors from each other by the measurement of their emission intensities,which are discussed qualitatively in regard of their plasma kinetics. 展开更多
关键词 atmospheric pressure micro-discharges nanosecond repetitively pulsed discharge HELIUM optical emission spectroscopy
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Optical emission spectroscopy study on deposition process of microcrystalline silicon
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作者 吴志猛 雷青松 +3 位作者 耿新华 赵颖 孙建 奚建平 《Chinese Physics B》 SCIE EI CAS CSCD 2006年第11期2713-2717,共5页
This paper reports that the optical emission spectroscopy (OES) is used to monitor the plasma during the deposition process of hydrogenated microcrystalline silicon films in a very high frequency plasma enhanced che... This paper reports that the optical emission spectroscopy (OES) is used to monitor the plasma during the deposition process of hydrogenated microcrystalline silicon films in a very high frequency plasma enhanced chemical vapour deposition system. The OES intensities (Sill^*, H^* and H^*β) are investigated by varying the deposition parameters. The result shows that the discharge power, silane concentrations and substrate temperature affect the OES intensities. When the discharge power at silane concentration of 4% increases, the OES intensities increase first and then are constant, the intensities increase with the discharge power monotonously at silane concentration of 6%. The SiH^* intensity increases with silane concentration, while the intensities of H^*α and H^*β increase first and then decrease. When the substrate temperature increases, the SiH^* intensity decreases and the intensities of H^*α and H^*β are constant. The correlation between the intensity ratio of IH^*α/ISiH^* and the crystalline volume fraction (Xc) of films is confirmed. 展开更多
关键词 microcrystalline silicon VHF-PECVD optical emission spectroscopy
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Diagnostics of Parameters by Optical Emission Spectroscopy and Langmuir Probe in Mixtures (SiH_4/C_2H_4/Ar) Radio-Frequency Discharge
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作者 吴静 张鹏云 +2 位作者 孙继忠 姚列明 段旭如 《Plasma Science and Technology》 SCIE EI CAS CSCD 2011年第5期561-566,共6页
Optical emission spectroscopy and Langmuir Probe diagnostics were incorporated into the experiment, in which dust particles were formed in-situ by using reactive mixture gases (SiHa/C2H4/Ar) in a radio-frequency (R... Optical emission spectroscopy and Langmuir Probe diagnostics were incorporated into the experiment, in which dust particles were formed in-situ by using reactive mixture gases (SiHa/C2H4/Ar) in a radio-frequency (RF) discharge plasma. The excitation temperature was first calculated by combining several optical emission spectra of argon lines and using a Boltzmann distribution to fit the experimental data, then the excitation temperature as functions of both gas pressure and RF power in SiH4/C2Ha/Ar discharges for different discharge conditions were obtained. Correspondingly, based on the measurement of the electron temperature by a Langmuir probe, the excitation temperature was compared with the electron temperature, and some discussions were presented. Finally the emission intensities of spectral lines of Si 390.6 ran, Si2+ 380.6 nm and C+ 426.7 nm were measured and presented as functions of pressure, RF power and flow rate of SiH4/C2H4. 展开更多
关键词 RF discharge optical emission spectroscopy Langmuir probe
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