This study aims to improve the accuracy and safety of steel plate thickness calibration.A differential noncontact thickness measurement calibration system based on laser displacement sensors was designed to address th...This study aims to improve the accuracy and safety of steel plate thickness calibration.A differential noncontact thickness measurement calibration system based on laser displacement sensors was designed to address the problems of low precision of traditional contact thickness gauges and radiation risks of radiation-based thickness gauges.First,the measurement method and measurement structure of the thickness calibration system were introduced.Then,the hardware circuit of the thickness system was established based on the STM32 core chip.Finally,the system software was designed to implement system control to filter algorithms and human-computer interaction.Experiments have proven the excellent performance of the differential noncontact thickness measurement calibration system based on laser displacement sensors,which not only considerably improves measurement accuracy but also effectively reduces safety risks during the measurement process.The system offers guiding significance and application value in the field of steel plate production and processing.展开更多
In eddy current testing, the law of attenuation of eddy current(EC) is of great concern. In conductive half space under the excitation of uniform magnetic field, the EC density decreases exponentially in the depth dir...In eddy current testing, the law of attenuation of eddy current(EC) is of great concern. In conductive half space under the excitation of uniform magnetic field, the EC density decreases exponentially in the depth direction. However, in conductor with finite thickness tested by coil, the distribution of EC in the depth direction is more complicated. This paper studies the characteristics of EC attenuation in metallic plate of finite thickness. Simulation results show that there is an EC reflection at the bottom of plate, which changes the law of EC attenuation. A new concept, namely the equivalent attenuation coefficient, is proposed to quantify the speed of EC attenuation. The characteristics of EC attenuation are utilized to explain the nonmonotonic relation between coil voltage and plate thickness. Procedure of selecting frequency is discussed. Thereafter, measurement of plate thickness is carried out and accurate result is obtained.展开更多
A novel thickness measurement method for surface insulation coating of silicon steel based on NIR spectrometry is explored.The NIR spectra of insulation coating of silicon steel were collected by acousto-optic tunable...A novel thickness measurement method for surface insulation coating of silicon steel based on NIR spectrometry is explored.The NIR spectra of insulation coating of silicon steel were collected by acousto-optic tunable filter(AOTF) NIR spectrometer.To make full use of the effective information of NIR spectral data,discrete binary particle swarm optimization(DBPSO) algorithm was used to select the optimal wavelength variates.The new spectral data,composed of absorbance at selected wavelengths,were used to create the thickness quantitative analysis model by kernel partial least squares(KPLS) algorithm coupled with Boosting.The results of contrast experiments showed that the Boosting-KPLS model could efficiently improve the analysis accuracy and speed.It indicates that Boosting-KPLS is a more accurate and robust analysis method than KPLS for NIR spectral analysis.The maximal and minimal absolute error of 30 testing samples is respectively-0.02 μm and 0.19 μm,and the maximal relative error is 14.23%.These analysis results completely meet the practical measurement need.展开更多
For a ship in service,seawater corrosion is unavoidable. In order to ensure navigation safety and master the steel plate thickness in service ship,thickness of the ship steel plate must be tested periodically by a sci...For a ship in service,seawater corrosion is unavoidable. In order to ensure navigation safety and master the steel plate thickness in service ship,thickness of the ship steel plate must be tested periodically by a scientific method. After consideration of an actual situation of thickness measurement,the bearing mechanism of ultrasonic thickness meter probe has been designed on the basis of wall-climbing robot,and preliminary experiments have been carried out. The device is mainly used for thickness measurement of a large area of ship hull plate when the docking ship has been sandblasted. Efficiency and safety can be improved to finish thickness measurement by using the device.展开更多
The paper briefly introduces the Contamination Line Method for foil thickness measurement in transmission electron microscopy and compares it with four conventional methods: the convergent beam diffraction method, the...The paper briefly introduces the Contamination Line Method for foil thickness measurement in transmission electron microscopy and compares it with four conventional methods: the convergent beam diffraction method, the contamination spot method, the methods hased on characteristic X-ray emission and continuous X-ray emission on the application, aperation and accuracy etc.展开更多
In Quepos, Pacific of Costa Rica, it was finished on 2010 the first phase of a marina, including two mix breakwaters, with rubble mound （rocks and concrete units）, and 25 circular steel sheet piles cofferdam cells, ...In Quepos, Pacific of Costa Rica, it was finished on 2010 the first phase of a marina, including two mix breakwaters, with rubble mound （rocks and concrete units）, and 25 circular steel sheet piles cofferdam cells, filled with sand and gravel. The maintenance plan, considers tracking sheet pile corrosion, comparing ＂actual＂ against expected rates, checking structural limits, and programming countermeasures if accelerated corrosion is identified. Specific control sections, along the breakwaters, both inside and outside the basin, were established. In each section, thicknesses were measured every meter from the top of the steel cell to seabed using an ultrasonic equipment, and an underwater transducer. Both land crew, and divers for submerged portions, were used. The measurements campaigns are for several years from 2011 to 2016. Sectors of the breakwater with varied corrosion attack levels could be differentiated. Also, corrosion rates and lifespans were estimated, both general for the structures, and specific for each section and level. In turn, this allowed to identify maintenance priorities, defining sites where measures of corrosion protection should initiate, as well, to have confidence in the structural capacity and safety of the breakwaters.展开更多
In Quepos,Pacific of Costa Rica,it was finished on 2010 the first phase of a marina,including two mix breakwaters,with rubble mound(rocks and concrete units),and 25 circular steel sheet piles cofferdam cells,filled wi...In Quepos,Pacific of Costa Rica,it was finished on 2010 the first phase of a marina,including two mix breakwaters,with rubble mound(rocks and concrete units),and 25 circular steel sheet piles cofferdam cells,filled with sand and gravel.The maintenance plan,considers tracking sheet pile corrosion,comparing'actual'against expected rates,checking structural limits,and programming countermeasures if accelerated corrosion is identified.Specific control sections,along the breakwaters,both inside and outside the basin,were established.In each section,thicknesses were measured every meter from the top of the steel cell to seabed using an ultrasonic equipment,and an underwater transducer.Both land crew,and divers for submerged portions,were used.The measurements campaigns are for several years from 2011 to 2016.Sectors of the breakwater with varied corrosion attack levels could be differentiated.Also,corrosion rates and lifespans were estimated,both general for the structures,and specific for each section and level.In turn,this allowed to identify maintenance priorities,defining sites where measures of corrosion protection should initiate,as well,to have confidence in the structural capacity and safety of the breakwaters.展开更多
Picosecond ultrasonics,as a nondestructive and noncontact method,can be employed for nanoscale metallic film thickness measurements.The sensitivity of the system,which determines the measurement precision and practica...Picosecond ultrasonics,as a nondestructive and noncontact method,can be employed for nanoscale metallic film thickness measurements.The sensitivity of the system,which determines the measurement precision and practicability of this technique,is often limited by the weak intensity of the ultrasonic signal.To solve this problem,we investigate the distinct mechanisms involved in picosecond ultrasonic thickness measurement for two types of metals,namely tungsten(W)and gold(Au).For thickness measurement in W films,theory and simulation show that optimizing the pump and probe laser wavelengths,which determine the intensity and shape of the ultrasonic signal,is critical to improving measurement sensitivity,while for Au film measurements,where acoustic-induced beam distortion is dominant,the signal intensity can be optimized by selecting an appropriate aperture size and sample position.The above approaches are validated in experiments.A dual-wavelength pump-probe system is constructed based on a passively mode-locked ytterbium-doped fiber laser.The smoothing method and multipeak Gaussian fitting are employed for the extraction of ultrasonic time-of-flight.Subnanometer measurement precision is achieved in a series of W and Au films with thicknesses of 43-750 nm.This work can be applied to various high-precision,noncontact measurements of metal film thickness in the semiconductor industry.展开更多
Atomic force microscopy（AFM） is a commonly used technique for graphene thickness measurement.However, due to surface roughness caused by graphene itself and variation introduced in AFM measurement, graphene thicknes...Atomic force microscopy（AFM） is a commonly used technique for graphene thickness measurement.However, due to surface roughness caused by graphene itself and variation introduced in AFM measurement, graphene thickness is difficult to be accurately determined by AFM. In this paper, a histogram method was used for reliable measurements of graphene thickness using AFM. The influences of various measurement parameters in AFM analysis were investigated. The experimental results indicate that significant deviation can be introduced using various order of flatten and improperly selected measurement parameters including amplitude setpoint and drive amplitude. At amplitude setpoint of 100 mV and drive amplitude of 100 m V, thickness of 1 layer（1L）, 2 layers（2L） and 4 layers（4L） graphene were measured.The height differences for 1L, 2L and 4L were 1.51 ± 0.16 nm, 1.92 ± 0.13 nm and 2.73 ± 0.10 nm, respectively. By comparing these values, thickness of single layer graphene can be accurately determined to be0.41 ± 0.09 nm.展开更多
Film thickness measurement can be realized using white light interferometry,but it is challenging to guarantee high precision in a large range of thicknesses.Based on scanning white light interferometry,we propose a s...Film thickness measurement can be realized using white light interferometry,but it is challenging to guarantee high precision in a large range of thicknesses.Based on scanning white light interferometry,we propose a spectral-temporal demodulation scheme for large-range thickness measurement.The demodulation process remains unchanged for either coatings or substrate-free films,while some adjustments are made according to the estimated optical thickness.Experiments show that the single-point repeatabilities for 500 nm SiO_(2) coating and 68μm substrate-free Si film are no more than 0.70 nm and 1.22 nm,respectively.This method can be further developed for simultaneous measurement of surface profile and film thickness.展开更多
A double sinusoidal phase modulating (SPM) laser diode interferometer for thickness measurements of a transparent plate is presented. A carrier signal is given to the interference signal by using a piezoelectric trans...A double sinusoidal phase modulating (SPM) laser diode interferometer for thickness measurements of a transparent plate is presented. A carrier signal is given to the interference signal by using a piezoelectric transducer, and the SPM interferometry is applied to measure the thickness of a transparent plate. By combining the double-modulation technique with the Bessel function ratio method, the measurement error originating from Sight intensity fluctuations caused by the modulation current can be decreased greatly. The thicknesses of a glass parallel plate and a quartz glass are measured in real time, and the corresponding experimental results are also given.展开更多
There are few experimental results available on film thickness at speeds above 5 m/s and they are almost all based on the optical ball-on-disc test rig.In contrast to the contacts in a rolling bearing,in which the lub...There are few experimental results available on film thickness at speeds above 5 m/s and they are almost all based on the optical ball-on-disc test rig.In contrast to the contacts in a rolling bearing,in which the lubricant in the oil reservoir distributes symmetrically,ball-on-disc contact shows asymmetry of lubricant distribution due to centrifugal effects.In order to closely imitate the contact occurring between the ball and the outer ring of a ball bearing,this study proposes an experimental model based on ball-on-glass ring contact.An optical matrix method is used to analyze the optical system,which is composed of a steel ball-lubricant-chromium-coated glass ring.Based on the optical analysis,the measurement system is improved in order to obtain a high quality interference image,which makes it possible to measure the film thickness at high-speeds conditions.展开更多
Luquire et al. ' s impedance change model of a rectangular cross section probe coil above a structure with an arbitrary number of parallel layers was used to study the principle of measuring thicknesses of multi-l...Luquire et al. ' s impedance change model of a rectangular cross section probe coil above a structure with an arbitrary number of parallel layers was used to study the principle of measuring thicknesses of multi-layered structures in terms of eddy current testing voltage measurements. An experimental system for multi-layered thickness measurement was developed and several fitting models to formulate the relationships between detected impedance/voltage measurements and thickness are put forward using least square method. The determination of multi-layered thicknesses was investigated after inversing the voltage outputs of the detecting system. The best fitting and inversion models are presented.展开更多
The variation in environmental scattering background is a major source of systematic errors in X- ray inspection and measurement systems. As the energy of these photons consisting of environmental scattering backgroun...The variation in environmental scattering background is a major source of systematic errors in X- ray inspection and measurement systems. As the energy of these photons consisting of environmental scattering background is much lower generally, the Cerenkov detectors having the detection threshold are likely insensitive to them and able to exclude their influence. A thickness measurement experiment is designed to verify the idea by employing a Cerenkov detector and an ionizing chamber for comparison. Furthermore, it is also found that the application of the Cerenkov detectors is helpful to exclude another systematic error from the variation of low energy components in the spectrum incident on the detector volume.展开更多
To detect overlapped echoes due to the thin pavement layers,we present a thickness measurement approach for the very thin layer of pavement structures.The term "thin" is relative to the incident wavelength o...To detect overlapped echoes due to the thin pavement layers,we present a thickness measurement approach for the very thin layer of pavement structures.The term "thin" is relative to the incident wavelength or pulse.By means of independent component analysis of noisy signals received by a single radar sensor,the overlapped echoes can be successfully separated.Once the echoes from the top and bottom side of a thin layer have been separated,the time delay and the layer thickness determination follow immediately.Results of the simulation and real data verify the feasibility of the presented method.展开更多
The application of surface acoustic waves（SAWs） for thickness measurement is presented. By studying the impact of film thickness h on the dispersion phenomenon of surface acoustic waves, a method for thickness deter...The application of surface acoustic waves（SAWs） for thickness measurement is presented. By studying the impact of film thickness h on the dispersion phenomenon of surface acoustic waves, a method for thickness determination based on theoretical dispersion curve v（ fh） and experimental dispersion curve v（ f） is developed. The method provides a series of thickness values at different frequencies f, and the mean value is considered as the final result of the measurement. The thicknesses of six interconnect films are determined by SAWs, and the results are compared with the manufacturer＇s data.The relative differences are in the range from 0.4% to 2.18%, which indicates that the surface acoustic wave technique is reliable and accurate in the nondestructive thickness determination for films. This method can be generally used for fast and direct determination of film thickness.展开更多
This paper describes the design and development of a Semi-Automatic Precision Caliper System to measure the thickness of an outboard marine engine propeller blade.Several commonly used methods for measuring the thickn...This paper describes the design and development of a Semi-Automatic Precision Caliper System to measure the thickness of an outboard marine engine propeller blade.Several commonly used methods for measuring the thickness of a propeller blade are reviewed in this paper.These include the P rops Scan,3D Vision System and Black Dog.However,the operating practices and availability of different facilities in industry necessitate a more cost-effect ive approach.An alternative method using a Semi-Automatic Precision Caliper S ystem is therefore proposed.Details of the design criteria,principles of oper ation as well as the testing and verification of the system are presented.The paper concludes that the Semi-Automatic Precision Caliper System is a low cost and effective method for measuring the thickness of a propeller.展开更多
A white light spectral interferometry based on a Linnik type system was established to accurately measure the thin film thickness through transparent medium.In practical work,the equivalent thickness of a beam splitte...A white light spectral interferometry based on a Linnik type system was established to accurately measure the thin film thickness through transparent medium.In practical work,the equivalent thickness of a beam splitter and the mismatch of the objective lens introduce nonlinear phase errors.Adding a transparent medium also increases the equivalent thickness.The simulation results showthat the equivalent thickness has a significant effect on thin film thickness measurements.Therefore,it is necessary to perform wavelength correction to provide a constant equivalent thickness for beamsplitters.In the experiments,some pieces of cover glasses as the transparent medium were added to the measured beam and then a standard thin film thickness of 1052.2±0.9 nm was tested through the transparent medium.The results demonstrate that our system has a nanometer-level accuracy for thin film thickness measurement through transparent medium with optical path compensation.展开更多
The principle and method for measuring the wall thickness of transparent tube are presented.The measurement is based on total-refection vanishing light. The transmittance of transparent tube in the parallel light is s...The principle and method for measuring the wall thickness of transparent tube are presented.The measurement is based on total-refection vanishing light. The transmittance of transparent tube in the parallel light is studied. The critical conditions of total--reflection are discussed.展开更多
Quantitative knowledge of the film thickness and mass fraction of the urea-water solution is very crucial in many practical applications. Film thickness or mass fraction can only be determined individually by conventi...Quantitative knowledge of the film thickness and mass fraction of the urea-water solution is very crucial in many practical applications. Film thickness or mass fraction can only be determined individually by conventional measurement techniques. We develop a novel measurement method to measure the film thickness and mass fraction of ure^water solution simultaneously. The absorption coefficients of urea-water solution （5 50 wt%） are measured, a pair of optimized wavelengths is then chosen to achieve high measurement sensitivity. Cross validation is also performed and uncertainties of the technique are smaller than 0.68% for thickness measurements and 1.86% for mass fractions.展开更多
文摘This study aims to improve the accuracy and safety of steel plate thickness calibration.A differential noncontact thickness measurement calibration system based on laser displacement sensors was designed to address the problems of low precision of traditional contact thickness gauges and radiation risks of radiation-based thickness gauges.First,the measurement method and measurement structure of the thickness calibration system were introduced.Then,the hardware circuit of the thickness system was established based on the STM32 core chip.Finally,the system software was designed to implement system control to filter algorithms and human-computer interaction.Experiments have proven the excellent performance of the differential noncontact thickness measurement calibration system based on laser displacement sensors,which not only considerably improves measurement accuracy but also effectively reduces safety risks during the measurement process.The system offers guiding significance and application value in the field of steel plate production and processing.
基金Supported by National Natural Science Foundation of China(Grant No.51277154)Xiamen Key Laboratory of Optoelectronic Transducer Technology+1 种基金Fujian Key Laboratory of Universities and Colleges for Transducer TechnologyInnovative Talents Program of Far East NDT New Technology&Application Forum
文摘In eddy current testing, the law of attenuation of eddy current(EC) is of great concern. In conductive half space under the excitation of uniform magnetic field, the EC density decreases exponentially in the depth direction. However, in conductor with finite thickness tested by coil, the distribution of EC in the depth direction is more complicated. This paper studies the characteristics of EC attenuation in metallic plate of finite thickness. Simulation results show that there is an EC reflection at the bottom of plate, which changes the law of EC attenuation. A new concept, namely the equivalent attenuation coefficient, is proposed to quantify the speed of EC attenuation. The characteristics of EC attenuation are utilized to explain the nonmonotonic relation between coil voltage and plate thickness. Procedure of selecting frequency is discussed. Thereafter, measurement of plate thickness is carried out and accurate result is obtained.
基金National High Technology Research and Development Program of China(2009AA04Z131)Natural Science Foundation of China (50877056)
文摘A novel thickness measurement method for surface insulation coating of silicon steel based on NIR spectrometry is explored.The NIR spectra of insulation coating of silicon steel were collected by acousto-optic tunable filter(AOTF) NIR spectrometer.To make full use of the effective information of NIR spectral data,discrete binary particle swarm optimization(DBPSO) algorithm was used to select the optimal wavelength variates.The new spectral data,composed of absorbance at selected wavelengths,were used to create the thickness quantitative analysis model by kernel partial least squares(KPLS) algorithm coupled with Boosting.The results of contrast experiments showed that the Boosting-KPLS model could efficiently improve the analysis accuracy and speed.It indicates that Boosting-KPLS is a more accurate and robust analysis method than KPLS for NIR spectral analysis.The maximal and minimal absolute error of 30 testing samples is respectively-0.02 μm and 0.19 μm,and the maximal relative error is 14.23%.These analysis results completely meet the practical measurement need.
基金Supported by the National Natural Science Foundation of China(No.51309116)
文摘For a ship in service,seawater corrosion is unavoidable. In order to ensure navigation safety and master the steel plate thickness in service ship,thickness of the ship steel plate must be tested periodically by a scientific method. After consideration of an actual situation of thickness measurement,the bearing mechanism of ultrasonic thickness meter probe has been designed on the basis of wall-climbing robot,and preliminary experiments have been carried out. The device is mainly used for thickness measurement of a large area of ship hull plate when the docking ship has been sandblasted. Efficiency and safety can be improved to finish thickness measurement by using the device.
文摘The paper briefly introduces the Contamination Line Method for foil thickness measurement in transmission electron microscopy and compares it with four conventional methods: the convergent beam diffraction method, the contamination spot method, the methods hased on characteristic X-ray emission and continuous X-ray emission on the application, aperation and accuracy etc.
文摘In Quepos, Pacific of Costa Rica, it was finished on 2010 the first phase of a marina, including two mix breakwaters, with rubble mound （rocks and concrete units）, and 25 circular steel sheet piles cofferdam cells, filled with sand and gravel. The maintenance plan, considers tracking sheet pile corrosion, comparing ＂actual＂ against expected rates, checking structural limits, and programming countermeasures if accelerated corrosion is identified. Specific control sections, along the breakwaters, both inside and outside the basin, were established. In each section, thicknesses were measured every meter from the top of the steel cell to seabed using an ultrasonic equipment, and an underwater transducer. Both land crew, and divers for submerged portions, were used. The measurements campaigns are for several years from 2011 to 2016. Sectors of the breakwater with varied corrosion attack levels could be differentiated. Also, corrosion rates and lifespans were estimated, both general for the structures, and specific for each section and level. In turn, this allowed to identify maintenance priorities, defining sites where measures of corrosion protection should initiate, as well, to have confidence in the structural capacity and safety of the breakwaters.
文摘In Quepos,Pacific of Costa Rica,it was finished on 2010 the first phase of a marina,including two mix breakwaters,with rubble mound(rocks and concrete units),and 25 circular steel sheet piles cofferdam cells,filled with sand and gravel.The maintenance plan,considers tracking sheet pile corrosion,comparing'actual'against expected rates,checking structural limits,and programming countermeasures if accelerated corrosion is identified.Specific control sections,along the breakwaters,both inside and outside the basin,were established.In each section,thicknesses were measured every meter from the top of the steel cell to seabed using an ultrasonic equipment,and an underwater transducer.Both land crew,and divers for submerged portions,were used.The measurements campaigns are for several years from 2011 to 2016.Sectors of the breakwater with varied corrosion attack levels could be differentiated.Also,corrosion rates and lifespans were estimated,both general for the structures,and specific for each section and level.In turn,this allowed to identify maintenance priorities,defining sites where measures of corrosion protection should initiate,as well,to have confidence in the structural capacity and safety of the breakwaters.
基金supported by the National Natural Science Foundation of China(Grant No.52075383)the National Key Research and Development Program of China(Grant Nos.2022Y FF0708300,2022YFF0706002).
文摘Picosecond ultrasonics,as a nondestructive and noncontact method,can be employed for nanoscale metallic film thickness measurements.The sensitivity of the system,which determines the measurement precision and practicability of this technique,is often limited by the weak intensity of the ultrasonic signal.To solve this problem,we investigate the distinct mechanisms involved in picosecond ultrasonic thickness measurement for two types of metals,namely tungsten(W)and gold(Au).For thickness measurement in W films,theory and simulation show that optimizing the pump and probe laser wavelengths,which determine the intensity and shape of the ultrasonic signal,is critical to improving measurement sensitivity,while for Au film measurements,where acoustic-induced beam distortion is dominant,the signal intensity can be optimized by selecting an appropriate aperture size and sample position.The above approaches are validated in experiments.A dual-wavelength pump-probe system is constructed based on a passively mode-locked ytterbium-doped fiber laser.The smoothing method and multipeak Gaussian fitting are employed for the extraction of ultrasonic time-of-flight.Subnanometer measurement precision is achieved in a series of W and Au films with thicknesses of 43-750 nm.This work can be applied to various high-precision,noncontact measurements of metal film thickness in the semiconductor industry.
基金supported by the Program of National Key Technology R&D Program of the Ministry of Science and Technology of China(2011BAK15B04)
文摘Atomic force microscopy（AFM） is a commonly used technique for graphene thickness measurement.However, due to surface roughness caused by graphene itself and variation introduced in AFM measurement, graphene thickness is difficult to be accurately determined by AFM. In this paper, a histogram method was used for reliable measurements of graphene thickness using AFM. The influences of various measurement parameters in AFM analysis were investigated. The experimental results indicate that significant deviation can be introduced using various order of flatten and improperly selected measurement parameters including amplitude setpoint and drive amplitude. At amplitude setpoint of 100 mV and drive amplitude of 100 m V, thickness of 1 layer（1L）, 2 layers（2L） and 4 layers（4L） graphene were measured.The height differences for 1L, 2L and 4L were 1.51 ± 0.16 nm, 1.92 ± 0.13 nm and 2.73 ± 0.10 nm, respectively. By comparing these values, thickness of single layer graphene can be accurately determined to be0.41 ± 0.09 nm.
基金supported by the National Natural Science Foundation of China(Nos.62005062 and 61975040)the National Science Fund for Distinguished Young Scholars of China(No.61925501)the Open Fund of Guangdong Provincial Key Laboratory of Information Photonics Technology(No.GKPT20-02)。
文摘Film thickness measurement can be realized using white light interferometry,but it is challenging to guarantee high precision in a large range of thicknesses.Based on scanning white light interferometry,we propose a spectral-temporal demodulation scheme for large-range thickness measurement.The demodulation process remains unchanged for either coatings or substrate-free films,while some adjustments are made according to the estimated optical thickness.Experiments show that the single-point repeatabilities for 500 nm SiO_(2) coating and 68μm substrate-free Si film are no more than 0.70 nm and 1.22 nm,respectively.This method can be further developed for simultaneous measurement of surface profile and film thickness.
基金This work was supported by the National High Technology Development 863 Program of China (No. 2002AA404050) the Foundation for Development of Science of Shanghai (No. 0214nm091).
文摘A double sinusoidal phase modulating (SPM) laser diode interferometer for thickness measurements of a transparent plate is presented. A carrier signal is given to the interference signal by using a piezoelectric transducer, and the SPM interferometry is applied to measure the thickness of a transparent plate. By combining the double-modulation technique with the Bessel function ratio method, the measurement error originating from Sight intensity fluctuations caused by the modulation current can be decreased greatly. The thicknesses of a glass parallel plate and a quartz glass are measured in real time, and the corresponding experimental results are also given.
基金The work was supported by the National Natural Science Foundation of China，the National Key Basic Research (973)Program of China
文摘There are few experimental results available on film thickness at speeds above 5 m/s and they are almost all based on the optical ball-on-disc test rig.In contrast to the contacts in a rolling bearing,in which the lubricant in the oil reservoir distributes symmetrically,ball-on-disc contact shows asymmetry of lubricant distribution due to centrifugal effects.In order to closely imitate the contact occurring between the ball and the outer ring of a ball bearing,this study proposes an experimental model based on ball-on-glass ring contact.An optical matrix method is used to analyze the optical system,which is composed of a steel ball-lubricant-chromium-coated glass ring.Based on the optical analysis,the measurement system is improved in order to obtain a high quality interference image,which makes it possible to measure the film thickness at high-speeds conditions.
文摘Luquire et al. ' s impedance change model of a rectangular cross section probe coil above a structure with an arbitrary number of parallel layers was used to study the principle of measuring thicknesses of multi-layered structures in terms of eddy current testing voltage measurements. An experimental system for multi-layered thickness measurement was developed and several fitting models to formulate the relationships between detected impedance/voltage measurements and thickness are put forward using least square method. The determination of multi-layered thicknesses was investigated after inversing the voltage outputs of the detecting system. The best fitting and inversion models are presented.
基金Supported by National Natural Science Foundation of China (10775082)
文摘The variation in environmental scattering background is a major source of systematic errors in X- ray inspection and measurement systems. As the energy of these photons consisting of environmental scattering background is much lower generally, the Cerenkov detectors having the detection threshold are likely insensitive to them and able to exclude their influence. A thickness measurement experiment is designed to verify the idea by employing a Cerenkov detector and an ionizing chamber for comparison. Furthermore, it is also found that the application of the Cerenkov detectors is helpful to exclude another systematic error from the variation of low energy components in the spectrum incident on the detector volume.
文摘To detect overlapped echoes due to the thin pavement layers,we present a thickness measurement approach for the very thin layer of pavement structures.The term "thin" is relative to the incident wavelength or pulse.By means of independent component analysis of noisy signals received by a single radar sensor,the overlapped echoes can be successfully separated.Once the echoes from the top and bottom side of a thin layer have been separated,the time delay and the layer thickness determination follow immediately.Results of the simulation and real data verify the feasibility of the presented method.
基金Project supported by the National Natural Science Foundation of China(Grant No.61571319)
文摘The application of surface acoustic waves（SAWs） for thickness measurement is presented. By studying the impact of film thickness h on the dispersion phenomenon of surface acoustic waves, a method for thickness determination based on theoretical dispersion curve v（ fh） and experimental dispersion curve v（ f） is developed. The method provides a series of thickness values at different frequencies f, and the mean value is considered as the final result of the measurement. The thicknesses of six interconnect films are determined by SAWs, and the results are compared with the manufacturer＇s data.The relative differences are in the range from 0.4% to 2.18%, which indicates that the surface acoustic wave technique is reliable and accurate in the nondestructive thickness determination for films. This method can be generally used for fast and direct determination of film thickness.
文摘This paper describes the design and development of a Semi-Automatic Precision Caliper System to measure the thickness of an outboard marine engine propeller blade.Several commonly used methods for measuring the thickness of a propeller blade are reviewed in this paper.These include the P rops Scan,3D Vision System and Black Dog.However,the operating practices and availability of different facilities in industry necessitate a more cost-effect ive approach.An alternative method using a Semi-Automatic Precision Caliper S ystem is therefore proposed.Details of the design criteria,principles of oper ation as well as the testing and verification of the system are presented.The paper concludes that the Semi-Automatic Precision Caliper System is a low cost and effective method for measuring the thickness of a propeller.
基金the support of The National Key Research and Development Program of China(Grant No.2017YFF0107001)the 111 Project fund(Grant No.B07014)
文摘A white light spectral interferometry based on a Linnik type system was established to accurately measure the thin film thickness through transparent medium.In practical work,the equivalent thickness of a beam splitter and the mismatch of the objective lens introduce nonlinear phase errors.Adding a transparent medium also increases the equivalent thickness.The simulation results showthat the equivalent thickness has a significant effect on thin film thickness measurements.Therefore,it is necessary to perform wavelength correction to provide a constant equivalent thickness for beamsplitters.In the experiments,some pieces of cover glasses as the transparent medium were added to the measured beam and then a standard thin film thickness of 1052.2±0.9 nm was tested through the transparent medium.The results demonstrate that our system has a nanometer-level accuracy for thin film thickness measurement through transparent medium with optical path compensation.
文摘The principle and method for measuring the wall thickness of transparent tube are presented.The measurement is based on total-refection vanishing light. The transmittance of transparent tube in the parallel light is studied. The critical conditions of total--reflection are discussed.
基金supported by the National Natural Science Foundation of China(No.51306123)the Joint Specialized Research Fund for the Doctoral Program of Higher Education(No.20133120120008)
文摘Quantitative knowledge of the film thickness and mass fraction of the urea-water solution is very crucial in many practical applications. Film thickness or mass fraction can only be determined individually by conventional measurement techniques. We develop a novel measurement method to measure the film thickness and mass fraction of ure^water solution simultaneously. The absorption coefficients of urea-water solution （5 50 wt%） are measured, a pair of optimized wavelengths is then chosen to achieve high measurement sensitivity. Cross validation is also performed and uncertainties of the technique are smaller than 0.68% for thickness measurements and 1.86% for mass fractions.
