High resistance thin film chip resistors(0603 type) were studied,and the specifications are as follows:1 k? with tolerance about ±0.1% after laser trimming and temperature coefficient of resistance(TCR) less than...High resistance thin film chip resistors(0603 type) were studied,and the specifications are as follows:1 k? with tolerance about ±0.1% after laser trimming and temperature coefficient of resistance(TCR) less than ±15×10-6/℃.Cr-Si-Ta-Al films were prepared with Ar flow rate and sputtering power fixed at 20 standard-state cubic centimeter per minute(sccm) and 100 W,respectively.The experiment shows that the electrical properties of Cr-SiTa-Al deposition films can meet the specification requirements of 0603 ty...展开更多
单个器件输出功率不满足系统要求时,功率合成技术是提高系统输出功率的有效方法.本文详细研究了基于薄膜电阻的波导E-T结功率分配/合成器,最终设计了一种新型的基于薄膜电阻的波导E-T结.该结构具有高隔离度、低插入损耗、小体积、宽频...单个器件输出功率不满足系统要求时,功率合成技术是提高系统输出功率的有效方法.本文详细研究了基于薄膜电阻的波导E-T结功率分配/合成器,最终设计了一种新型的基于薄膜电阻的波导E-T结.该结构具有高隔离度、低插入损耗、小体积、宽频带等优点.通过合理设计薄膜电阻的长宽比,尽量增大薄膜电阻的面积,并且采用高导热的氮化铝陶瓷基板作为微带和薄膜电阻的介质基板,提高了基于薄膜电阻的波导E-T结承受的功率.利用三维电磁场仿真软件HFSS对其进行了建模仿真,加工的实物经过测试在25~34 GHz插入损耗小于0.2 d B,回波损耗优于-15 d B,隔离度优于10 d B.经对比,实测结果与仿真结果吻合,具有较好的工程应用价值.展开更多
基金Supported by Science and Technology Committee of Tianjin (No.06YFGPGX08400)Ministry of Science and Technology of China (No.2009GJF20022)Innovation Fund of Tianjin University
文摘High resistance thin film chip resistors(0603 type) were studied,and the specifications are as follows:1 k? with tolerance about ±0.1% after laser trimming and temperature coefficient of resistance(TCR) less than ±15×10-6/℃.Cr-Si-Ta-Al films were prepared with Ar flow rate and sputtering power fixed at 20 standard-state cubic centimeter per minute(sccm) and 100 W,respectively.The experiment shows that the electrical properties of Cr-SiTa-Al deposition films can meet the specification requirements of 0603 ty...
文摘单个器件输出功率不满足系统要求时,功率合成技术是提高系统输出功率的有效方法.本文详细研究了基于薄膜电阻的波导E-T结功率分配/合成器,最终设计了一种新型的基于薄膜电阻的波导E-T结.该结构具有高隔离度、低插入损耗、小体积、宽频带等优点.通过合理设计薄膜电阻的长宽比,尽量增大薄膜电阻的面积,并且采用高导热的氮化铝陶瓷基板作为微带和薄膜电阻的介质基板,提高了基于薄膜电阻的波导E-T结承受的功率.利用三维电磁场仿真软件HFSS对其进行了建模仿真,加工的实物经过测试在25~34 GHz插入损耗小于0.2 d B,回波损耗优于-15 d B,隔离度优于10 d B.经对比,实测结果与仿真结果吻合,具有较好的工程应用价值.
