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Polarization-Insensitive Silica on Silicon Arrayed Waveguide Grating Design 被引量:1
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作者 安俊明 李健 +4 位作者 郜定山 夏君磊 李建光 王红杰 胡雄伟 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2004年第11期1360-1363,共4页
A new technology for fabrication of silica on silicon arrayed waveguide grating (AWG) based on deep etching and thermal oxidation is presented.Using this method,a silicon layer is remained at the side of waveguide.The... A new technology for fabrication of silica on silicon arrayed waveguide grating (AWG) based on deep etching and thermal oxidation is presented.Using this method,a silicon layer is remained at the side of waveguide.The stress distribution and effective refractive index of waveguide fabricated by this approach are calculated using finite element and finite difference beam propagation method,respectively.The results of these studies indicate that the stress of silica on silicon optical waveguide can be matched in parallel and vertical direction and AWG polarization dependent wavelength (PDλ) can be reduced effectively due to side-silicon layer. 展开更多
关键词 silica on silicon arrayed waveguide grating stress BIREFRINGENCE polarization dependent wavelength numerical analysis
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A 32-channel 100 GHz wavelength division multiplexer by interleaving two silicon arrayed waveguide gratings 被引量:2
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作者 Changjian Xie Xihua Zou +3 位作者 Fang Zou Lianshan Yan Wei Pan Yong Zhang 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第12期339-342,共4页
A 32-channel wavelength division multiplexer with 100 GHz spacing is designed and fabricated by interleaving two silicon arrayed waveguide gratings(AWGs).It has a parallel structure consisting of two silicon 16-channe... A 32-channel wavelength division multiplexer with 100 GHz spacing is designed and fabricated by interleaving two silicon arrayed waveguide gratings(AWGs).It has a parallel structure consisting of two silicon 16-channel AWGs with200 GHz spacing and a Mach-Zehnder interferometer(MZI)with 200 GHz free spectral range.The 16 channels of one silicon AWG are interleaved with those of the other AWG in spectrum,but with an identical spacing of 200 GHz.For the composed wavelength division multiplexer,the experiment results reveal 32 wavelength channels in C-band,a wavelength spacing of 100 GHz,and a channel crosstalk lower than-15 dB. 展开更多
关键词 wavelength division multiplexer arrayed waveguide grating silicon photonics Mach-Zehnder interferometer
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Analysis on Mode Field Distribution of Waveguide Grating Coupler by the Scalar FDTD 被引量:2
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作者 HUANGChong-qing LIUJing +3 位作者 LUOWen-hua ANWei-ke YUANXiu-hua HUANGDe-xiu 《Semiconductor Photonics and Technology》 CAS 2003年第3期166-169,177,共5页
The scalar two-dimensional finite difference time domain (FDTD) method is applied to simulate the mode field distribution of TE 0 of the waveguide grating coupler. Computer simulation shows that the same stable mode f... The scalar two-dimensional finite difference time domain (FDTD) method is applied to simulate the mode field distribution of TE 0 of the waveguide grating coupler. Computer simulation shows that the same stable mode field distribution pattern is obtained through the different kinds of driving sources. It is found that the optical field mode is determined by waveguide structure and optical wavelength other than the driving source.According to the mode field distribution, the optimum coupling efficiency can be predicted. Compared with another numerical methods,the CPU-time and memory elements of computer used by FDTD are much less. 展开更多
关键词 waveguide grating couplers Light fields Coupling efficiency FDTD
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Design and fabrication of multi-channel photodetector array monolithic with arrayed waveguide grating 被引量:1
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作者 吕倩倩 潘盼 +4 位作者 叶焓 尹冬冬 王玉冰 杨晓红 韩勤 《Chinese Physics B》 SCIE EI CAS CSCD 2016年第3期453-457,共5页
We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13- channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometr... We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13- channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometry and refrac- tive index. Aseamless joint structure has been designed and fabricated for integrating the output waveguides of AWGs with the evanescently coupled waveguide photodiode array. The highest simulation quantum efficiency could achieve 92% when the matching layer thickfiess of the PD is 120 nm and the insertion length is 2 μm. The fabricated PD with 320-nm-thick match.ing layer and 2-μm-length insertion matching layer present a responsivity of 0.87 A/W. 展开更多
关键词 photodetector array MONOLITHIC evanescent coupling arrayed waveguide grating
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Design and Analysis of 4×4 Arrayed Waveguide Grating Multiplexer 被引量:1
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作者 DINGYao-ming ZHANGGuo-ping 《Semiconductor Photonics and Technology》 CAS 2002年第2期65-69,79,共6页
The operation principle of an arrayed waveguide grating(AWG) multiplexer is introduced and the 4×4 AWG with following design parameters is discussed in detail, such as the choice of wavelength, the neighboring ar... The operation principle of an arrayed waveguide grating(AWG) multiplexer is introduced and the 4×4 AWG with following design parameters is discussed in detail, such as the choice of wavelength, the neighboring arrayed waveguide distance ΔL, the channel frequency interval Δf, and the free spectral range. The structure of 4×4 AWG is designed and the result of stimulated test is also given. Analysis shows that the 4×4 AWG is characterized by a wide dynamic range, low crosstalk, better spectrum properties, and a compact structure. 展开更多
关键词 Arrayed waveguide grating Wavelength multiplex DESIGN
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An Open Rectangular Waveguide Grating for Millimeter-Wave Traveling-Wave Tubes
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作者 廖明亮 魏彦玉 +7 位作者 王海龙 黄宇 徐进 刘漾 郭彍 牛新建 宫玉彬 Gun-Sik Park 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第9期22-26,共5页
Millimeter-wave traveling-wave tube (TWT) prevails nowadays as the amplifier for radar, communication and electronic countermeasures. The rectangular waveguide grating is a promising all-metal interaction circuit fo... Millimeter-wave traveling-wave tube (TWT) prevails nowadays as the amplifier for radar, communication and electronic countermeasures. The rectangular waveguide grating is a promising all-metal interaction circuit for the millimeter-wave TWT with advantages of high power capacity, fine heat dissipation, scalability to smaller dimen- sions for shorter wavelengths, compact structure and robust performance. Compared with the traditional closed structure, the open rectangular waveguide grating (ORWG) has wider bandwidth, lower cut-off frequency, and higher machining precision for higher working frequencies due to the open transverse. It is a potential structure that can work in the millimeter wave and even Terahertz band. The rf characteristics including dispersion and interaction impedance are investigated by both theoretic calculation and software simulation. The influences of the structure parameters are also discussed and compared, and the theoretical results agree well with the simula- tion results. Based on the study, the ORWG will favor the design of a broadband and high-power millimeter-wave TWT. 展开更多
关键词 TWT in on is An Open Rectangular waveguide grating for Millimeter-Wave Traveling-Wave Tubes of for WAVE
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Novel wavelength-accurate InP-based arrayed waveguide grating
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作者 潘盼 安俊明 +7 位作者 王红杰 王玥 张家顺 王亮亮 代红庆 张晓光 吴远大 胡雄伟 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第4期314-318,共5页
A 13-channel, InP-based arrayed waveguide grating (AWG) is designed and fabricated in which the on-chip loss of the central channel is about -5 dB and the crosstalk is less than -23 dB in the center of the spectrum ... A 13-channel, InP-based arrayed waveguide grating (AWG) is designed and fabricated in which the on-chip loss of the central channel is about -5 dB and the crosstalk is less than -23 dB in the center of the spectrum response. However, the central wavelength and channel spacing are deviated from the design values. To improve their accuracy, an optimized design is adopted to compensate the process error. As a result, the central wavelength 1549.9 nm and channel spacing 1.59 nm are obtained in the experiment, while their design values are 1549.32 nm and 1.6 nm, respectively. The route capability and thermo-optic characteristic of the AWG are also discussed in detail. 展开更多
关键词 arrayed waveguide grating wavelength accuracy thermo-optical characteristic ROUTER
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Design and Fabrication of a 400 GHz InP-Based Arrayed Waveguide Grating with Flattened Spectral Response
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作者 ZHANG Xi-Lin LIU Song Tao +2 位作者 LU Dan ZHANG Rui-Kang JI Chen 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第5期55-58,共4页
A four-channel 400 GHz channel spacing InP-based arrayed waveguide grating with a flattened wavelength re- sponse by employing a multimode interference coupler at the input waveguide of the filter is prepared. The fab... A four-channel 400 GHz channel spacing InP-based arrayed waveguide grating with a flattened wavelength re- sponse by employing a multimode interference coupler at the input waveguide of the filter is prepared. The fabricated devices show a flattened spectral response with a broadened 3-dB bandwidth up to 3.5 nm, interchan- nel non-uniformity of 〈0. 7dB and excellent match to the simulation results. 展开更多
关键词 AWG InP Design and Fabrication of a 400 GHz InP-Based Arrayed waveguide grating with Flattened Spectral Response
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Fluorinated polymer with high thermal stability for fabrication of 32-channel arrayed waveguide grating multiplexer on silicon
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作者 王菲 李艾泽 +4 位作者 孙伟 衣茂斌 姜振华 刘式墉 张大明 《Journal of Central South University of Technology》 EI 2005年第4期366-369,共4页
A cross-linkable fluorinated poly (ether ether ketone) (FPEEK) was synthesized for the fabrication of arrayed waveguide grating (AWG) multiplexer. The results of thermal gravimetric analysis (TGA) and near-infrared ab... A cross-linkable fluorinated poly (ether ether ketone) (FPEEK) was synthesized for the fabrication of arrayed waveguide grating (AWG) multiplexer. The results of thermal gravimetric analysis (TGA) and near-infrared absorption spectrum show that the materials have high thermal stability and high optical transparency in the infrared communication region. The refractive index of FPEEK can be controlled easily by changing the fluorine content of the materials. The 32-channel AWG multiplexer is fabricated using the FPEEK and oxygen reactive ion etching technology. The AWG multiplexer exhibits that the insertion loss is from 12.8 to 17.8 dB and the channel crosstalk is less than-20 dB. The wavelength channel spacing and the center wavelength are 0.8nm and 1548nm, respectively. 展开更多
关键词 wavelength division multiplexing arrayed waveguide grating fluorinated polymer poly (ether ether ketone)
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STUDY ON RECTANGULAR WAVEGUIDE GRATING SLOW-WAVE STRUCTURE WITH COSINE-SHAPED GROOVES
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作者 Lu Zhigang Wei Yanyu Gong Yubin Wu Zhoumiao Wang Wenxiang 《Journal of Electronics(China)》 2007年第3期384-389,共6页
This paper focuses on a new rectangular waveguide grating Slow-Wave Structure (SWS) with cosine-shaped grooves and studies the propagation characteristics of the wave in the SWS. By using the approximate field-matchin... This paper focuses on a new rectangular waveguide grating Slow-Wave Structure (SWS) with cosine-shaped grooves and studies the propagation characteristics of the wave in the SWS. By using the approximate field-matching conditions,the dispersion equation and the coupling impedance of this circuit are obtained. The dispersion curves and coupling impedances of the fundamental wave are calculated and the influences of the various geometrical dimensions are discussed. The results show that the bandwidth of the cosine-shaped groove SWS is much wider than that of rectangular-shaped groove one. And reducing the groove width can broaden the frequency-band and decrease the phase-velocity,while increment of the groove-depth can also decrease phase-velocity. For above cases,the coupling impedance is more than 16Ω. The present analysis will be helpful on further study and design of the RF systems used in millimeter wave Traveling Wave Tube (TWT). 展开更多
关键词 Traveling Wave Tub (TWT) Rectangular waveguide grating Cosine-shaped groove Dispersion equation Coupling impedance
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Influence of Crosstalk on Signal Power Based on Arrayed-waveguide Grating as N × N Optical Router
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作者 DING Yao ming, TONG Ju fang (Dept.of Phys.,Xiaogan University, Hubei 432100,CHN) 《Semiconductor Photonics and Technology》 CAS 2003年第3期170-177,共8页
The fact that the signal results in signal―crosstalk is confirmed forarrayed―waveguide grating as NXN optical router, and the relation between the crosstalk and powerpenalty is obtained. The method reveals the rando... The fact that the signal results in signal―crosstalk is confirmed forarrayed―waveguide grating as NXN optical router, and the relation between the crosstalk and powerpenalty is obtained. The method reveals the random distributions of optical path phase errors in twomultiplexers with channel numbers of 10 and 160. It is shown that the crosstalk must be less than―28 dB for a power penalty below 1 dB at a bit error rate of 1X10^(-9). It is found that when N =100, crosstalk power value is ? 20 dB with compensation power of 2―3 dB, so the compensation poweris not ignored. 展开更多
关键词 CROSSTALK arrayed―waveguide grating ROUTER bit error rate
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Study of Deep-etched Glass Waveguide Grating
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作者 马少杰 《High Technology Letters》 EI CAS 1995年第2期48-50,共3页
Photoresist grating was fabricated by holography, and it was used in the mask of ion etching. The groovy depth of the etched glass grating was 1.6μm. The glass waveguide was formed by K^+/Na^+ ion exchanging. The las... Photoresist grating was fabricated by holography, and it was used in the mask of ion etching. The groovy depth of the etched glass grating was 1.6μm. The glass waveguide was formed by K^+/Na^+ ion exchanging. The laser beam of 633nm was coupled in the waveguide by a prism at one end, then, it passed through the grating and came out of the waveguide at other end. In the experiment, the Bragg diffraction with several orders was observed. The first order Bragg diffraction had the highest efficiency of 90 percent. 展开更多
关键词 waveguide grating Bragg diffraction Ion etching
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Study on the adaptability of augmented reality smartglasses for astigmatism based on holographic waveguide grating
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作者 Shenze WANG Kaikai DU +3 位作者 Ningfang SONG Dongfeng ZHAO Di FENG Zhengqian TU 《Virtual Reality & Intelligent Hardware》 2020年第1期79-85,共7页
Background Augmen ted reality(AR)smartglasses are considered as the next generation of smart devices to replace mobile phones,and are widely concerned.But at present,AR smartglasses are usually designed according to t... Background Augmen ted reality(AR)smartglasses are considered as the next generation of smart devices to replace mobile phones,and are widely concerned.But at present,AR smartglasses are usually designed according to the human normal eyes.In order to experience AR smartglasses perfectly,abnormal eye users must first wear diopters.Methods For people with astigmatism to use AR smartglasses without wearing a diopter lens,a cylindrical lens waveguide grating is designed in this study based on the principle of holographic waveguide grating.First,a cylindrical lens waveguide substrate is constructed for external light deflection to satisfy the users'normal viewing of the real world.Further,a variable period grating structure is established based on the cylindrical lens waveguide substrate to normally emit the light from the virtual world in the optical machine to the human eyes.Finally,the structural parameters of grating are optimized to improve the diffraction efficiency.Results The results show that the structure of cylindrical lens waveguide grating allows people with astigmatism to wear AR smartglasses directly.The total light utilization rate reaches 90%with excellent imaging uniformity.The brightness difference is less than 0.92%and the vertical field of view is 10°.Conclusions This research serves as a guide for AR product designs for people with long/short sightedness and promotes the development of such products. 展开更多
关键词 Holographic waveguide grating Augmented reality smartglasses Cylindrical lens ASTIGMATISM
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Tunable wavelength filters using polymer long-period waveguide gratings based on metal-cladding directly defined technique
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作者 Ji-Hou Wang Chang-Ming Chen +5 位作者 Yang Zheng Xi-Bin Wang Yun-Ji Yi Xiao-Qiang Sun Fei Wang Da-Ming Zhang 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第2期268-273,共6页
In this work, long-period waveguide grating-based tunable wavelength filters using organic–inorganic grafting poly(methyl methacrylate)(PMMA) materials are designed and fabricated by metal-cladding directly defin... In this work, long-period waveguide grating-based tunable wavelength filters using organic–inorganic grafting poly(methyl methacrylate)(PMMA) materials are designed and fabricated by metal-cladding directly defined technique.The thermal stabilities and optical properties of the organic–inorganic grafting PMMA core materials are analyzed. Structures and performance parameters of the waveguide gratings and self-electrode heaters are designed and simulated. The contrast of the filter is about 15 d B and the resonant wavelength can be tuned by different electric powers applied to the metal-cladding self-electrode heaters. The temperature sensitivity is 3.5 nm/℃ and the switching time is about 1 ms. The technique is very suitable for realizing the optoelectronic integrated wavelength-division-multiplexing systems. 展开更多
关键词 organic–inorganic grafting materials polymer optical waveguide long-period grating filter metalcladding defined technique
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Ultralow cross talk arrayed waveguide grating integrated with tunable microring filter array 被引量:1
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作者 胡鹤鸣 刘世平 +3 位作者 李天文 范永杰 陈华 方青 《Chinese Optics Letters》 SCIE EI CAS CSCD 2024年第3期50-54,共5页
The silicon-based arrayed waveguide grating(AWG)is widely used due to its compact footprint and its compatibility with the mature CMOS process.However,except for AWGs with ridged waveguides of a few micrometers of cro... The silicon-based arrayed waveguide grating(AWG)is widely used due to its compact footprint and its compatibility with the mature CMOS process.However,except for AWGs with ridged waveguides of a few micrometers of cross section,any small process error will cause a large phase deviation in other AWGs,resulting in an increasing cross talk.In this paper,an ultralow cross talk AWG via a tunable microring resonator(MRR)filter is demonstrated on the SOI platform.The measured insertion loss and minimum adjacent cross talk of the designed AWG are approximately 3.2 and-45.1 d B,respectively.Compared with conventional AWG,its cross talk is greatly reduced. 展开更多
关键词 SOI platform arrayed waveguide grating cross talk microring filter array thermo-optic effect
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Waveguide Bragg Grating for Fault Localization in PON
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作者 HU Jin LIU Xu +4 位作者 ZHU Songlin ZHUANG Yudi WU Yuejun XIA Xiang HE Zuyuan 《ZTE Communications》 2024年第2期94-98,共5页
Femtosecond laser direct inscription is a technique especially useful for prototyping purposes due to its distinctive advantages such as high fabrication accuracy,true 3D processing flexibility,and no need for mold or... Femtosecond laser direct inscription is a technique especially useful for prototyping purposes due to its distinctive advantages such as high fabrication accuracy,true 3D processing flexibility,and no need for mold or photomask.In this paper,we demonstrate the design and fabrication of a planar lightwave circuit(PLC)power splitter encoded with waveguide Bragg gratings(WBG)using a femtosecond laser inscription technique for passive optical network(PON)fault localization application.Both the reflected wavelengths and intervals of WBGs can be conveniently tuned.In the experiment,we succeeded in directly inscribing WBGs in 1×4 PLC splitter chips with a wavelength interval of about 4 nm and an adjustable reflectivity of up to 70% in the C-band.The proposed method is suitable for the prototyping of a PLC splitter encoded with WBG for PON fault localization applications. 展开更多
关键词 planar light circuit power splitter waveguide Bragg gratings femtosecond laser optical network fault localization
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On-chip digitally tunable positive/negative dispersion controller using bidirectional chirped multimode waveguide gratings 被引量:1
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作者 Shujun Liu Ruitao Ma +2 位作者 Zejie Yu Yaocheng Shi Daoxin Dai 《Advanced Photonics》 SCIE EI CAS CSCD 2023年第6期72-82,共11页
A silicon-based digitally tunable positive/negative dispersion controller(DC)is proposed and realized for the first time using the cascaded bidirectional chirped multimode waveguide gratings(CMWGs),achieving positive ... A silicon-based digitally tunable positive/negative dispersion controller(DC)is proposed and realized for the first time using the cascaded bidirectional chirped multimode waveguide gratings(CMWGs),achieving positive and negative dispersion by switching the light propagation direction.A 1×2 Mach-Zehnder switch(MZS)and a 2×1 MZS are placed before and after to route the light path for realizing positive/negative switching.The device has Q stages of identical bidirectional CMWGs with a binary sequence.Thus the digital tuning is convenient and scalable,and the total dispersion accumulated by all the stages can be tuned digitally from−(2^(Q)−1)D0 to(2^(Q)−1)D_(0) with a step of D_(0) by controlling the switching states of all 2×2 MZSs,where D_(0) is the dispersion provided by a single bidirectional CMWG unit.Finally,a digitally tunable positive/negative DC with Q=4 is designed and fabricated.These CMWGs are designed with a 4-mm-long grating section,enabling the dispersion D_(0) of about 4.16 ps∕nm in a 20-nm-wide bandwidth.The dispersion is tuned from−61.53 to 63.77 ps∕nm by switching all MZSs appropriately,and the corresponding group delay is varied from−1021 to 1037 ps. 展开更多
关键词 silicon photonics dispersion tuning digital tuning multimode waveguide grating
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Polymer Arrayed Waveguide Grating with Box-Like Spectral Response
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作者 秦政坤 马春生 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第12期2307-2310,共4页
An efficient technique is used to flatten the spectral response of an arrayed waveguide grating (AWG) multiplexer. By subtracting an increment from the core width of odd arrayed waveguides and by adding the same inc... An efficient technique is used to flatten the spectral response of an arrayed waveguide grating (AWG) multiplexer. By subtracting an increment from the core width of odd arrayed waveguides and by adding the same increment to that of even arrayed waveguides,a box-like spectral response can be obtained. A 17 × 17 polymer AWG multiplexer with box- like spectral response has been made using FPE polymer materials. Measured result for the AWG shows that the box-like spectral response has a 3dB bandwidth of 0. 476nm, the crosstalk is about or less than - 21dB for every output channel,and the insertion loss is 13-15dB. 展开更多
关键词 arrayed waveguide grating box-like spectral response 3dB bandwidth CROSSTALK
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Study of the double rectangular waveguide grating slow-wave structure 被引量:5
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作者 路志刚 宫玉彬 +1 位作者 魏彦玉 王文祥 《Chinese Physics B》 SCIE EI CAS CSCD 2006年第11期2661-2668,共8页
A slow-wave structure (SWS) with two opposite gratings inside a rectangular waveguide is presented and analysed. As an all-metal slow-wave circuit, this structure is especially suited for use in millimetre-wave trav... A slow-wave structure (SWS) with two opposite gratings inside a rectangular waveguide is presented and analysed. As an all-metal slow-wave circuit, this structure is especially suited for use in millimetre-wave travelling wave tubes (TWTs) due to its advantages of large size, high manufacturing precision and good heat dissipation. The first part of this paper concerns the wave properties of this structure in vacuum. The influence of the geometrical dimensions on dispersion characteristics and coupling impedance is investigated. The theoretical results show that this structure has a very strong dispersion and the coupling impedance for the fundamental wave is several tens of ohms, but the coupling impedance for -1 space harmonic wave is much lower than that for the fundamental wave, so the risk of backward wave oscillation is reduced. Besides these, the CST microwave studio is also used to simulate the dispersion property of the SWS. The simulation results from CST and the theoretical results agree well with each other, which supports the theory. In the second part, a small-signal analysis of a double rectangular waveguide grating TWT is presented. The typical small-signal gain per period is about 0.45 dB, and the 3-dB small-signal gain bandwidth is only 4%. 展开更多
关键词 TWT rectangular waveguide grating DISPERSION small signal gain
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Design and Fabrication of Polymer Arrayed Waveguide Grating 被引量:2
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作者 ZHANG Da ming, WANG Fei, ZHANG Zhen guo, ZHAO Yu, YI Mao bin, LIU Shi yong (State Key Laboratory of Integrated Optoelectronics, Jilin University, Changchun 130023, P.R.China) 《The Journal of China Universities of Posts and Telecommunications》 EI CSCD 2003年第2期11-15,共5页
In this paper, based on the principle of Arrayed Waveguide Grating (AWG)theory, some important parameters are optimized for polymer AWG around the central wavelength of1.55μm with the wavelength spacing of 1.6 nm. Th... In this paper, based on the principle of Arrayed Waveguide Grating (AWG)theory, some important parameters are optimized for polymer AWG around the central wavelength of1.55μm with the wavelength spacing of 1.6 nm. Then, a 9 X 9 polymer AWG is designed and thefabricating process are described . The cladding material is poly-methyl-methacrylate-co-glyciclylmethacrylate (PMMA-GMA) and the core material is the mixture of PMMA-GMA and bis-phonel-A epoxy. Inorder to obtain a better shape of the waveguide after the Reactive Ion Etching (RIE) using oxygen,an aluminum mask is used on polymer instead of conventional photoresist as mask in the fabricationprocess. The measuring results indicate that the fabricated optical waveguide achieves single-modetransmission. 展开更多
关键词 arrayed waveguide grating POLYMER wavelength division multiplexing
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