Optical waveguides in silica-on-silicon are one of the key elements in optical communications.The processes of deep etching silica waveguides using resist and metal masks in RIE plasma are investigated.The etching res...Optical waveguides in silica-on-silicon are one of the key elements in optical communications.The processes of deep etching silica waveguides using resist and metal masks in RIE plasma are investigated.The etching responses,including etching rate and selectivity as functions of variation of parameters,are modeled with a 3D neural network.A novel resist/metal combined mask that can overcome the single-layer masks’ limitations is developed for enhancing the waveguides deep etching and low-loss optical waveguides are fabricated at last.展开更多
Based on couple wave equation and finite-difference time-domain (FDTD) algorithm,the strong couple characteristic of 2-D photonic crystal couplers is calculated.Theoretical analysis and numerical simulated results ind...Based on couple wave equation and finite-difference time-domain (FDTD) algorithm,the strong couple characteristic of 2-D photonic crystal couplers is calculated.Theoretical analysis and numerical simulated results indicate that the energy in a 2-D photonic crystal coupler can not be totally transferred between two wave-guides.Compared with the result of weak coupling theory,our result is more accurate.展开更多
A novel theoretical model of thermal diffusion has been established to study thermal interaction between two neighboring diodes in semiconductor laser arrays. The main cause of the ocurrence of the thermal interaction...A novel theoretical model of thermal diffusion has been established to study thermal interaction between two neighboring diodes in semiconductor laser arrays. The main cause of the ocurrence of the thermal interaction between two neighboring diodes in array devices is the heat conduction through heat sink. We hold that as the devices must have heat sink to diffuse heat, this kind of interaction in the array would always exist. However, when the pitch between two neighboring diodes in the array is reasonably defined, this troublesome thermal interaction can be simply reduced by using our model. Based on the individual diodes with leaky waveguide structure, we experimentally succeeded in fabricating 2D 4 ×4 arrays. The thermal interaction between upper and lower diodes in the 2D array is also considered as well as the function of the heat sink. The measured results show that the pulse peak output powor of the 2D 4 ×4 array is high up to 11 W.展开更多
文摘Optical waveguides in silica-on-silicon are one of the key elements in optical communications.The processes of deep etching silica waveguides using resist and metal masks in RIE plasma are investigated.The etching responses,including etching rate and selectivity as functions of variation of parameters,are modeled with a 3D neural network.A novel resist/metal combined mask that can overcome the single-layer masks’ limitations is developed for enhancing the waveguides deep etching and low-loss optical waveguides are fabricated at last.
基金Supported by the Youth Science and Technology InnovationItem Foundation of Fujian Province(2001J008)
文摘Based on couple wave equation and finite-difference time-domain (FDTD) algorithm,the strong couple characteristic of 2-D photonic crystal couplers is calculated.Theoretical analysis and numerical simulated results indicate that the energy in a 2-D photonic crystal coupler can not be totally transferred between two wave-guides.Compared with the result of weak coupling theory,our result is more accurate.
文摘A novel theoretical model of thermal diffusion has been established to study thermal interaction between two neighboring diodes in semiconductor laser arrays. The main cause of the ocurrence of the thermal interaction between two neighboring diodes in array devices is the heat conduction through heat sink. We hold that as the devices must have heat sink to diffuse heat, this kind of interaction in the array would always exist. However, when the pitch between two neighboring diodes in the array is reasonably defined, this troublesome thermal interaction can be simply reduced by using our model. Based on the individual diodes with leaky waveguide structure, we experimentally succeeded in fabricating 2D 4 ×4 arrays. The thermal interaction between upper and lower diodes in the 2D array is also considered as well as the function of the heat sink. The measured results show that the pulse peak output powor of the 2D 4 ×4 array is high up to 11 W.
