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玻璃-硅微结构封装过程工艺参数对键合质量的影响 被引量:2
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作者 李嘉 郭浩 +2 位作者 郭志平 苗淑静 王景祥 《仪表技术与传感器》 CSCD 北大核心 2015年第10期4-6,共3页
通过MEMS封装试验平台,对键合过程中的键合温度、键合时间等工艺参数以及试验硅片规格进行试验研究。通过改变键合温度、键合时间以及试验硅片规格等参数,进行玻璃-硅键合对比试验。计算每组对比试验的键合空隙率,分析每组对比试验空隙... 通过MEMS封装试验平台,对键合过程中的键合温度、键合时间等工艺参数以及试验硅片规格进行试验研究。通过改变键合温度、键合时间以及试验硅片规格等参数,进行玻璃-硅键合对比试验。计算每组对比试验的键合空隙率,分析每组对比试验空隙率的数据,归纳总结影响键合质量的因素以及达到键合最佳效果的键合条件。试验结果表明:键合电压为1 200 V,温度为445~455℃,键合时间为60 s时,空隙率小于5%,玻璃与硅片的键合质量达到最佳,为提高玻璃-硅键合质量提供了依据。 展开更多
关键词 MEMS 玻璃-硅键合 封装试验 空隙率
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氧传感器气密结构封装研究 被引量:1
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作者 石艳宁 《现代制造工程》 CSCD 北大核心 2016年第2期147-150,154,共5页
将滑石粉环作为氧传感器的密封材料,采用液压机对氧传感器前端进行封装,采用泄漏机对封装样件做泄漏试验,得出封装力与泄漏量的对应关系,采用发动机台架对氧传感器做热泄漏试验,验收产品结构及封装力的合理性。
关键词 氧传感器气密结构 封装试验 泄漏试验
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通孔/线封装级与晶圆级结果的比较
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《电子产品可靠性与环境试验》 2003年第1期66-66,共1页
关键词 晶圆级试验 封装试验 寿命预测
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Evaluation of the Properties of Cement Pastes and Mortars Used in the Encapsulation of Bituminized Waste to be Disposed in a Near-Surface Repository
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作者 Vanessa Mota Vieira Cledola Cassia Oliveira de Tello 《Journal of Environmental Science and Engineering(B)》 2016年第11期541-548,共8页
The Brazilian repository is being planned to be a near-surface one. In Brazil, the low and intermediate level radioactive wastes are immobilized using cement and bitumen for nuclear plant Angra 1 and Angra 2, respecti... The Brazilian repository is being planned to be a near-surface one. In Brazil, the low and intermediate level radioactive wastes are immobilized using cement and bitumen for nuclear plant Angra 1 and Angra 2, respectively. The major problems due to the disposal of bituminized wastes in repositories are swelling of the waste products and their degrad^ttion in the long term. To accommodate the swelling of the bituminized wastes, the drums are filled up to 70-90% of their volume, which reduces the structural the repository stability and the disposal availability. Countries, which use bitumen in the solidification of NPP's radioactive waste and have near-surface repositories, need to immobilize this bituminized waste within other drums containing cement pastes or mortars to disposal them. This study aims to evaluate the properties of bitumen, cement pastes and mortars to be used in the encapsulation of bituminized wastes. The formulations of two pastes and two mortars were selected for the pilot scale tests. The laboratory and pilot scales results were very similar, indicating that any of these formulations could be used. However, the better formulation will be chosen after the leaching test results, because it is an essential parameter in the long-term repository performance. 展开更多
关键词 Radioactive wastes BITUMEN cement pastes mortars.
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