A new method for the control of the speed of an ultrasonic motor and its implementation are proposed. The method is merely used by detecting the time when motor′s monitor signal reaches a non zero reference valu...A new method for the control of the speed of an ultrasonic motor and its implementation are proposed. The method is merely used by detecting the time when motor′s monitor signal reaches a non zero reference value than a zero one, the direction, in which the driving frequency of the motor should be shifted, can be promptly calculated. With the aid of a CPU and the phase locked frequency doubling technique, the motor can be steadily driven in a wide range of frequency and the optimum frequency can be captured rapidly and precisely. Experiment shows that the above method is available.展开更多
Aim To design and experimentally study an 80C196KC-based SRD (switched re- luctance motor drive drive sytem) controller,Methods with the guidelines of the digitized SRD system controller,the circuit design and softwar...Aim To design and experimentally study an 80C196KC-based SRD (switched re- luctance motor drive drive sytem) controller,Methods with the guidelines of the digitized SRD system controller,the circuit design and software programming were completed,and a relevantexperimental system was PUT forward to test the newly designed controller.Result The experi-mental study showed that the newlydesigned controller had good speed-adjusting characteristicfor a switched reluctance motor ,its stable error was less than 5% and its full-load startingtime was shorter than 1.8s .Conclusion The new controller has reasonable circuit design and suitable controlling algorithm,and it is a feasible SRD system controller design scheme.展开更多
A scanning probe microscope(SPM)stage controlled by three stepper motors is designed,which has more flexibilitiesthan that of one motor controlled stage,while the control whom is more complicated.In this project,we bu...A scanning probe microscope(SPM)stage controlled by three stepper motors is designed,which has more flexibilitiesthan that of one motor controlled stage,while the control whom is more complicated.In this project,we build the stageactions in an Arduino microcontroller,and finite state machine(FSM)is also built in the Arduino micro controller to communicatewith a computer and a radio frequency(RF)controller.A special displaying scheme with five states is employed to indicatethe operation of the stage.Finally,the stage is fully tested and has a700nm resolution in Z motion of the SPM.展开更多
This paper describes the incremental PID control algorithm and the basic principles of motor soft start, and introduced STM32F103RB8 basic performance microcontroller, combined with incremental PID control advantages,...This paper describes the incremental PID control algorithm and the basic principles of motor soft start, and introduced STM32F103RB8 basic performance microcontroller, combined with incremental PID control advantages, and gives MCU in motor soft start process control application. Practice shows that the incremental PID applications, simplifying the control ideas to improve the performance of the current loop control, limiting the starting current, smooth start-up speed, and achieved good results motor start.展开更多
A finite-time tracking control scheme is proposed in this paper based on the terminal sliding mode principle for motor servo systems with unknown nonlinear dead-zone inputs.By using the differential mean value theorem...A finite-time tracking control scheme is proposed in this paper based on the terminal sliding mode principle for motor servo systems with unknown nonlinear dead-zone inputs.By using the differential mean value theorem,the dead-zone is represented as a time-varying system and thus the inverse compensation approach is avoided.Then,an indirect terminal sliding mode control(ITSMC)is developed to guarantee the finite-time convergence of the tracking error and to overcome the singularity problem in the traditional terminal sliding mode control.In the proposed controller design,the unknown nonlinearity of the system is approximated by a simple sigmoid neural network,and the approximation error is diminished by employing a robust term.Comparative experiments on a turntable servo system are conducted to show the superior performance of the proposed method.展开更多
Stress controllable silicon nitride(Si Nx) films deposited by plasma enhanced chemical vapor deposition(PECVD) are reported. Low stress Si Nx films were deposited in both high frequency(HF) mode and dual frequency(HF/...Stress controllable silicon nitride(Si Nx) films deposited by plasma enhanced chemical vapor deposition(PECVD) are reported. Low stress Si Nx films were deposited in both high frequency(HF) mode and dual frequency(HF/LF) mode. By optimizing process parameters, stress free(-0.27 MPa) Si Nx films were obtained with the deposition rate of 45.5 nm/min and the refractive index of 2.06. Furthermore, at HF/LF mode, the stress is significantly influenced by LF ratio and LF power, and can be controlled to be 10 MPa with the LF ratio of 17% and LF power of 150 W. However, LF power has a little effect on the deposition rate due to the interaction between HF power and LF power. The deposited Si Nx films have good mechanical and optical properties, low deposition temperature and controllable stress, and can be widely used in integrated circuit(IC), micro-electro-mechanical systems(MEMS) and bio-MEMS.展开更多
文摘A new method for the control of the speed of an ultrasonic motor and its implementation are proposed. The method is merely used by detecting the time when motor′s monitor signal reaches a non zero reference value than a zero one, the direction, in which the driving frequency of the motor should be shifted, can be promptly calculated. With the aid of a CPU and the phase locked frequency doubling technique, the motor can be steadily driven in a wide range of frequency and the optimum frequency can be captured rapidly and precisely. Experiment shows that the above method is available.
文摘Aim To design and experimentally study an 80C196KC-based SRD (switched re- luctance motor drive drive sytem) controller,Methods with the guidelines of the digitized SRD system controller,the circuit design and software programming were completed,and a relevantexperimental system was PUT forward to test the newly designed controller.Result The experi-mental study showed that the newlydesigned controller had good speed-adjusting characteristicfor a switched reluctance motor ,its stable error was less than 5% and its full-load startingtime was shorter than 1.8s .Conclusion The new controller has reasonable circuit design and suitable controlling algorithm,and it is a feasible SRD system controller design scheme.
文摘A scanning probe microscope(SPM)stage controlled by three stepper motors is designed,which has more flexibilitiesthan that of one motor controlled stage,while the control whom is more complicated.In this project,we build the stageactions in an Arduino microcontroller,and finite state machine(FSM)is also built in the Arduino micro controller to communicatewith a computer and a radio frequency(RF)controller.A special displaying scheme with five states is employed to indicatethe operation of the stage.Finally,the stage is fully tested and has a700nm resolution in Z motion of the SPM.
文摘This paper describes the incremental PID control algorithm and the basic principles of motor soft start, and introduced STM32F103RB8 basic performance microcontroller, combined with incremental PID control advantages, and gives MCU in motor soft start process control application. Practice shows that the incremental PID applications, simplifying the control ideas to improve the performance of the current loop control, limiting the starting current, smooth start-up speed, and achieved good results motor start.
基金supported by the Scientific Research Foundation of the Education Department of Zhejiang Province,China under Grant No.Y201329260the Natural Science Foundation of Zhejiang Province,China under Grant No.LZ12E07003the National Natural Science Foundation of China under Grant No.51207139
文摘A finite-time tracking control scheme is proposed in this paper based on the terminal sliding mode principle for motor servo systems with unknown nonlinear dead-zone inputs.By using the differential mean value theorem,the dead-zone is represented as a time-varying system and thus the inverse compensation approach is avoided.Then,an indirect terminal sliding mode control(ITSMC)is developed to guarantee the finite-time convergence of the tracking error and to overcome the singularity problem in the traditional terminal sliding mode control.In the proposed controller design,the unknown nonlinearity of the system is approximated by a simple sigmoid neural network,and the approximation error is diminished by employing a robust term.Comparative experiments on a turntable servo system are conducted to show the superior performance of the proposed method.
基金supported by the National High Technology Research and Development Program of China(No.2015AA042603)the Fundamental Research Funds for the Central Universities of China(No.106112014CDJZR160001)
文摘Stress controllable silicon nitride(Si Nx) films deposited by plasma enhanced chemical vapor deposition(PECVD) are reported. Low stress Si Nx films were deposited in both high frequency(HF) mode and dual frequency(HF/LF) mode. By optimizing process parameters, stress free(-0.27 MPa) Si Nx films were obtained with the deposition rate of 45.5 nm/min and the refractive index of 2.06. Furthermore, at HF/LF mode, the stress is significantly influenced by LF ratio and LF power, and can be controlled to be 10 MPa with the LF ratio of 17% and LF power of 150 W. However, LF power has a little effect on the deposition rate due to the interaction between HF power and LF power. The deposited Si Nx films have good mechanical and optical properties, low deposition temperature and controllable stress, and can be widely used in integrated circuit(IC), micro-electro-mechanical systems(MEMS) and bio-MEMS.
