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生长气压对分子束外延β-Ga_(2)O_(3)薄膜特性的影响 被引量:1
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作者 蔡文为 刘祥炜 +8 位作者 王浩 汪建元 郑力诚 王永嘉 周颖慧 杨旭 李金钗 黄凯 康俊勇 《人工晶体学报》 CAS 北大核心 2022年第7期1152-1157,共6页
本文采用分子束外延技术在具有6°斜切角的c面蓝宝石衬底上外延β-Ga_(2)O_(3)薄膜,系统研究了生长气压对薄膜特性的影响。X射线衍射谱和表面形貌分析表明,不同生长气压下所外延的薄膜表面平整,均具有(201)择优取向。并且,其结晶质... 本文采用分子束外延技术在具有6°斜切角的c面蓝宝石衬底上外延β-Ga_(2)O_(3)薄膜,系统研究了生长气压对薄膜特性的影响。X射线衍射谱和表面形貌分析表明,不同生长气压下所外延的薄膜表面平整,均具有(201)择优取向。并且,其结晶质量和生长速率均随生长气压增大而逐渐提高。通过X射线光电子能谱分析发现,生长气压增大使得氧空位的浓度大幅下降,高价态Ga比例增大,最终使得O/Ga原子数之比接近理想Ga_(2)O_(3)材料的化学计量比值。利用Tauc公式和乌尔巴赫带尾模型进行计算,结果表明随着生长气压的增大,样品的光学带隙由4.94 eV增加到5.00 eV,乌尔巴赫能量由0.47 eV下降到0.32 eV,证明了生长气压的增大有利于降低薄膜中的缺陷密度,提高薄膜晶体质量。 展开更多
关键词 β-Ga_(2)O_(3)薄膜 分子束外延 生长气压 缺陷密度 晶体质量 光学特性
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量子阱生长气压对InGaN/GaN黄光LED光电性能的影响
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作者 邱岳 丁杰 +7 位作者 张建立 莫春兰 王小兰 徐龙权 吴小明 王光绪 刘军林 江风益 《发光学报》 EI CAS CSCD 北大核心 2018年第7期961-967,共7页
采用MOCVD技术在图形化硅衬底上生长了InGaN/GaN多量子阱黄光LED外延材料,研究了不同的量子阱生长气压对黄光LED光电性能的影响。使用高分辨率X射线衍射仪(HRXRD)和荧光显微镜(FL)对晶体质量进行了表征,使用电致发光系统积分球测试对光... 采用MOCVD技术在图形化硅衬底上生长了InGaN/GaN多量子阱黄光LED外延材料,研究了不同的量子阱生长气压对黄光LED光电性能的影响。使用高分辨率X射线衍射仪(HRXRD)和荧光显微镜(FL)对晶体质量进行了表征,使用电致发光系统积分球测试对光电性能进行了表征。结果表明:随着气压升高,In的并入量略有降低且均匀性更好,量子阱中的点缺陷数目降低,但是阱垒间界面质量有所下降。在实验选取的4个气压4,6.65,10,13.3 k Pa下,外量子效率最大值随着量子阱生长气压的上升而显著升高,分别为16.60%、23.07%、26.40%、27.66%,但是13.3 k Pa下生长的样品在大电流下EQE随电流droop效应有所加剧,在20 A·cm-2的工作电流下,样品A、B、C、D的EQE分别为16.60%、19.77%、20.03%、19.45%,10 k Pa下生长的量子阱的整体光电性能最好。 展开更多
关键词 MOCVD InGaN/GaN量子阱 黄光LED 生长气压 光电性能
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低压促进的金刚石薄膜的低温生长
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作者 杨树敏 谢巧玲 +2 位作者 周兴泰 朱德彰 巩金龙 《核技术》 CAS CSCD 北大核心 2009年第1期76-80,共5页
本文研究了气压对热丝化学气相沉积金刚石薄膜沉积温度的影响。扫描电子显微镜(SEM)结果表明,同常规热丝化学气相沉积的气压(5.32kPa)相比,采用较低的气压(0.67kPa)、在500℃的低温下可获得常规气压下不大容易获得的、小颗粒的金刚石薄... 本文研究了气压对热丝化学气相沉积金刚石薄膜沉积温度的影响。扫描电子显微镜(SEM)结果表明,同常规热丝化学气相沉积的气压(5.32kPa)相比,采用较低的气压(0.67kPa)、在500℃的低温下可获得常规气压下不大容易获得的、小颗粒的金刚石薄膜。Raman结果进一步证实了这种薄膜具有同5.32kPa、700℃条件下沉积的薄膜的可比拟的质量。低温低压下高质量的金刚石薄膜的获得同气压在决定衬底表面的碳氢分子活性基团浓度的两种相反的作用密切相关。同相同温度其它气压条件相比,在500℃的衬底温度、0.67kPa气压下到达衬底表面的碳氢分子活性基团具有较高的浓度,从而导致了常规气压下不大可能获得的高质量,小颗粒金刚石薄膜的低温沉积。 展开更多
关键词 金刚石薄膜 生长气压 热丝化学气相沉积
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低残余应力HFCVD硼掺杂金刚石薄膜的制备与图形化研究 被引量:3
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作者 赵天奇 王新昶 孙方宏 《金刚石与磨料磨具工程》 CAS 2017年第1期29-33,共5页
采用拉曼光谱技术分析了不同生长气压和碳源浓度下,硅基HFCVD硼掺杂金刚石薄膜中的残余应力,并使用光刻和反应离子刻蚀技术加工出多种金刚石薄膜微结构。研究结果表明:利用热丝CVD沉积的硅基金刚石薄膜内存在残余压应力,通过优化生长气... 采用拉曼光谱技术分析了不同生长气压和碳源浓度下,硅基HFCVD硼掺杂金刚石薄膜中的残余应力,并使用光刻和反应离子刻蚀技术加工出多种金刚石薄膜微结构。研究结果表明:利用热丝CVD沉积的硅基金刚石薄膜内存在残余压应力,通过优化生长气压,可以有效降低金刚石薄膜的残余压应力,在生长气压从1.3kPa增加至6.5kPa的过程中,晶格缺陷增加,残余压应力减小。碳源浓度的变化对残余应力的影响较小,但对薄膜质量影响较大。采用低残余应力的金刚石薄膜通过光刻和反应离子刻蚀获得了悬臂梁、角加速度计、声学振膜等微结构。 展开更多
关键词 生长气压 碳源浓度 残余应力 图形化悬臂梁
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Growth of silicon nanowires in aqueous solution under atmospheric pressure 被引量:2
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作者 Nae-Man Park Chel-Jong Choi 《Nano Research》 SCIE EI CAS CSCD 2014年第6期898-902,共5页
A new method for growing silicon nanowires is presented. They were grown in an aqueous solution at a temperature of 85℃ under atmospheric pressure by using sodium methylsiliconate as a water-soluble silicon precursor... A new method for growing silicon nanowires is presented. They were grown in an aqueous solution at a temperature of 85℃ under atmospheric pressure by using sodium methylsiliconate as a water-soluble silicon precursor. The structure, morphology, and composition of the as-grown nanowires were characterized by scanning electron microscopy, transmission electron microscopy, and energy dispersive X-ray spectrometry. It was also confirmed by X-ray powder diffraction and Raman spectroscopy that the silicon nanowire has a hexagonal structure. It was possible to grow the crystalline silicon nanowires at low temperature under atmospheric pressure because potassium iodide, which was used as a gold etchant, sufficiently increased the surface energy and reactivity of gold as a metal catalyst for the reaction of the Si precursor even at low temperature. 展开更多
关键词 Silicon nanowire solution process metal catalyst hexagonal crystalline phase
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Experimental Investigation of Bubble Behaviors in Subcooled Flow Boiling 被引量:1
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作者 Peng Guan Li Jia Liaofei Yin Shuo Wang 《Journal of Thermal Science》 SCIE EI CAS CSCD 2012年第2期184-188,共5页
The experimental investigation on vapor bubble growth is performed for analyzing subcooled boiling in a vertical annular channel with inner heating surface and upward water flow under atmospheric pressure. Bulk liquid... The experimental investigation on vapor bubble growth is performed for analyzing subcooled boiling in a vertical annular channel with inner heating surface and upward water flow under atmospheric pressure. Bulk liquid mass flux ranges from 79 kg/m2s to 316 kg/m2s, and subcooling is from 40 K to 60 K. The bubble behaviors from inception to collapse are captured by High-speed photography. The performance of bubble growth recorded by the high-speed photography is given in this paper. The bubble behaviors, effect of the bubble slippage on the heat transfer, and various forces acting on the bubble are discussed. 展开更多
关键词 subcooled boiling annular channel bubble behaviors VISUALIZATION
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Anomalous moire pattern of graphene investigated by scanning tunneling microscopy: Evidence of graphene growth on oxidized Cu(111) 被引量:1
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作者 Nicolas Reckinger Eloise Van Hooijdonk Frederic Joucken Anastasia V. Tyurnina Stephane Lucas Jean-Francois Colome~ 《Nano Research》 SCIE EI CAS CSCD 2014年第1期154-162,共9页
The growth of graphene on oriented (111) copper films has been achieved by atmospheric pressure chemical vapor deposition. The structural properties of as-produced graphene have been investigated by scanning tunneli... The growth of graphene on oriented (111) copper films has been achieved by atmospheric pressure chemical vapor deposition. The structural properties of as-produced graphene have been investigated by scanning tunneling microscopy. Anomalous moir6 superstructures composed of well-defined linear periodic modulations have been observed. We report here on comprehensive and detailed studies of these particular moir6 patterns present in the graphene topography revealing that, in certain conditions, the growth can occur on the oxygen-induced reconstructed copper surface and not directly on the oriented (111) copper film as expected. 展开更多
关键词 GRAPHENE scanning tunnelingmicroscopy Cu(111) copper oxidation atmospheric pressurechemical vapor deposition
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4H-SiC trench gate MOSFETs with field plate termination 被引量:2
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作者 SONG QingWen ZHANG YuMing +1 位作者 ZHANG YiMen TANG XiaoYan 《Science China(Technological Sciences)》 SCIE EI CAS 2014年第10期2044-2049,共6页
Field plate(FP)-terminated 4H-SiC trench gate MOSFETs are demonstrated in this work.N+/P?/N?/N+multiple epitaxial layers were grown on 3-inch N+type 4H-SiC substrate by chemical vapor deposition(CVD),and then the 4H-S... Field plate(FP)-terminated 4H-SiC trench gate MOSFETs are demonstrated in this work.N+/P?/N?/N+multiple epitaxial layers were grown on 3-inch N+type 4H-SiC substrate by chemical vapor deposition(CVD),and then the 4H-SiC trench gate MOSFETs were fabricated based on the standard trench transistor fabrication.Current-voltage measurements in forward and reverse bias have been performed on different devices with and without FP protections.It is found that more than 60%of the devices protected with FP termination are able to block 850 V.The measurements also show that the devices have the small leakage currents 0.15 nA at 600 V and 2.5 nA at 800 V,respectively.The experimental results also were compared with the simulated results,which show good agreement with each other in the trend.The limited performance of the devices is mainly because of the damage induced on the trench sidewalls from the etching process and the quality of the SiO2 films.Therefore,the 4H-SiC trench gate MOSFETs are expected to be optimized by reducing the etching damage and growing high-quality SiO2 dielectric films. 展开更多
关键词 4H-SIC MOSFET TRENCH field plate
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Wrinkle-free graphene with spatially uniform electrical properties grown on hot-pressed copper 被引量:1
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作者 Jeong Hun Mun Joong Gun Oh +3 位作者 Jae Hoon Bong Hai Xu Kian Ping Loh Byung Jin Cho 《Nano Research》 SCIE EI CAS CSCD 2015年第4期1075-1080,共6页
The chemical vapor deposition (CVD) of graphene on Cu substrates enables the fabrication of large-area monolayer graphene on desired substrates. However, during the transfer of the synthesized graphene, topographic ... The chemical vapor deposition (CVD) of graphene on Cu substrates enables the fabrication of large-area monolayer graphene on desired substrates. However, during the transfer of the synthesized graphene, topographic defects are unavoidably formed along the Cu grain boundaries, degrading the electrical properties of graphene and increasing the device-to-device variability. Here, we introduce a method of hot-pressing as a surface pre-treatment to improve the thermal stability of Cu thin film for the suppression of grain boundary grooving. The flattened Cu thin film maintains its smooth surface even after the subsequent high temperature CVD process necessary for graphene growth, and the formation of graphene without wrinkles is realized. Graphene field effect transistors (FETs) fabricated using the graphene synthesized on hot-pressed Cu thin film exhibit superior field effect mobility and significantly reduced device-to-device variation. 展开更多
关键词 CVD graphene graphene synthesis graphene wrinkle graphene field effecttransistor
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Simulation of Heat Transfer with the Growth and Collapse of a Cavitation Bubble Near the Heated Wall 被引量:1
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作者 Bin Liu Jun Cai +1 位作者 Fengchao Li Xiulan Huai 《Journal of Thermal Science》 SCIE EI CAS CSCD 2013年第4期352-358,共7页
The growth and collapse behaviors of a single cavitation bubble near a heated wail and its effect on the heat transfer are numerically investigated. The present study is designed to reveal the mechanism of cavitation ... The growth and collapse behaviors of a single cavitation bubble near a heated wail and its effect on the heat transfer are numerically investigated. The present study is designed to reveal the mechanism of cavitation enhanced heat transfer from a microscopic perspective. In the simulation, the time-dependent Navier-Stokes equations are solved in an axisymmetric two-dimensional domain. The volume of fluid (VOF) method is employed to track the liquid-gas interface. It is assumed that the gas inside the bubble is compressible vapor, and the sur- rounding liquid is incompressible water. Mass transfer between two phases is ignored. The eaiculated bubble pro-files were compared to the available experimental data, and a good agreement was obtained. Then, the relationship among bubble motion, flow field and surface heat transfer coefficient was analyzed. On this basis, the effects of such factors as the initial distance between the bubble and the wall, the initial vapor pressure and the initial bubble nucleus size on the heat transfer enhancement are discussed. The present study is helpful to understand the heat transfer phenomenon in presence of cavitation bubble in liquid. 展开更多
关键词 cavitation bubble bubble growth bubble collapse heat transfer enhancement
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Laser tuned field emission of the carbon nanotube arrays grown on an optical fiber 被引量:1
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作者 WEI XianQi LI Xin +1 位作者 LIU WeiHua WANG XiaoLi 《Science China(Technological Sciences)》 SCIE EI CAS 2014年第10期1936-1940,共5页
Laser was coupled into an optical fiber,on which covered a layer of well-aligned carbon nanotubes(CNTs)serving as cathode,to tune the field emission of the cathode.CNT arrays as field emission cathode were synthesized... Laser was coupled into an optical fiber,on which covered a layer of well-aligned carbon nanotubes(CNTs)serving as cathode,to tune the field emission of the cathode.CNT arrays as field emission cathode were synthesized by chemical vapor deposition(CVD)on a naked fiber core.When the laser was coupled into the fiber,the turn-on voltage(Vto at a current density of 1 mA cm?2)decreased from 1.0 to 0.9 kV and the emission current density increased from 0.83 mA cm?2(at a 1 kV bias voltage)to3.04 mA cm?2 on 40μm diameter fiber.A photon absorption mechanism is attributed to the field emission improvement.The estimated effective work function of CNT arrays on the optical fiber decrease from 4.89 to 4.29 eV.The results show the possibility of constructing a waveguide type laser modulated field emission cathode. 展开更多
关键词 LASER field emission carbon nanotubes optical fiber
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