Three-dimensional molecular dynamics simulations are carried out to study the mechanism of nanometric processing of ion implanted monocrystalline silicon surfaces. Lattice transformation is observed during implantatio...Three-dimensional molecular dynamics simulations are carried out to study the mechanism of nanometric processing of ion implanted monocrystalline silicon surfaces. Lattice transformation is observed during implantation and nano-indentation using radial distribution function and geometric criterion damage detection. Nano-indentation is simulated to study the changes of mechanical property. Implantation analysis shows the existence of amorphous phase. Indentation process shows the lattice evolution, which is beneficial for reducing fractures during processing. The indentation results reveal the reduction of brittleness and hardness of the implanted surface. The ion fluence is in direct proportion to the damage, and inverse to the hardness of the material. Experiments of ion implar, tation, nanoindentation, nano-scratching and nanometric cutting were carried out to verify the simulation results.展开更多
The TiN, TiA1N and TiA1SiN coatings were deposited on H13 hot-worked mold steel by cathodic arc ion plating （CAIP）. The morphologies, phase compositions, and nanoindcntation parameters, such as creep hardness, elast...The TiN, TiA1N and TiA1SiN coatings were deposited on H13 hot-worked mold steel by cathodic arc ion plating （CAIP）. The morphologies, phase compositions, and nanoindcntation parameters, such as creep hardness, elastic modulus and plastic de- formation energy of the coatings were analyzed with field emission scanning electron microscopy （FESEM）, X-ray diffraction （XRD） and nanoindentation testing, respectively, and the test results were compared with equation describing the indentation model. The results show that the TiN, TiA1N and TiAISiN coating surfaces were dense and composed of TiN, TiN ＋ TiA1N, TiN ＋ Si3N4 ＋ TiAIN phases, respectively. There was no spalling or cracking on the indentation surface. The creep hardness of the TiN, TiA1N and TiAISiN coatings was 7.33, 13.5, and 15.2 GPa, respectively; the corresponding hardness measured by nanoindentation was 7.09, 15.6, and 21.7 GPa, respectively; and the corresponding elastic modulus was 201.93, 172.79, and 162.77 GPa, respectively. The contact depth and elastic modulus calculated by the indentation model were close to those of the test results, but the remaining indentation parameters showed discrepancies. The sequence of plastic deformation energy was TiN 〉 TiA1N〉TiAISiN.展开更多
基金Supported by the National Basic Research Program of China("973" Program,No.2011CB706703)
文摘Three-dimensional molecular dynamics simulations are carried out to study the mechanism of nanometric processing of ion implanted monocrystalline silicon surfaces. Lattice transformation is observed during implantation and nano-indentation using radial distribution function and geometric criterion damage detection. Nano-indentation is simulated to study the changes of mechanical property. Implantation analysis shows the existence of amorphous phase. Indentation process shows the lattice evolution, which is beneficial for reducing fractures during processing. The indentation results reveal the reduction of brittleness and hardness of the implanted surface. The ion fluence is in direct proportion to the damage, and inverse to the hardness of the material. Experiments of ion implar, tation, nanoindentation, nano-scratching and nanometric cutting were carried out to verify the simulation results.
基金supported by the Jiangsu Province Science and Technology Support Program(Industry)(Grant No.BE2014818)
文摘The TiN, TiA1N and TiA1SiN coatings were deposited on H13 hot-worked mold steel by cathodic arc ion plating （CAIP）. The morphologies, phase compositions, and nanoindcntation parameters, such as creep hardness, elastic modulus and plastic de- formation energy of the coatings were analyzed with field emission scanning electron microscopy （FESEM）, X-ray diffraction （XRD） and nanoindentation testing, respectively, and the test results were compared with equation describing the indentation model. The results show that the TiN, TiA1N and TiAISiN coating surfaces were dense and composed of TiN, TiN ＋ TiA1N, TiN ＋ Si3N4 ＋ TiAIN phases, respectively. There was no spalling or cracking on the indentation surface. The creep hardness of the TiN, TiA1N and TiAISiN coatings was 7.33, 13.5, and 15.2 GPa, respectively; the corresponding hardness measured by nanoindentation was 7.09, 15.6, and 21.7 GPa, respectively; and the corresponding elastic modulus was 201.93, 172.79, and 162.77 GPa, respectively. The contact depth and elastic modulus calculated by the indentation model were close to those of the test results, but the remaining indentation parameters showed discrepancies. The sequence of plastic deformation energy was TiN 〉 TiA1N〉TiAISiN.
