To improve the productivity of cluster tools in semiconductor fabrications,on the basis of stating scheduling problems,a try and error-based scheduling algorithm was proposed with residency time constraints and an obj...To improve the productivity of cluster tools in semiconductor fabrications,on the basis of stating scheduling problems,a try and error-based scheduling algorithm was proposed with residency time constraints and an objective of minimizing Makespan for the wafer jobs in cluster tools.Firstly,mathematical formulations of scheduling problems were presented by using assumptions and definitions of a scheduling domain.Resource conflicts were analyzed in the built scheduling model,and policies to solve resource conflicts were built.A scheduling algorithm was developed.Finally,the performances of the proposed algorithm were evaluated and compared with those of other methods by simulations.Experiment results indicate that the proposed algorithm is effective and practical in solving the scheduling problem of the cluster tools.展开更多
To solve the scheduling problem of dual-armed cluster tools for wafer fabrications with residency time and reentrant constraints,a heuristic scheduling algorithm was developed.Firstly,on the basis of formulating sched...To solve the scheduling problem of dual-armed cluster tools for wafer fabrications with residency time and reentrant constraints,a heuristic scheduling algorithm was developed.Firstly,on the basis of formulating scheduling problems domain of dual-armed cluster tools,a non-integer programming model was set up with a minimizing objective function of the makespan.Combining characteristics of residency time and reentrant constraints,a scheduling algorithm of searching the optimal operation path of dual-armed transport module was presented under many kinds of robotic scheduling paths for dual-armed cluster tools.Finally,the experiments were designed to evaluate the proposed algorithm.The results show that the proposed algorithm is feasible and efficient for obtaining an optimal scheduling solution of dual-armed cluster tools with residency time and reentrant constraints.展开更多
基金Projects(71071115,60574054) supported by the National Natural Science Foundation of China
文摘To improve the productivity of cluster tools in semiconductor fabrications,on the basis of stating scheduling problems,a try and error-based scheduling algorithm was proposed with residency time constraints and an objective of minimizing Makespan for the wafer jobs in cluster tools.Firstly,mathematical formulations of scheduling problems were presented by using assumptions and definitions of a scheduling domain.Resource conflicts were analyzed in the built scheduling model,and policies to solve resource conflicts were built.A scheduling algorithm was developed.Finally,the performances of the proposed algorithm were evaluated and compared with those of other methods by simulations.Experiment results indicate that the proposed algorithm is effective and practical in solving the scheduling problem of the cluster tools.
基金Projects(7107111561273035)supported by the National Natural Science Foundation of China
文摘To solve the scheduling problem of dual-armed cluster tools for wafer fabrications with residency time and reentrant constraints,a heuristic scheduling algorithm was developed.Firstly,on the basis of formulating scheduling problems domain of dual-armed cluster tools,a non-integer programming model was set up with a minimizing objective function of the makespan.Combining characteristics of residency time and reentrant constraints,a scheduling algorithm of searching the optimal operation path of dual-armed transport module was presented under many kinds of robotic scheduling paths for dual-armed cluster tools.Finally,the experiments were designed to evaluate the proposed algorithm.The results show that the proposed algorithm is feasible and efficient for obtaining an optimal scheduling solution of dual-armed cluster tools with residency time and reentrant constraints.
