In this paper, under the catalytic effect of nickel particles electro-deposited on Ni substrate, self-aligned carbon nanotubes were synthesized by microwave plasma chemical vapor deposition with a mixture of methane a...In this paper, under the catalytic effect of nickel particles electro-deposited on Ni substrate, self-aligned carbon nanotubes were synthesized by microwave plasma chemical vapor deposition with a mixture of methane and hydrogen gases at 510 ℃. During the process of nanotubes growth, the total pressure in the chamber was kept at 3 kPa, the microwave plasma input power was 500 W, and the flow rates of H 2 and CH 4 were 50 and 1 mL/min, respectively. The aligned features and hollow structure have been verified by scanning electron and transmission electron microscopic images. As the nanotubes grow, the nickel cap remains on the tip of the carbon nanotubes. The nanotubes′diameter is about 70 nm and they have bamboo structures. Because of the strong etching ability of hydrogen plasma and the low volume ratio of H 2/CH 4, no carbonaceous particles attached to the carbon nanotubes were found. It demonstrats that MWPCVD is a very efficient process for the synthesis of the aligned carbon nanotubes at a low temperature. The aligned CNTs grown on Ni substrate at such a low temperature are suitable for device fabrication.展开更多
Among the three main methods for the s ynthesis of carbon nanotubes(CNTs ),chemical vapor deposition(CVD)has received a great deal of attentio n since CNTs can be synthesized at sig nificantly low temperature.Plasma c...Among the three main methods for the s ynthesis of carbon nanotubes(CNTs ),chemical vapor deposition(CVD)has received a great deal of attentio n since CNTs can be synthesized at sig nificantly low temperature.Plasma chemical vapor deposition me thods can synthesize CNTs at lower te mperature than thermal CVD.But in th e usual catalytic growth of CNTs by CVD,CNTs are often tangled together and have some defects.These will limit t he property research and potential applications.How to synthesize the str aight CNTs at low temperature become s a challenging issue.In this letter,s traight carbon nanotube(CNT)films were achieved by microwave pla sma chemical vapor deposition(MWPCVD)catalyzed by round Fe-Co-Ni alloy particles on Ni substrate at 610℃.It wa s found that,in our experimental condition,the uniform growth rate along the circumference of round alloy particles plays a very important role in the gro wth of straight CNT films.And because the substrate is conducting,the straight CNT films grown at low temperature ma y have the benefit for property research and offer the possibility to use t hem in the future applications.展开更多
文摘In this paper, under the catalytic effect of nickel particles electro-deposited on Ni substrate, self-aligned carbon nanotubes were synthesized by microwave plasma chemical vapor deposition with a mixture of methane and hydrogen gases at 510 ℃. During the process of nanotubes growth, the total pressure in the chamber was kept at 3 kPa, the microwave plasma input power was 500 W, and the flow rates of H 2 and CH 4 were 50 and 1 mL/min, respectively. The aligned features and hollow structure have been verified by scanning electron and transmission electron microscopic images. As the nanotubes grow, the nickel cap remains on the tip of the carbon nanotubes. The nanotubes′diameter is about 70 nm and they have bamboo structures. Because of the strong etching ability of hydrogen plasma and the low volume ratio of H 2/CH 4, no carbonaceous particles attached to the carbon nanotubes were found. It demonstrats that MWPCVD is a very efficient process for the synthesis of the aligned carbon nanotubes at a low temperature. The aligned CNTs grown on Ni substrate at such a low temperature are suitable for device fabrication.
文摘Among the three main methods for the s ynthesis of carbon nanotubes(CNTs ),chemical vapor deposition(CVD)has received a great deal of attentio n since CNTs can be synthesized at sig nificantly low temperature.Plasma chemical vapor deposition me thods can synthesize CNTs at lower te mperature than thermal CVD.But in th e usual catalytic growth of CNTs by CVD,CNTs are often tangled together and have some defects.These will limit t he property research and potential applications.How to synthesize the str aight CNTs at low temperature become s a challenging issue.In this letter,s traight carbon nanotube(CNT)films were achieved by microwave pla sma chemical vapor deposition(MWPCVD)catalyzed by round Fe-Co-Ni alloy particles on Ni substrate at 610℃.It wa s found that,in our experimental condition,the uniform growth rate along the circumference of round alloy particles plays a very important role in the gro wth of straight CNT films.And because the substrate is conducting,the straight CNT films grown at low temperature ma y have the benefit for property research and offer the possibility to use t hem in the future applications.
